Evaporation device and evaporation method

Abstract

The present disclosure provides an evaporation device and an evaporation method. The evaporation device includes: an evaporation chamber; a plurality of spaced conductive baffles disposed in the evaporation chamber and dividing the evaporation chamber into a plurality of evaporation sub-chambers, the conductive baffles configured to carry charges of a first polarity; an evaporation source disposed in at least one of the evaporation sub-chambers; and a particle charging circuit disposed in at least one of the evaporation sub-chambers. The particle charging circuit is configured to control evaporation material particles generated from the evaporation source in at least one of the evaporation sub-chambers to have charges of the first polarity.

What is claimed is: 
     
       1. An evaporation device for evaporating patterns of films on a to-be-evaporated substrate, the evaporation device comprising:
 an evaporation chamber; 
 a plurality of spaced conductive baffles disposed in the evaporation chamber and dividing the evaporation chamber into a plurality of evaporation sub-chambers, wherein the conductive baffles are configured to carry charges of a first polarity; 
 an evaporation source disposed in at least one of the evaporation sub-chambers; 
 a particle charging circuit disposed in at least one of the evaporation sub-chambers; 
 wherein the particle charging circuit is configured to control evaporation material particles generated from the evaporation source in at least one of the evaporation sub-chambers to have charges of the first polarity; and 
 a transmission device disposed in the evaporation chamber, wherein the transmission device is configured to transfer the to-be-evaporated substrate along a first direction, and comprises a rail that extends along the first direction, a carrying structure for carrying the to-be-evaporated substrate is disposed at the rail, the to-be-evaporated substrate and the carrying structure have charges of a second polarity, the first polarity is opposite to the second polarity, the to-be-evaporated substrate and the carrying structure only have charges of one polarity, and a layer of insulation material is provided at the rail. 
 
     
     
       2. The evaporation device of  claim 1 , further comprising a field generation circuit configured to generate a guiding electric field; wherein the guiding electric field is configured to drive the charged evaporation material particles to be evaporated onto the substrate. 
     
     
       3. The evaporation device of  claim 2 , wherein the field generation circuit comprises a substrate charging circuit configured to control the to-be-evaporated substrate to have charges of a second polarity, and the guiding electric field is generated between the conductive baffles and the substrate. 
     
     
       4. The evaporation device of  claim 3 , further comprising a charge supply circuit configured to control the conductive baffles to have charges of the first polarity; wherein the substrate charging circuit and the charge supply circuit are two electrodes of opposite polarities. 
     
     
       5. The evaporation device of  claim 1 , wherein the particle charging circuit is an ion source. 
     
     
       6. The evaporation device of  claim 1 , further comprising a charge supply circuit configured to control the conductive baffles to have charges of the first polarity. 
     
     
       7. The evaporation device of  claim 1 , wherein the conductive baffles divide the evaporation chamber into several evaporation sub-chambers along the first direction. 
     
     
       8. The evaporation device of  claim 7 , wherein the to-be-evaporated substrate is slidably mounted on the rail. 
     
     
       9. The evaporation device of  claim 7 , wherein there are several evaporation sources arranged at equal intervals. 
     
     
       10. The evaporation device of  claim 1 , wherein each evaporation source is configured to generate luminescent material particles capable of emitting light of a specific color. 
     
     
       11. An evaporation method implemented with the evaporation device of  claim 1 , for evaporating patterns of films on a to-be-evaporated substrate, the evaporation method comprising:
 controlling the conductive baffle in one of the evaporation sub-chambers to have charges of a first polarity; 
 controlling the evaporation source in one of the evaporation sub-chambers to generate evaporation material particles; and 
 controlling the evaporation material particles generated by the evaporation source in one of the evaporation sub-chambers to have charges of the first polarity, and evaporating the charged evaporation material particles onto the substrate under action of repulsive force between same kind of charges on the conductive baffle in one of the evaporation sub-chambers and the evaporation material particles, thereby forming a pattern of one film. 
 
     
     
       12. The evaporation method of  claim 11 , further comprising: generating a guiding electric field configured to drive the charged evaporation material particles to be evaporated onto the substrate. 
     
     
       13. The evaporation method of  claim 12 , wherein the generating a guiding electric field comprises: controlling the to-be-evaporated substrate to have charges of a second polarity, thereby forming the guiding electric field between the conductive baffle in one of the evaporation sub-chambers and the substrate. 
     
     
       14. The evaporation method of  claim 11 , further comprising: transferring the to-be-evaporated substrate along the first direction, thereby enabling the charged evaporation material particles output by the evaporation source in each evaporation sub-chamber to be evaporated onto the substrate. 
     
     
       15. The evaporation method of  claim 11 , wherein the substrate is an organic electroluminescent display substrate;
 the controlling the evaporation source in one of the evaporation sub-chambers to generate evaporation material particles comprises: controlling the evaporation source in one of the evaporation sub-chambers to generate luminescent material particles capable of emitting light of a specific color; 
 the controlling the evaporation material particles generated by the evaporation source in one of the evaporation sub-chambers to have charges of the first polarity, and evaporating the charged evaporation material particles onto the substrate under action of repulsive force between same kind of charges on the conductive baffle in one of the evaporation sub-chambers and the evaporation material particles, thereby forming a pattern of one film, comprises: 
 controlling the luminescent material particles generated by the evaporation source in one of the evaporation sub-chambers to have charges of the first polarity, and 
 evaporating the charged luminescent material particles onto a corresponding sub-pixel region of the substrate under action of repulsive force between same kind of charges on the conductive baffle in one of the evaporation sub-chambers and the evaporation material particles, thereby forming a light-emitting layer.