Grinding material and production method of grinding material

Abstract

The purpose of the present invention is to provide a grinding material which has a superior grinding rate and planarizing accuracy, with the grinding rate being less likely to be reduced over a relatively long period of time. The present invention is directed to a grinding material including a base, a grinding layer overlaid on a front face side of the base and including grinding grains and a binder for the grinding grains, and an adhesion layer overlaid on a back face side of the base, in which the grinding grains are diamond grinding grains, a wear quantity of the grinding layer as determined by a Taber abrasion test is no less than 0.03 g and no greater than 0.18 g, and, an Asker D hardness measured from a front face side of the grinding layer is no less than 80° and no greater than 98°.

The invention claimed is: 
     
       1. A grinding material comprising:
 a base; 
 a grinding layer overlaid on a front face side of the base and comprising grinding grains and a binder for the grinding grains; and 
 an adhesion layer overlaid on a back face side of the base, 
 
       wherein
 the grinding grains are diamond grinding grains, 
 the binder comprises an inorganic substance as a principal component, 
 the binder further comprises a filler comprising an inorganic oxide as a principal component, 
 a content of the filler with respect to the grinding layer is no less than 15 volume % and no greater than 75 volume %, 
 a wear quantity of the grinding layer as determined by a Taber abrasion test is no less than 0.03 g and no greater than 0.18 g, and 
 an Asker D hardness measured from a front face side of the grinding layer is no less than 82° and no greater than 98°. 
 
     
     
       2. The grinding material according to  claim 1 , wherein the grinding layer comprises a plurality of grooves on a front face. 
     
     
       3. The grinding material according to  claim 1 , wherein the grinding layer is formed by a printing process. 
     
     
       4. The grinding material according to  claim 1 , wherein the grinding material is used in a flat grinding of a substrate. 
     
     
       5. A production method of a grinding material comprising: a base; a grinding layer overlaid on a front face side of the base and comprising grinding grains and a binder for the grinding grains; and an adhesion layer overlaid on a back face side of the base, the method comprising
 forming the grinding layer by printing with a grinding layer composition, wherein 
 the grinding layer composition comprises diamond grinding grains; a forming material of the binder comprises an inorganic substance as a principal component; and a filler comprising an inorganic oxide as a principal component, and 
 the grinding layer is formed such that a wear quantity of the grinding layer as determined by a Taber abrasion test is no less than 0.03 g and no greater than 0.18 g, an Asker D hardness measured from a front face side of the grinding layer is no less than 82° and no greater than 98°, and a content of the filler with respect to the grinding layer is no less than 15 volume % and no greater than 75 volume %.