Multiple module chip manufacturing arrangement

Abstract

A unitary wafer assembly arrangement for the application of solder balls onto a substrate for subsequent use in the electronics industry. This wafer tool assembly comprises a number of modules connected to one another and all serviced by a robotic arm to transfer processed wafers from one module to another. The tool assembly comprises a load port and pre-aligner module, a binder module, a solder ball mount module and a reflow module. A wafer inspection and repair module arrangement is also part of the tool assembly.

The invention claimed is: 
     
       1. A unitary wafer assembly arrangement for the application of solder balls onto a wafer substrate for subsequent use in the electronics industry, the wafer assembly arrangement comprising: an arrangement of wafer treatment modules interconnected to and serviced by a central wafer handling robot to provide a unitary system, the modules including a pre-aligner loadport module for receipt of wafers to be treated, a binder module of the application of a fluid binder onto an upper surface of the wafer, a solder ball mount module for the application of a plurality of solder balls onto the wafer, an inspection module including a review analysis, and insertion and extraction arrangement of misap-plied solder balls deposited on the wafer, and a reflow module for the heating and securing the solder balls onto an arrangement of pads on the wafer; collectively identified herewith, wherein the loadport module is arranged for receipt of untreated wafers, the binder module is arranged for holding each wafer by support pin vacuum arrangement during a binder spray deposition and binder cleanup operation; and wherein a pre-alignment operation of the wafer in a loadport and transference operation to a vacuum cup pin support arrangement in the solder wall mount module for optical alignment review by a plurality of cameras, including a solder balls distributing stencil, and including a solder ball distribution reservoir over the stencil for controlled release of solder balls onto a wafer there below, and including improper solder ball and excess binder retrieval means, and a three station reflow module for the heat treatment of the loaded wafer, or final transfer to the loadport for finished wafer collection. 
     
     
       2. The wafer assembly arrangement as recited in  claim 1 , wherein the fluid binder is applied to the wafer at room temperature or an elevated temperature, by a nozzle arrangement supported on a gantry movably disposed over a wafer supported thereunder, and excessive binder is collected and utilized for a further wafer. 
     
     
       3. The wafer assembly arrangement as recited in  claim 2 , wherein a plurality of solder balls are disposed as an array, onto a spaced pattern of solder ball engagement locations on the wafer after the solder balls having been filtered through a vertical array of foraminous solder ball alignment plates movably disposed above the wafer. 
     
     
       4. The wafer assembly arrangement as recited in  claim 3 , wherein an air knife is driven transversely across the array of solder balls on the surface of the wafer so as to displace any extraneous solder balls from the surface of the wafer. 
     
     
       5. The wafer assembly arrangement as recited in  claim 4 , wherein any extraneous solder balls are passed to a one-way channel for collection and subsequent reuse on a further wafer. 
     
     
       6. A wafer assembly arrangement for the application of solder balls onto a wafer substrate for subsequent use in the electronics industry, the wafer assembly arrangement comprising: an arrangement of individual wafer treatment modules interconnected to and serviced by a central wafer handling robot for moving the wafers from module to module, the modules including a pre-aligner module for receipt of wafers to be treated, a binder module of the application of a fluid binder onto an upper surface of the wafer, a solder ball mount module for the application of a plurality of solder balls onto the wafer, a reflow module for the heating and securing the solder balls onto an arrangement of pads on the wafer, and an inspection module with a review and analysis of solder balls deposited upon the wafer, wherein the processing comprises: loadport module for receipt of the untreated wafers, the binder module for holding each wafer by a support pin vacuum arrangement during a binder spray deposition and binder cleanup operation; a pre-alignment of the wafer in a
 loadport and transference to the vacuum cup pin support arrangement in the solder ball mount module for optical alignment review by a plurality of cameras, including a solder ball distributing stencil, a solder ball distribution reservoir over the stencil for controlled release of solder balls onto the wafer there below, improper solder ball and excess binder retrieval means, a three station reflow module for the heat treatment of the loaded wafer, and finally transfer to the loadport for finished wafer collection. 
 
     
     
       7. The wafer assembly arrangement as recited in  claim 6 , wherein the fluid binder is applied to the wafer by a nozzle arrangement supported on a primary computer-controlled gantry movably disposed over a wafer supported thereunder. 
     
     
       8. The wafer assembly arrangement as recited in  claim 7 , wherein a plurality of solder balls are disposed as an array, onto a spaced pattern of solder ball engagement locations on the wafer after the solder balls having been fallen through a vertical array of foraminous solder ball alignment plates vibratively disposed above the wafer. 
     
     
       9. The wafer assembly arrangement as recited in  claim 8 , wherein an air knife, supported on the primary gantry, is driven transversely across the array of solder balls on the surface of the wafer so as to displace any extraneous solder balls from the surface of the wafer. 
     
     
       10. The wafer assembly arrangement as recited in  claim 9 , wherein any extraneous solder balls are passed under a one-way valve to a one-way channel for collection and subsequent reuse on a further wafer.