Light detection device

Abstract

A light detection device includes a package including a window, a Fabry-Perot interference filter for transmitting light incident from the window in the package, and a light detector for detecting the light transmitted by the Fabry-Perot interference filter in the package. The Fabry-Perot interference filter includes: a substrate having a first surface on the window side and a second surface on the light detector side; a first layer structure arranged on the first surface, the first layer structure having a first mirror and a second mirror; and a lens unit integrally formed on the second surface side, the lens unit for condensing the light transmitted by the first mirror and the second mirror onto the light detector.

The invention claimed is: 
     
       1. A light detection device comprising:
 a package including a window configured to allow light to enter therefrom; 
 a Fabry-Perot interference filter arranged in the package and configured to transmit the light incident from the window; and 
 a light detector arranged in the package in a state of being separated from the Fabry-Perot interference filter, the light detector configured to detect the light transmitted by the Fabry-Perot interference filter, 
 wherein the Fabry-Perot interference filter includes: 
 a substrate having a first surface on the window side and a second surface on the light detector side; 
 a first layer structure arranged on the first surface, the first layer structure having a first mirror and a second mirror facing each other via a gap, a distance between the first mirror and the second mirror being variable; and 
 a lens unit integrally formed on the second surface side and configured to condense the light transmitted by the first mirror and the second mirror onto the light detector. 
 
     
     
       2. The light detection device according to  claim 1 , wherein the lens unit is formed at a portion of the substrate on the second surface side. 
     
     
       3. The light detection device according to  claim 1 , wherein the lens unit is formed directly or indirectly on the second surface. 
     
     
       4. The light detection device according to  claim 3 ,
 wherein the Fabry-Perot interference filter further includes a second layer structure arranged on the second surface and structured to correspond to the first layer structure, 
 an opening is formed in the second layer structure, the opening through which the light transmitted by the first mirror and the second mirror passes, and 
 the lens unit is arranged in the opening. 
 
     
     
       5. The light detection device according to  claim 1 ,
 wherein the Fabry-Perot interference filter further includes a second layer structure arranged on the second surface and structured to correspond to the first layer structure, 
 an opening is formed in the second layer structure, the opening through which the light transmitted by the first mirror and the second mirror passes, and 
 the lens unit is attached to the second layer structure so as to close the opening. 
 
     
     
       6. The light detection device according to  claim 1 , wherein a perimeter of the lens unit is positioned inside a perimeter of the window and positioned outside a perimeter of a light receiving region of the light detector when viewed from a direction in which the light is incident. 
     
     
       7. The light detection device according to  claim 2 , wherein a perimeter of the lens unit is positioned inside a perimeter of the window and positioned outside a perimeter of a light receiving region of the light detector when viewed from a direction in which the light is incident. 
     
     
       8. The light detection device according to  claim 3 , wherein a perimeter of the lens unit is positioned inside a perimeter of the window and positioned outside a perimeter of a light receiving region of the light detector when viewed from a direction in which the light is incident. 
     
     
       9. The light detection device according to  claim 4 , wherein a perimeter of the lens unit is positioned inside a perimeter of the window and positioned outside a perimeter of a light receiving region of the light detector when viewed from a direction in which the light is incident. 
     
     
       10. The light detection device according to  claim 5 , wherein a perimeter of the lens unit is positioned inside a perimeter of the window and positioned outside a perimeter of a light receiving region of the light detector when viewed from a direction in which the light is incident.