P
US11043633B2ActiveUtilityPatentIndex 60

Resistive memory device having a template layer

Assignee: 4DS MEMORY LTDPriority: Mar 16, 2018Filed: Oct 19, 2020Granted: Jun 22, 2021
Est. expiryMar 16, 2038(~11.7 yrs left)· nominal 20-yr term from priority
Inventors:DESU SESHUBABU
G11C 2213/13G11C 2213/51G11C 2213/55G11C 2213/31G11C 13/0069G11C 2213/52G11C 13/004G11C 2013/0045G11C 2013/009G11C 13/0007H01L 45/08H01L 45/147H01L 45/1246H01L 45/1266H01L 45/1608H01L 45/1233H01L 45/16H10N 70/021H10N 70/011H10N 70/8416H10N 70/24H10N 70/826H10N 70/8836H10N 70/828
60
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References
22
Claims

Abstract

An electronic storage memory device is disclosed. The memory device includes a first conductive layer, and also includes a memory layer connected to the first conductive layer, where the memory layer has a variable resistance, and where no amorphous layer exists between the first conductive layer and the memory layer.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
       1. A memory device, comprising:
 a first conductive layer; and 
 a memory layer connected to the first conductive layer, wherein the memory layer has a variable resistance, and wherein no amorphous layer exists between the first conductive layer and the memory layer. 
 
     
     
       2. The memory device of  claim 1 , wherein a conductivity of the first conductive layer is greater than 10×10 6  S m −1 . 
     
     
       3. The memory device of  claim 1 , further comprising:
 a first electrode on the memory layer, wherein the first electrode and the memory layer cooperatively form a heterojunction memory structure; and 
 a retention layer between the memory layer and the first electrode, wherein the retention layer has a variable ionic conductivity, and is configured to selectively resist ionic conduction. 
 
     
     
       4. The memory device of  claim 3 , wherein a resistivity of the retention layer is less than 1×10 −4  Ohm-m. 
     
     
       5. The memory device of  claim 1 , further comprising a first electrode on the memory layer, wherein the first electrode and the memory layer cooperatively form a heterojunction memory structure, wherein a first contact formed at an interface between the first conductive layer and the memory layer is ohmic, and wherein a second contact formed at an interface between the first conductive layer and the first electrode is ohmic. 
     
     
       6. The memory device of  claim 1 , further comprising:
 a first electrode on the memory layer, wherein the first electrode and the memory layer cooperatively form a heterojunction memory structure; and 
 a first barrier layer, configured to substantially prevent conduction of ions or vacancies therethrough, wherein the first electrode is between the first barrier layer and the memory layer; and 
 a second barrier layer, configured to substantially prevent conduction of ions or vacancies therethrough, wherein the first conductive layer is between the second barrier layer and the memory layer. 
 
     
     
       7. The memory device of  claim 6 , wherein the first and second barrier layers each have a resistivity less than 1E−4 Ohm-m. 
     
     
       8. The memory device of  claim 6 , further comprising a side barrier layer, wherein the first and second barrier layers and the side barrier layer define an enclosed space, wherein the first electrode and the memory layer are within the enclosed space, and wherein ions of the first electrode and the memory layer are confined to the enclosed space by the first and second barrier layers and the side barrier layer. 
     
     
       9. A method of manufacturing a memory device, the method comprising:
 forming a first conductive layer; and 
 connecting a memory layer to the first conductive layer, wherein the memory layer has a variable resistance, and wherein no amorphous layer exists between the first conductive layer and the memory layer. 
 
     
     
       10. The method of  claim 9 , wherein a conductivity of the first conductive layer is greater than 10×10 6  S m −1 . 
     
     
       11. The method of  claim 9 , further comprising:
 forming a first electrode on the memory layer, wherein the first electrode and the memory layer cooperatively form a heterojunction memory structure; and 
 forming a retention layer between the memory layer and the first electrode, wherein the retention layer has a variable ionic conductivity, and is configured to selectively resist ionic conduction. 
 
     
     
       12. The method of  claim 11 , wherein a resistivity of the retention layer is less than 1×10 −4  Ohm-m. 
     
     
       13. The method of  claim 9 , further comprising forming a first electrode on the memory layer, wherein the first electrode and the memory layer cooperatively form a heterojunction memory structure, wherein a first contact formed at an interface between the first conductive layer and the memory layer is ohmic, and wherein a second contact formed at an interface between the first conductive layer and the first electrode is ohmic. 
     
     
       14. The method of  claim 9 , further comprising:
 forming a first electrode on the memory layer, wherein the first electrode and the memory layer cooperatively form a heterojunction memory structure; 
 forming a first barrier layer, wherein the first barrier layer is configured to substantially prevent conduction of ions or vacancies therethrough, and wherein the first electrode is between the first barrier layer and the memory layer; and 
 forming a second barrier layer, wherein the second barrier layer is configured to substantially prevent conduction of ions or vacancies therethrough, and wherein the first conductive layer is between the second barrier layer and the memory layer. 
 
     
     
       15. The method of  claim 14 , wherein the first and second barrier layers each have a resistivity less than 1E−4 Ohm-m. 
     
     
       16. The method of  claim 14 , further comprising forming a side barrier layer, wherein the first and second barrier layers and the side barrier layer define an enclosed space, wherein the first electrode and the memory layer are within the enclosed space, and wherein ions of the first electrode and the memory layer are confined to the enclosed space by the first and second barrier layers and the side barrier layer. 
     
     
       17. A method of using a memory device, the memory device comprising a first conductive layer, a memory layer connected to the first conductive layer, the memory layer having a variable resistance, wherein no amorphous layer exists between the first conductive layer and the memory layer, the method comprising:
 applying a first voltage difference across the first conductive layer and the memory layer, whereby an electric field is generated in the memory layer, and such that a resistivity state of the memory layer is changed; 
 applying a second voltage difference across the first conductive layer and the memory layer; 
 while the second voltage difference is applied, causing a first current to be conducted through an interface between the first conductive layer and the memory layer; and 
 determining the resistivity state of the memory layer based on the second voltage difference and the first current. 
 
     
     
       18. The method of  claim 17 , wherein a conductivity of the first conductive layer is greater than 10×10 6  S m −1 . 
     
     
       19. The method of  claim 17 , wherein the memory device further comprises a first electrode on the memory layer, wherein the first electrode and the memory layer cooperatively form a heterojunction memory structure, wherein the memory device further comprises a retention layer between the memory layer and the first electrode, wherein the retention layer has a variable ionic conductivity, and is configured to selectively resist ionic conduction, and wherein the method further comprises varying the ionic conductivity of the retention layer with the applied first voltage difference. 
     
     
       20. The method of  claim 19 , wherein a resistivity of the retention layer is less than 1×10 −4  Ohm-m. 
     
     
       21. The method of  claim 17 , wherein the memory device further comprises:
 a first electrode on the memory layer, wherein the first electrode and the memory layer cooperatively form a heterojunction memory structure; 
 a first barrier layer, configured to substantially prevent conduction of ions or vacancies therethrough, wherein the first electrode is between the first barrier layer and the memory layer; and 
 a second barrier layer, configured to substantially prevent conduction of ions or vacancies therethrough, wherein the first conductive layer is between the second barrier layer and the memory layer, 
 
       wherein the method further comprises causing the first current to be conducted through the first and second barrier layers. 
     
     
       22. The method of  claim 21 , wherein the first and second barrier layers each have a resistivity less than 1E−4 Ohm-m.

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