Method for manufacturing display device and display device including ESD countermeasure

Abstract

In a step of forming a plurality of control lines composed of a first metal layer a first metal layer branch line is formed. In a step of forming a plurality of power source lines composed of a second metal layer a second metal layer connecting portion is formed that connects each power source line with the first metal layer branch line via an opening of a first insulating film. In a step of forming a plurality of data signal lines composed of a third metal layer that is formed on a second insulating film the first metal layer branch line formed in the opening of the first insulating and the second metal layer connecting portion formed in an opening of the second insulating film are etched.

The invention claimed is: 
     
       1. A manufacturing method for a display device including
 a display region, 
 a frame region positioned around the display region, 
 a plurality of control lines, 
 a plurality of power source lines parallel to the plurality of control lines, 
 a plurality of data signal lines intersecting the plurality of control lines, 
 the plurality of control lines, the plurality of power source lines, and the plurality of data signal lines being provided from the display region to the frame region, 
 a control circuit forming a longitudinal direction in a direction orthogonal to the plurality of control lines in the frame region, the control circuit being configured to input a control signal to the plurality of control lines, 
 a base insulating film, 
 a first metal layer forming the plurality of control lines 
 a first insulating film, 
 a second metal layer forming the plurality of power source lines, 
 a second insulating film, and 
 a third metal layer forming the plurality of data signal lines, 
 the base insulating film, the first metal layer, the first insulating film, the second metal layer, the second insulating film, and the third metal layer being layered in this order, and 
 the plurality of control lines being electrically connected to the control circuit via the second metal layer or the third metal layer in the frame region, the method comprising: 
 a base insulating film step of forming the base insulating film; 
 a first metal layer step of forming the first metal layer and patterning the first metal layer, thereby forming the plurality of control lines and forming, in a gap between respective formation positions of the control circuit and the display region, a first metal layer branch line branching from each of the plurality of control lines toward a control line of the plurality of control lines adjacent thereto; 
 a first insulating film step of forming the first insulating film and patterning the first insulating film, thereby forming, in the first insulating film, a first insulating film first opening overlapping the first metal layer branch line; 
 a second metal layer step of forming the second metal layer and patterning the second metal layer, thereby forming the plurality of power source lines and, in the gap, forming a second metal layer branch line branching from each of the plurality of power source lines and forming a second metal layer connecting portion connected to the first metal layer branch line via the first insulating film first opening; 
 a second insulating film step of forming the second insulating film and patterning the second insulating film, thereby forming, in the second insulating film, a second insulating film first opening exposing the first insulating film first opening, a portion of the second metal layer branch line, and a portion of the second metal layer connecting portion; and 
 a third metal layer step of forming the third metal layer, patterning the third metal layer, and etching the first metal layer branch line formed in the first insulating film first opening, and the second metal layer branch line and the second metal layer connecting portion formed in the second insulating film first opening. 
 
     
     
       2. The manufacturing method for a display device according to  claim 1 , wherein control lines, among the plurality of control lines, adjacent to each other share the first metal layer branch line. 
     
     
       3. The manufacturing method for a display device according to  claim 1 , wherein the first metal layer branch line has a width orthogonal to an extending direction thereof that is smaller than a width of the first insulating film first opening in the same direction. 
     
     
       4. The manufacturing method for a display device according to  claim 1 , wherein, in the third metal layer step, the second metal layer branch line and the second metal layer connecting portion are divided. 
     
     
       5. The manufacturing method for a display device according to  claim 1 , wherein, in the second metal layer step, a constriction is formed in a portion from the second metal layer branch line to the second metal layer connecting portion. 
     
     
       6. The manufacturing method for a display device according to  claim 5 , wherein, in the third metal layer step, the portion where the constriction is formed is also etched. 
     
