Fluid ejection devices with reduced crosstalk

Abstract

A fluid ejection apparatus includes a plurality of fluid ejectors. Each fluid ejector includes a pumping chamber, and an actuator configured to cause fluid to be ejected from the pumping chamber. The fluid ejection apparatus includes a feed channel fluidically connected to each pumping chamber; and at least one compliant structure formed in a surface of the feed channel. The at least one compliant structure has a lower compliance than the surface of the feed channel.

What is claimed is: 
     
       1. A fluid ejection apparatus comprising:
 a plurality of fluid ejectors, each fluid ejector comprising:
 a pumping chamber, 
 an actuator configured to cause fluid to be ejected from the pumping chamber, and 
 a nozzle defining an opening in a bottom surface of a substrate; 
 
 a feed channel fluidly connected to each pumping chamber; and 
 at least one compliant structure formed in a surface of the feed channel, wherein the at least one compliant structure is more compliant than the surface of the feed channel, 
 wherein the at least one compliant structure comprises:
 a recess formed below the surface of the feed channel; and 
 a membrane disposed between the recess and the feed channel, wherein the membrane seals the recess from the feed channel, and wherein the recess is vented to external atmosphere via a fluidic connection between the recess and an opening in the bottom surface of the substrate. 
 
 
     
     
       2. The fluid ejection apparatus of  claim 1 , wherein the compliant structure is formed in one or more of a bottom wall or a top wall of the feed channel. 
     
     
       3. The fluid ejection apparatus of  claim 1 , wherein the compliant structure is formed in a side wall of the feed channel. 
     
     
       4. The fluid ejection apparatus of  claim 1 , wherein each fluid ejector includes a nozzle formed in a nozzle layer. 
     
     
       5. The fluid ejection apparatus of  claim 4 , wherein the recess is formed in the nozzle layer. 
     
     
       6. The fluid ejection apparatus of  claim 4 , wherein the nozzle layer is silicon and the membrane is silicon. 
     
     
       7. The fluid ejection apparatus of  claim 1 , wherein each fluid ejector includes an actuator and a nozzle, and wherein actuation of one of the actuators causes fluid to be ejected from the corresponding nozzle. 
     
     
       8. The fluid ejection apparatus of  claim 7 , wherein actuation of one of the actuators causes a change in fluid pressure in the feed channel, and wherein the at least one compliant structure is configured to at least partially attenuate the change in fluid pressure in the feed channel. 
     
     
       9. The fluid ejection apparatus of  claim 1 , wherein the recess is a plurality of recesses. 
     
     
       10. The fluid ejection apparatus of  claim 1 , wherein the compliant structure is formed in a side wall of the feed channel. 
     
     
       11. The fluid ejection apparatus of  claim 1 , wherein actuation of one of the actuators causes a change in fluid pressure in the feed channel, and wherein the at least one compliant structure is configured to at least partially attenuate the change in fluid pressure in the feed channel. 
     
     
       12. The fluid ejection apparatus of  claim 1 , wherein each fluid ejector includes a nozzle formed in a nozzle layer, and wherein the nozzle layer is silicon and the membrane is silicon.