US11011441B2ActiveUtilityA1
Multilayer ceramic substrate and electronic device
Est. expiryDec 8, 2036(~10.4 yrs left)· nominal 20-yr term from priority
Inventors:Seiji Fujita
H10W 90/724H10W 70/685H10W 70/692C04B 2235/9607C04B 2237/586C04B 2111/00844H05K 1/0306B32B 18/00Y10T428/24917C04B 38/0054C04B 2111/00612C04B 2237/343H05K 3/46H05K 2201/068C04B 2237/62C04B 2237/704C04B 35/63C04B 2235/77H05K 3/4688H05K 3/4629H01L 23/15
46
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Claims
Abstract
A multilayer ceramic substrate that includes a first layer positioned at a surface of the multilayer ceramic substrate, a second layer adjacent the first layer and positioned inward of the first layer, and a surface layer electrode disposed on a surface of the first layer. The first layer has a porosity of 13% or less and a maximum pore size of 10 μm or less. The second layer has a porosity of 14% or less and a maximum pore size of 11 μm or less.
Claims
exact text as granted — not AI-modifiedThe invention claimed is:
1. A multilayer ceramic substrate comprising:
a first layer positioned at a surface of the multilayer ceramic substrate, the first layer having a first porosity of 13% or less and a first maximum pore size of 10 μm or less, and having a first composition containing a first metal oxide that is at least one selected from CuO and Ag 2 O;
a second layer adjacent the first layer and positioned inward of the surface of the multilayer ceramic substrate, the second layer having a second porosity of 14% or less and a second maximum pore size of 11 μm or less, and having a second composition containing a second metal oxide that is at least one selected from CuO and Ag 2 O; and
a surface layer electrode disposed on a surface of the first layer, wherein
the first composition of the first layer is different from the second composition of the second layer, and
a first amount of the first metal oxide in the first layer is larger than a second amount of the second metal oxide in the second layer.
2. The multilayer ceramic substrate according to claim 1 , wherein the first porosity is 8% or less.
3. The multilayer ceramic substrate according to claim 2 , wherein the first maximum pore size is 7 μm or less.
4. The multilayer ceramic substrate according to claim 1 , wherein the first maximum pore size is 7 μm or less.
5. The multilayer ceramic substrate according to claim 1 , wherein the first maximum pore size is 1 μm to 10 μm.
6. The multilayer ceramic substrate according to claim 1 , wherein the first porosity is 1% to 13%.
7. The multilayer ceramic substrate according to claim 1 , wherein the second porosity is 9% or less.
8. The multilayer ceramic substrate according to claim 1 , wherein the second porosity is 2% to 14%.
9. The multilayer ceramic substrate according to claim 1 , wherein the second maximum pore size is 2 μm to 11 μm.
10. The multilayer ceramic substrate according to claim 5 , wherein the second maximum pore size is 9 μm or less.
11. The multilayer ceramic substrate according to claim 1 , wherein the second maximum pore size is 9 μm or less.
12. The multilayer ceramic substrate according to claim 1 ,
wherein a first thermal expansion coefficient of the first layer is lower than a second thermal expansion coefficient of the second layer,
the first composition of the first layer further contains glass containing 40 weight % to 65 weight % of at least one selected from CaO, MgO, SrO, and BaO, and alumina; and
the second composition of the second layer further contains glass containing 40 weight % to 65 weight % of at least one selected from CaO, MgO, SrO, and BaO, and alumina,
an amount of the alumina in each of the first composition and the second composition is 35 weight % to 60 weight % relative to a total weight of the glass and the alumina,
an amount of the first metal oxide is 1 weight % to 10 weight % relative to the total weight of the glass and the alumina in the first composition, and
an amount of the second metal oxide is 1 weight % to 10 weight % relative to the total weight of the glass and the alumina in the second composition.
13. The multilayer ceramic substrate according to claim 1 , wherein a first thermal expansion coefficient of the first layer is lower than a second thermal expansion coefficient of the second layer, and when the first thermal expansion coefficient of the first layer is expressed as α1 [ppmK −1 ] and the second thermal expansion coefficient of the second layer is expressed as α2 [ppmK −1 ], 0.3 ≤α2−α1≤1.5.
14. An electronic device comprising the multilayer ceramic substrate according to claim 1 .
15. The multilayer ceramic substrate according to claim 1 , wherein a first thermal expansion coefficient of the first layer is lower than a second thermal expansion coefficient of the second layer.
16. The multilayer ceramic substrate according to claim 1 , wherein
the first composition of the first layer further contains glass containing 40 weight % to 65 weight % of at least one selected from CaO, MgO, SrO, and BaO, and alumina; and
the second composition of the second layer further contains glass containing 40 weight % to 65 weight % of at least one selected from CaO, MgO, SrO, and BaO, and alumina.
17. The multilayer ceramic substrate according to claim 16 , wherein
an amount of the alumina in each of the first composition and the second composition is 35 weight % to 60 weight % relative to a total weight of the glass and the alumina,
an amount of the first metal oxide is 1 weight % to 10 weight % relative to the total weight of the glass and the alumina in the first composition, and
an amount of the second metal oxide is 1 weight % to 10 weight % relative to the total weight of the glass and the alumina in the second composition.Cited by (0)
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