     
       7. The manufacturing method for a display device according to  claim 1 ,
 wherein, in the first insulating film step, a first insulating film second opening is formed in the first insulating film, overlapping the first metal layer branch line, 
 in the second metal layer step, an island-shaped second metal layer is formed including the first insulating film second opening, 
 in the second insulating film step, a second insulating film second opening is formed in the second insulating film, including the first insulating film second opening and surrounded by the island-shaped second metal layer, and 
 in the third metal layer step, the first metal layer branch line formed in the first insulating film second opening and the island-shaped second metal layer formed in the second insulating film second opening are etched. 
 
     
     
       8. The manufacturing method for a display device according to  claim 7 , wherein, in the first metal layer step, a constriction is formed in the first metal layer branch line at a position exposed by the first insulating film second opening. 
     
     
       9. The manufacturing method for a display device according to  claim 1 , further comprising:
 between the base insulating film step and the first metal layer step, 
 a semiconductor layer step of forming a semiconductor layer and patterning the semiconductor layer, thereby forming the semiconductor layer; and 
 a gate insulating film step of forming a gate insulating film, 
 wherein, in the semiconductor layer step, a first island-shaped semiconductor layer formed by the semiconductor layer is formed at a position extending across the second metal layer branch line and the second metal layer connecting portion, 
 in the first insulating film step, a two-layer insulating film first opening and a two-layer insulating film second opening are formed in the gate insulating film and the first insulating film, overlapping the first island-shaped semiconductor layer, 
 in the second metal layer step, the second metal layer branch line and the second metal layer connecting portion are formed divided, 
 the second metal layer branch line is connected to the first island-shaped semiconductor layer via the two-layer insulating film first opening, 
 the second metal layer connecting portion is connected to the first island-shaped semiconductor layer via the two-layer insulating film second opening, 
 the second metal layer branch line and the second metal layer connecting portion are electrically connected via the first island-shaped semiconductor layer, 
 in the second insulating film step, the second insulating film first opening is formed further including at least one of the two-layer insulating film first opening and the two-layer insulating film second opening, or a second insulating film first separation opening including at least one of the two-layer insulating film first opening and the two-layer insulating film second opening is formed, and 
 in the third metal layer step, the second metal layer branch line or the second metal layer connecting portion formed in the second insulating film first separation opening is etched. 
 
     
     
       10. The manufacturing method for a display device according to  claim 1 , further comprising:
 between the base insulating film step and the first metal layer step, 
 a semiconductor layer step of forming a semiconductor layer and patterning the semiconductor layer, thereby forming the semiconductor layer; and 
 a gate insulating film step of forming a gate insulating film, 
 wherein, in the semiconductor layer step, a second island-shaped semiconductor layer formed by the semiconductor layer is formed at a position between a first metal layer first branch line and a first metal layer second branch line, 
 in the first metal layer step, the first metal layer first branch line branching from a first control line to a second control line of adjacent control lines among the plurality of control lines, and the first metal layer second branch line branching from the second control line to the first control line are formed as the first metal layer branch line, 
 in the first insulating film step, 
 a first insulating film third opening is formed in the first insulating film, overlapping the first metal layer first branch line, 
 a first insulating film fourth opening is formed in the first insulating film, overlapping the first metal layer second branch line, and 
 a two-layer insulating film third opening and a two-layer insulating film fourth opening are formed in the gate insulating film and the first insulating film, overlapping the second island-shaped semiconductor layer, 
 in the second metal layer step, 
 a first island-shaped second metal layer and a second island-shaped second metal layer are formed extending across the first metal layer first branch line and the second island-shaped semiconductor layer and extending across the first metal layer second branch line and the second island-shaped semiconductor layer, respectively, 
 the first metal layer first branch line and the first island-shaped second metal layer are connected via the first insulating film third opening, 
 the first metal layer second branch line and the second island-shaped second metal layer are connected via the first insulating film fourth opening, and 
 the second island-shaped semiconductor layer and the first island-shaped second metal layer are connected via the two-layer insulating film third opening, and 
 the second island-shaped semiconductor layer and the second island-shaped second metal layer are connected via the two-layer insulating film fourth opening, 
 in the second insulating film step, a second insulating film third opening is formed including at least one of the first insulating film third opening, the first insulating film fourth opening, the two-layer insulating film third opening, and the two-layer insulating film fourth opening, and 
 in the third metal layer step, the first island-shaped second metal layer or the second island-shaped second metal layer formed in the second insulating film third opening is etched. 
 
