Touch substrate and manufacturing method thereof, touch display panel

Abstract

Embodiments of the present disclosure describe a touch substrate and its manufacturing method and a touch display panel. The touch substrate includes a base substrate, a touch electrode layer arranged above the base substrate and includes a plurality of first touch electrodes and a plurality of second touch electrodes, each of the first touch electrodes and each of the corresponding second touch electrodes forming a mutual capacitance, a first insulating layer arranged above the touch electrode layer, a first via hole located in the first insulating layer, and a signal wiring arranged above the first insulating layer and connected to a corresponding one of the first touch electrodes and the second touch electrodes through the first via hole.

The invention claimed is: 
     
       1. A touch substrate, comprising:
 a base substrate; 
 a touch electrode layer directly on the base substrate, the touch electrode layer comprising a plurality of first touch electrodes and a plurality of second touch electrodes, wherein ones of the first touch electrodes and corresponding ones of the second touch electrodes form a mutual capacitance; 
 a first insulating layer on the touch electrode layer, such that the touch electrode layer is between the first insulating layer and the base substrate; 
 a first via hole located in the first insulating layer; and 
 a signal wiring on the first insulating layer and connected to a corresponding one of the first touch electrodes and a corresponding one of the second touch electrodes through the first via hole. 
 
     
     
       2. The touch substrate according to  claim 1 , further comprising:
 a shield layer; and 
 a second insulating layer between the first insulating layer and the signal wiring, 
 wherein the shield layer is on the first insulating layer, 
 wherein an orthographic projection of the shield layer on the base substrate does not overlap an orthographic projection of the first via hole on the base substrate, 
 wherein the second insulating layer is on the shield layer, 
 wherein a second via hole is in the second insulating layer at a position corresponding to the first via hole, and 
 wherein the signal wiring is on the second insulating layer, and is connected to a corresponding one of the first touch electrodes and a corresponding one of the second touch electrodes through the second via hole and the first via hole. 
 
     
     
       3. The touch substrate according to  claim 2 , wherein the shield layer comprises a transparent conductive material. 
     
     
       4. The touch substrate according to  claim 1 , wherein the first touch electrodes and the second touch electrodes are in the same layer. 
     
     
       5. The touch substrate according to  claim 1 ,
 wherein one of the first touch electrodes comprises a plurality of independent electrode sub-patterns and conductive bridge lines connected to the electrode sub-patterns, 
 wherein the electrode sub-patterns are in the same layer as the second touch electrodes, and 
 wherein the conductive bridge lines are in a different layer from the second touch electrodes. 
 
     
     
       6. The touch substrate according to  claim 2 ,
 wherein an end of one of the first touch electrodes is at an edge area of the touch substrate, 
 wherein at least one end of one of the second touch electrodes is at the edge area of the touch substrate, and 
 wherein the first via hole corresponds to the end of the one of the first touch electrodes that is at the edge area of the touch substrate. 
 
     
     
       7. The touch substrate according to  claim 6 , wherein the shield layer is in an area surrounded by the edge area of the touch substrate. 
     
     
       8. The touch substrate according to  claim 1 , wherein the signal wiring has a shape of a polyline. 
     
     
       9. A touch display panel, comprising the touch substrate according to  claim 1 . 
     
     
       10. The touch display panel according to  claim 9 , further comprising:
 a black matrix comprising a plurality of first shading strips extending along a first direction and a plurality of second shading strips extending along a second direction, 
 wherein the signal wiring intersects with at least one of the first shading strips and at least one of the second shading strips. 
 
     
     
       11. The touch display panel according to  claim 10 ,
 wherein the first direction comprises the vertical direction, and the second direction comprises the horizontal direction, and 
 wherein a part of the signal wiring that intersects with the first shading strip forms an included angle between 10° to 20° with the vertical direction. 
 
     
     
       12. A method for manufacturing a touch substrate, comprising:
 forming a touch electrode layer directly on a base substrate, the touch electrode layer comprising a plurality of first touch electrodes and a plurality of second touch electrodes, wherein ones of the first touch electrodes and corresponding ones of the second touch electrodes form a mutual capacitance; 
 forming a first insulating layer on the touch electrode layer such that the touch electrode layer is between the first insulating layer and the base substrate, wherein a first via hole is in the first insulating layer; and 
 forming a signal wiring on the first insulating layer, wherein the signal wiring is connected to a corresponding one of the first touch electrodes and a corresponding one of the second touch electrodes through the first via hole. 
 
     
     
       13. The method according to  claim 12 , wherein after the forming the first insulating layer on the touch electrode layer and before the forming the signal wiring on the first insulating layer, the method further comprises:
 forming a shield layer on the first insulating layer, wherein an orthographic projection of the shield layer on the base substrate does not overlap an orthographic projection of the first via hole on the base substrate; 
 forming a second insulating layer on the shield layer; and 
 providing a second via hole in the second insulating layer at a position corresponding to the first via hole, 
 wherein the signal wiring on the second insulating layer is connected to the corresponding one of the first touch electrodes and the corresponding one of the second touch electrodes through the second via hole and the first via hole. 
 
     
     
       14. The method according to  claim 12 , wherein the forming the touch electrode layer on the base substrate comprises:
 forming patterns of the plurality of first touch electrodes and patterns of the plurality of second touch electrodes on the base substrate through a first patterning process. 
 
     
     
       15. The method according to  claim 12 , wherein the forming the touch electrode layer on the base substrate comprises:
 forming electrode sub-patterns of the plurality of first touch electrodes and patterns of the plurality of second touch electrodes on the base substrate through a second patterning process; 
 forming a third insulating layer on the electrode sub-patterns and the second touch electrodes, wherein third via holes are formed in the third insulating layer at positions corresponding to ones of the electrode sub-patterns; and 
 forming a conductive bridge line on the third insulating layer through a third patterning process, 
 wherein the conductive bridge line is connected to a corresponding electrode sub-pattern of the electrode sub-patterns through the third via hole. 
 
     
     
       16. The touch substrate according to  claim 1 ,
 wherein an end of one of the first touch electrodes is at an edge area of the touch substrate, 
 wherein at least one end of one of the second touch electrodes is at the edge area of the touch substrate, and 
 wherein the first via hole corresponds to the end of the one of the first touch electrodes that is at the edge area of the touch substrate. 
 
     
     
       17. The touch display panel according to  claim 9 , further comprising:
 a shield layer; and 
 a second insulating layer between the first insulating layer and the signal wiring, 
 wherein the shield layer is on the first insulating layer, 
 wherein an orthographic projection of the shield layer on the base substrate does not overlap an orthographic projection of the first via hole on the base substrate, 
 wherein the second insulating layer is on the shield layer, 
 wherein a second via hole is in the second insulating layer at a position corresponding to the first via hole, and 
 wherein the signal wiring is on the second insulating layer, and is connected to a corresponding one of the first touch electrodes and a corresponding one of the second touch electrodes through the second via hole and the first via hole. 
 
     
     
       18. The touch display panel according to  claim 17 , wherein the shield layer comprises a transparent conductive material. 
     
     
       19. The touch display panel according to  claim 9 , wherein the first touch electrodes and the second touch electrodes are in the same layer. 
     
     
       20. The touch display panel according to  claim 9 ,
 wherein one of the first touch electrodes comprises a plurality of independent electrode sub-patterns and conductive bridge lines connected to the electrode sub-patterns, 
 wherein the electrode sub-patterns are in the same layer as the second touch electrodes, and 
 wherein the conductive bridge lines are in a different layer from the second touch electrodes.