Apparatus and method for manufacturing display device

Abstract

An apparatus and a method for manufacturing a display device are provided. An apparatus for manufacturing a display device includes a first unit configured to remove impurities of a support substrate, a second unit configured to form a sacrificial layer on the support substrate, a third unit configured to form a flexible substrate on the sacrificial layer, and a fourth unit configured to form a display unit on the flexible substrate. The second unit includes a moving unit movable in a first direction to receive the support substrate, a first supply nozzle configured to spray a solution onto the support substrate to coat a graphene oxide layer, and a second supply nozzle configured to dry the graphene oxide layer coated on the support substrate while removing a portion of the graphene oxide layer, to form the sacrificial layer.

What is claimed is: 
     
       1. An apparatus for manufacturing a display device, comprising:
 a first unit configured to remove impurities of a support substrate; 
 a second unit configured to form a sacrificial layer on the support substrate; 
 a third unit configured to form a flexible substrate on the sacrificial layer; and 
 a fourth unit configured to form a display unit on the flexible substrate, 
 wherein the second unit comprises:
 a moving unit movable in a first direction to receive the support substrate; 
 a first supply nozzle configured to spray a solution, to be bonded to the support substrate by van der Waals bonding, onto the support substrate to coat a graphene oxide layer; and 
 a second supply nozzle configured to dry the graphene oxide layer coated on the support substrate while removing a portion of the graphene oxide layer, to form the sacrificial layer, 
 wherein the first supply nozzle and the second supply nozzle are spaced apart from each other by a distance and are coupled to each other in line, and 
 wherein each of the first and second supply nozzles comprises an injection port having an injection angle of about 15° to 45°. 
 
 
     
     
       2. The apparatus according to  claim 1 , wherein the distance between the first supply nozzle and the second supply nozzle is about 50 mm. 
     
     
       3. The apparatus according to  claim 1 , wherein the second unit further comprises a third supply nozzle between the first supply nozzle and the second supply nozzle. 
     
     
       4. The apparatus according to  claim 3 , wherein the third supply nozzle is configured to spray deionized water onto the graphene oxide layer of the support substrate moving in the first direction to clean the graphene oxide layer of the support substrate. 
     
     
       5. The apparatus according to  claim 4 , wherein the third supply nozzle is spaced apart from each of the first and second supply nozzles by a distance and is coupled to the first and second supply nozzles in line. 
     
     
       6. The apparatus according to  claim 5 , wherein the third supply nozzle comprises an injection port having an injection angle of about 15° to 45°. 
     
     
       7. The apparatus according to  claim 5 , wherein a distance between the first supply nozzle and the third supply nozzle is equal to a distance between the third supply nozzle and the second supply nozzle. 
     
     
       8. The apparatus according to  claim 7 , wherein the second supply nozzle comprises an air knife to spray gas at high pressure. 
     
     
       9. The apparatus according to  claim 7 , wherein each of the first to third supply nozzles comprises at least one subsidiary supply nozzle arranged in the first direction. 
     
     
       10. The apparatus according to  claim 9 ,
 wherein the subsidiary supply nozzle of each of the first to third supply nozzles comprises an injection port, and 
 wherein the injection port is repeatedly movable leftwards and rightwards from the first direction to a direction opposite to the first direction. 
 
     
     
       11. The apparatus according to  claim 9 ,
 wherein the second unit further comprises a frame to support each of the first to third supply nozzles, and 
 wherein the frame is movable in the first direction. 
 
     
     
       12. The apparatus according to  claim 9 , wherein the second unit further comprises a recovery unit to recover the solution sprayed from the first supply nozzle. 
     
     
       13. The apparatus according to  claim 1 , wherein the display unit comprises:
 a pixel circuit layer on the flexible substrate and comprising at least one transistor; and 
 a display element layer on the pixel circuit layer and electrically coupled to the transistor to emit light. 
 
     
     
       14. A method of manufacturing a display device, comprising:
 preparing a support substrate; 
 forming a sacrificial layer by spraying a solution, which is bonded to the support substrate by van der Waals bonding, onto the support substrate, thus coating a graphene oxide layer, and then drying the graphene oxide layer while removing a portion of the graphene oxide layer; 
 forming a flexible substrate on the sacrificial layer; 
 forming a display unit on the flexible substrate; 
 forming a thin-film encapsulation film on the display unit; and 
 separating the support substrate from the flexible substrate. 
 
     
     
       15. The method according to  claim 14 , wherein the forming of the sacrificial layer further comprises cleaning the graphene oxide layer by spraying deionized water onto the graphene oxide layer of the support substrate moving in a first direction. 
     
     
       16. The method according to  claim 15 , wherein the forming of the sacrificial layer comprises drying the graphene oxide layer while removing a portion of the graphene oxide layer using an air knife configured to spray gas at high pressure. 
     
     
       17. The method according to  claim 16 , wherein the preparing of the support substrate comprises removing surface impurities of the support substrate. 
     
     
       18. The method according to  claim 17 , wherein the surface impurities of the support substrate are removed by spraying oxygen plasma onto a surface of the support substrate. 
     
     
       19. The method according to  claim 14 , wherein the forming of the display unit comprises:
 forming a pixel circuit layer comprising at least one transistor on the flexible substrate; and 
 forming a display element layer comprising a light emitting element on the pixel circuit layer, the light emitting element being electrically coupled to the transistor to emit light. 
 
     
     
       20. An apparatus for manufacturing a display device, comprising:
 a first unit configured to remove impurities of a support substrate; 
 a second unit configured to form a sacrificial layer on the support substrate; 
 a third unit configured to form a flexible substrate on the sacrificial layer; and 
 a fourth unit configured to form a display unit on the flexible substrate, 
 wherein the second unit comprises:
 a moving unit movable in a first direction to receive the support substrate; 
 a first supply nozzle configured to spray a solution, which is bondable to the support substrate by van der Waals bonding, onto the support substrate, to coat a graphene oxide layer; and 
 a second supply nozzle configured to dry the graphene oxide layer coated on the support substrate while removing a portion of the graphene oxide layer, to form the sacrificial layer, 
 wherein the first supply nozzle and the second supply nozzle are spaced apart from each other by a distance and are coupled to each other in line.