Compound sensor

Abstract

A compound sensor that is capable of being used with robotics is provided such that the compound sensor includes a distance measurement unit and a pressure measurement unit. Further, a contact detection unit, which is dedicated to performing a detection when a measurement target contacts with a surface of the sensor is included.

What is claimed is: 
     
       1. A compound sensor comprising:
 a distance measurement unit configured to measure a distance from a measurement target by transmitting an ultrasonic wave and receiving the ultrasonic wave returned from the measurement target; 
 a pressure measurement unit configured to measure a pressure applied from the measurement target; 
 a contact detection unit configured to detect a presence of a contact with the measurement target; and 
 a switching unit configured to switch between measurement by the distance measurement unit and measurement by the pressure measurement unit; 
 wherein the switching unit performs switching to measure the distance by the distance measurement unit in a case where the contact detection unit detects a change from a state in which the contact with the measurement target is detected to a state in which the contact with the measurement target is not detected, and performs switching to measure the pressure by the pressure measurement unit in a case where the contact detection unit detects a change from a state in which the contact with the measurement target is not detected to a state in which the contact with the measurement target is detected. 
 
     
     
       2. The compound sensor according to  claim 1 , wherein
 a vibrating membrane having a piezoelectric film is included in one or more of the distance measurement unit, the pressure measurement unit, or the contact detection unit. 
 
     
     
       3. The compound sensor according to  claim 1 , wherein
 a vibrating membrane having an electrode and another electrode that faces the electrode is included in one or more of the distance measurement unit, the pressure measurement unit, or the contact detection unit. 
 
     
     
       4. The compound sensor according to  claim 3 , wherein
 one or more of the distance measurement unit, the pressure measurement unit, or the contact detection unit is a static capacitance type sensor. 
 
     
     
       5. The compound sensor according to  claim 1 , further comprising
 a unit configured to switch between a distance measurement mode in which only the distance measurement unit operates, a pressure detection mode in which the pressure measurement unit operates, and a contact detection mode in which all the distance measurement unit, the pressure measurement unit, and the contact detection unit operate. 
 
     
     
       6. The compound sensor according to  claim 1 , further comprising
 a shear force detection unit. 
 
     
     
       7. The compound sensor according to  claim 1 , wherein
 on a first substrate, a second substrate is provided via an elastic body, and 
 the distance measurement unit is provided on a face of the second substrate, which is the face opposite to a face that faces to the first substrate. 
 
     
     
       8. The compound sensor according to  claim 7 , wherein
 the second substrate is provided movable by an external force. 
 
     
     
       9. The compound sensor according to  claim 1 , wherein
 the distance measurement unit and the pressure measurement unit are provided as a single unit.