Substrate bonding structure and substrate bonding method

Abstract

A device (2) is formed on a main surface of a substrate (1). The main surface of the substrate (1) is bonded to the undersurface of the counter substrate (14) via the bonding member (11,12,13) in a hollow state. A circuit (17) and a bump structure (26) are formed on the top surface of the counter substrate (14). The bump structure (26) is positioned in a region corresponding to at least the bonding member (11,12,13), and has a higher height than that of the circuit (17).

The invention claimed is: 
     
       1. A substrate bonding structure comprising:
 a substrate having a main surface; 
 a device formed on the main surface of the substrate; 
 a counter substrate having an undersurface facing the main surface and a top surface opposite to the undersurface; 
 a bonding member bonding the main surface of the substrate to the undersurface of the counter substrate in a hollow state; and 
 a circuit and a bump structure formed on the top surface of the counter substrate, 
 wherein the bump structure has a higher height than a height of the circuit, 
 the bonding member includes a metal sealing frame formed to surround the device and hermetically seal a space on the device, and 
 the bump structure positioned in a region corresponding to the metal sealing frame is formed to surround the device in plan view. 
 
     
     
       2. The substrate bonding structure according to  claim 1 , wherein the bonding member includes a connection bump bonding the device to the circuit. 
     
     
       3. The substrate bonding structure according to  claim 2 , wherein the bump structure is positioned in a region corresponding to at least the bonding member. 
     
     
       4. The substrate bonding structure according to  claim 1 , wherein the bump structure is positioned in a region corresponding to at least the bonding member. 
     
     
       5. A method for bonding substrates comprising:
 forming a device on a main surface of a substrate; 
 forming a bonding member on the main surface of the substrate; 
 forming, on a counter substrate, a circuit and a bump structure that is positioned in a region corresponding to at least the bonding member and has a higher height than a height of the circuit; and 
 pressurizing the bump structure with a surface plate so that the surface plate does not contact the circuit and bonding the main surface of the substrate to the undersurface of the counter substrate via the bonding member in a hollow state. 
 
     
     
       6. The method for bonding substrates according to  claim 5 , wherein the bonding member is formed by plating. 
     
     
       7. The method for bonding substrates according to  claim 5 , wherein the bonding member is formed by using metal particle paste. 
     
     
       8. The method according to  claim 5 , wherein
 the pressurizing bonds the main surface of the substrate to the undersurface of the counter substrate via the bonding member in the hollow state to hermetically seal a space on the device with a sealing frame surrounding the device. 
 
     
     
       9. A substrate bonding structure comprising:
 a substrate having a main surface; 
 a device formed on the main surface of the substrate; 
 a counter substrate having an undersurface facing the main surface and a top surface opposite to the undersurface; 
 a connection bump extending from the main surface of the substrate to the undersurface of the counter substrate and bonding the main surface of the substrate to the undersurface of the counter substrate in a hollow state; and 
 a circuit and bump structures formed on the top surface of the counter substrate, 
 wherein the connection bump connects the device to the circuit, 
 the bump structures are positioned in a region corresponding to at least the connection bump, and have a higher height than a height of the circuit, and 
 at least one of the bump structures has a different shape in plan view from the corresponding connection bump, and has a center position of gravity in plan view corresponding to that of the corresponding connection bump. 
 
     
     
       10. A substrate bonding structure comprising:
 a substrate having a main surface; 
 a device formed on the main surface of the substrate; 
 a counter substrate having an undersurface facing the main surface and a top surface opposite to the undersurface; 
 a connection bump extending from the main surface of the substrate to the undersurface of the counter substrate and bonding the main surface of the substrate to the undersurface of the counter substrate in a hollow state; and 
 a circuit and bump structures formed on the top surface of the counter substrate, 
 wherein the connection bump connects the device to the circuit, 
 the bump structures are positioned in a region corresponding to at least the connection bump, and have a higher height than a height of the circuit, and 
 at least one of the bump structures is composed of multiple members, and has a center position of gravity in plan view corresponding to that of the corresponding connection bump.