Semiconductor device, solid-state imaging device with tantalum oxide layer formed by diffusing a material of an electrode of necessity or a counter electrode

Abstract

A semiconductor device including a semiconductor layer that includes an active region, semiconductor elements that are formed using the active region, connection regions that are obtained by metalizing parts of the semiconductor layer in an island shape isolated from the active region, an insulation film that is formed to cover one main surface side of the semiconductor layer, electrodes that are disposed to face the semiconductor elements and the connection regions via the insulation film, and contacts that penetrate through the insulation film to be selectively formed in portions according to necessity among portions that connect the semiconductor elements or the connection regions to the electrodes.

What is claimed is: 
     
       1. A semiconductor device comprising:
 a semiconductor layer that includes an active region; 
 semiconductor elements that are comprised of the active region; 
 connection regions that are island-shaped metalized parts of the semiconductor layer and isolated from the active region; 
 an insulation film covering one main surface side of the semiconductor layer with a first side facing the semiconductor layer; 
 electrodes at a second side of the insulation film and facing the semiconductor elements and the connection regions via the insulation film; 
 a first contact penetrating through the insulation film and connecting one of the semiconductor elements or one of the connection regions to one of the electrodes; 
 counter electrodes at the second side of the insulation film at positions facing the electrodes and connected to the electrodes; 
 a laminated insulation film over the insulation film and covering the counter electrodes with a first side of the laminated insulation film facing the second side of the insulation film; 
 other semiconductor elements at a second side of the laminated insulation film which faces away from the counter electrodes; 
 a second contact penetrating through the laminated insulation film in a second portion and connecting one of the other semiconductor elements to one of the counter electrodes; and 
 between at least one of the electrodes and the counter electrode, a tantalum oxide layer having conductivity and material of the electrodes, material of the counter electrode, or materials of both the electrodes and the counter electrode diffused therein. 
 
     
     
       2. The semiconductor device according to  claim 1 , comprising a plurality of first contacts and wherein connection states between the semiconductor elements and the connection regions via the electrodes are established by positions at which the first contacts are formed. 
     
     
       3. The semiconductor device according to  claim 1 , wherein the other semiconductor elements are comprised of a front surface layer of a second semiconductor substrate. 
     
     
       4. The semiconductor device according to  claim 1 , wherein the electrodes are disposed at constant intervals within a surface of the insulation film. 
     
     
       5. The semiconductor device according to  claim 1 , further comprising:
 an upper insulation film over the semiconductor layer at a first side of the semiconductor layer opposite a second side of the semiconductor layer facing the insulation film; 
 an upper contact penetrating through the upper insulation film in a portion overlying the connection regions or in the active region; and 
 a wiring over the upper insulation film and connected to the upper contact. 
 
     
     
       6. The semiconductor device according to  claim 1 , comprising plural insulation films and plural first contacts, wherein the insulation films, the electrodes, and the first contacts are formed on both of opposite surfaces of the semiconductor layer. 
     
     
       7. The semiconductor device according to  claim 6 , wherein a support substrate is in contact with the electrodes disposed on one surface of the semiconductor layer. 
     
     
       8. The semiconductor device according to  claim 1 ; wherein:
 the semiconductor layer is patterned in the active region and the connection regions, and 
 the semiconductor elements each include a gate electrode traversing the patterned active region. 
 
     
     
       9. The semiconductor device according to  claim 1 , wherein the semiconductor elements and the other semiconductor elements are comprised of different semiconductor materials. 
     
     
       10. The semiconductor device according to  claim 1 , comprising a digital circuit comprised of the semiconductor elements connected to the other semiconductor elements via the counter electrodes and the connection regions. 
     
     
       11. The semiconductor device according to  claim 1 , wherein the semiconductor layer comprises silicon (Si), germanium (Ge), silicon germanium (SiGe), silicon carbide (SiC), carbon (C), carbon nanotube, graphene, gallium arsenide (GaAs), or indium gallium arsenide (InGaAs). 
     
     
       12. A semiconductor device comprising:
 a semiconductor layer that includes an active region; 
 first semiconductor elements comprised of the active region; 
 connection regions that are island-shaped metallized parts of the semiconductor layer and isolated from the active region; 
 an insulation film covering a first surface of the semiconductor layer with a first side of the insulation film facing the semiconductor film; 
 electrodes at a second side of the insulating film and facing the semiconductor elements and the connection regions via the insulation film; 
 a first contacts penetrating through the insulation film and connecting the semiconductor elements or the connection regions to the electrodes; 
 counter electrodes at the second side of the insulation film and at positions facing the electrodes and connected to the electrodes; 
 a laminated insulation film over the second side of the insulation film and covering the counter electrodes, the laminated insulation film having a first side facing the second side of the insulation film; 
 other semiconductor elements at a second side of the laminated insulation film which faces away from the counter electrodes; 
 second contacts penetrating through the laminated insulation film and connecting the other semiconductor elements to the counter electrodes; and 
 a tantalum oxide layer between at least one of the electrodes and at least one of the counter electrodes, the tantalum oxide layer having material of the least one of the electrodes, material of the at least one of the counter electrodes, or both, diffused into the tantalum oxide layer. 
 
     
     
       13. The semiconductor device according to  claim 12 , wherein the semiconductor elements and the other semiconductor elements are comprised of different semiconductor materials. 
     
     
       14. The semiconductor device according to  claim 12 , comprising a digital circuit comprised of the semiconductor elements connected to the other semiconductor elements via the counter electrodes and the connection regions. 
     
     
       15. The semiconductor device according to  claim 12 , wherein the semiconductor layer comprises silicon (Si), germanium (Ge), silicon germanium (SiGe), silicon carbide (SiC), carbon (C), carbon nanotube, graphene, gallium arsenide (GaAs), or indium gallium arsenide (InGaAs).