     
     
       11. A display device comprising:
 a display region; 
 a frame region positioned around the display region; 
 a plurality of control lines; 
 a plurality of power source lines parallel to the plurality of control lines; 
 a plurality of data signal lines intersecting the plurality of control lines, 
 the plurality of control lines, the plurality of power source lines, and the plurality of data signal lines being provided from the display region to the frame region; 
 a control circuit forming a longitudinal direction in a direction orthogonal to the plurality of control lines in the frame region, the control circuit being configured to input a control signal to the plurality of control lines; 
 a base insulating film; 
 a first metal layer forming the plurality of control lines; 
 a first insulating film; 
 a second metal layer forming the plurality of power source lines; 
 a second insulating film; and 
 a third metal layer forming the plurality of data signal lines, 
 the base insulating film, the first metal layer, the first insulating film, the second metal layer, the second insulating film, and the third metal layer being layered in this order, and 
 the plurality of control lines being electrically connected to the control circuit via the second metal layer or the third metal layer in the frame region, 
 wherein, in a gap between the control circuit and the display region, a first metal layer first branch line branching from a first control line to a second control line of adjacent control lines of the plurality of control lines, and a first metal layer second branch line branching from the second control line to the first control line are formed, 
 the first metal layer first branch line and the first metal layer second branch line face each other with the first insulating film first opening formed in the first insulating film interposed therebetween, 
 a second metal layer intersecting portion including a power source line, among the plurality of power source lines, between the first control line and the second control line, and formed by the second metal layer is formed between the first control line and the second control line, intersecting the first metal layer first branch line and the first metal layer second branch line, and 
 in the second insulating film, a second insulating film first opening is formed including the first insulating film first opening, and the second metal layer intersecting portion is formed surrounding the first insulating film first opening and the second insulating film first opening. 
 
     
     
       12. The display device according to  claim 11 ,
 wherein a second metal layer branch line is formed branching from the power source line of the plurality of power source lines and connecting to the second metal layer intersecting portion and 
 the second metal layer intersecting portion includes an annular portion surrounding the first insulating film first opening and the second insulating film first opening. 
 
     
     
       13. The display device according to  claim 12 ,
 wherein the second metal layer branch line includes a constriction between the annular portion and a branch point from the power source line of the plurality of power source lines. 
 
     
     
       14. The display device according to  claim 11 , further comprising:
 an island-shaped first metal layer formed by the first metal layer, between the first metal layer first branch line and the first metal layer second branch line, and overlapping the power source line of the plurality of power source lines with the first insulating film interposed therebetween, 
 wherein the first metal layer first branch line and the island-shaped first metal layer face each other with the first insulating film first opening interposed therebetween, and 
 the first metal layer second branch line and the island-shaped first metal layer face each other with the first insulating film second opening interposed therebetween. 
 
     
     
       15. The display device according to  claim 14 , further comprising:
 a second island-shaped semiconductor layer formed between the island-shaped first metal layer and the first metal layer second branch line; 
 a first island-shaped second metal layer formed with a portion thereof overlapping the island-shaped first metal layer and another portion thereof overlapping the second island-shaped semiconductor layer; and 
 a second island-shaped second metal layer formed with a portion thereof overlapping the first metal layer second branch line and another portion thereof overlapping the second island-shaped semiconductor layer. 
 
     
     
       16. The display device according to  claim 11 , further comprising:
 a second metal layer branch line branching from the power source line of the plurality of power source lines; and 
 a first island-shaped semiconductor layer formed by a semiconductor layer, extending across the second metal layer intersecting portion and the second metal layer branch line.