Sensor including deformable parts

Abstract

According to one embodiment, a sensor includes first and second structure bodies, and a detector. The first structure body includes a supporter, and first and second deformable parts supported by the supporter. The second deformable part has at least one of a second length less than a first length of the first deformable part, a second width greater than a first width of the first deformable part, a second thickness greater than a first thickness of the first deformable part, a second Young's modulus greater than a first Young's modulus of the first deformable part, or a second spring constant greater than a first spring constant of the first deformable part. The second structure body is connected to the first structure body. A liquid is provided between the first and second structure bodies. The detector outputs a signal corresponding to a deformation of the first or second deformable part.

What is claimed is: 
     
       1. A sensor, comprising:
 a first structure body including
 a supporter, 
 a first deformable part supported by the supporter, and 
 a second deformable part supported by the supporter, the second deformable part having at least one of a second length less than a first length of the first deformable part, a second width greater than a first width of the first deformable part, a second thickness greater than a first thickness of the first deformable part, a second Young's modulus greater than a first Young's modulus of the first deformable part, or a second spring constant greater than a first spring constant of the first deformable part; 
 
 a second structure body connected to the first structure body, a liquid being provided between the first structure body and the second structure body; and 
 a detector outputting a signal corresponding to a deformation of at least one of the first deformable part or the second deformable part, 
 the first structure body further including an Nth deformable part supported by the supporter, 
 N being an integer of 3 or more, 
 a (N−1)th deformable part being between the first deformable part and the Nth deformable part, 
 the Nth deformable part extending along the (N−1)th deformable part, 
 the (N−1)th deformable part having a (N−1)th length, a (N−1)th width, and a (N−1)th thickness, 
 the (N−1)th length being greater than the (N−1)th width and greater than the (N−1)th thickness, 
 the Nth deformable part having at least one of an Nth length less than the (N−1)th length, an Nth width greater than the (N−1)th width, or an Nth thickness greater than the (N−1)th thickness, 
 the Nth length being greater than the Nth width and greater than the Nth thickness. 
 
     
     
       2. The sensor according to  claim 1 , wherein
 the first length is a length of the first deformable part along a first direction, 
 the second length is a length of the second deformable part along the first direction, 
 a second direction from the first deformable part toward the second deformable part crosses the first direction, 
 the first width is a length of the first deformable part along the second direction, 
 the second width is a length of the second deformable part along the second direction, 
 a third direction crosses a plane including the first and second directions, 
 the first thickness is a length of the first deformable part along the third direction, and 
 the second thickness is a length of the second deformable part along the third direction. 
 
     
     
       3. The sensor according to  claim 2 , wherein
 the first deformable part includes two first side portions along the first direction, 
 the two first side portions are separated from the supporter and separated from the second deformable part, 
 the second deformable part includes two second side portions along the first direction, and 
 the two second side portions are separated from the supporter and separated from the first deformable part. 
 
     
     
       4. The sensor according to  claim 2 , wherein
 a first end portion of the first deformable part is supported by the supporter, 
 a first other-end portion of the first deformable part is supported by the supporter, 
 a second end portion of the second deformable part is supported by the supporter, and 
 a second other-end portion of the second deformable part is supported by the supporter. 
 
     
     
       5. The sensor according to  claim 4 , wherein
 a direction from the first other-end portion toward the first end portion is along the first direction. 
 
     
     
       6. The sensor according to  claim 5 , wherein
 the first structure body has a slit provided between the first deformable part and the second deformable part, 
 the first deformable part has a first side surface being continuous from the first end portion to the first other-end portion, 
 a direction from the second other-end portion toward the second end portion is along the first direction, 
 the second deformable part has a second side surface being continuous from the second end portion to the second other-end portion, and 
 the slit is a gap between the first side surface and the second side surface. 
 
     
     
       7. The sensor according to  claim 1 , wherein
 the first structure body has a slit provided between the first deformable part and the second deformable part, and a slit provided between the second deformable part and the supporter. 
 
     
     
       8. The sensor according to  claim 1 , wherein
 the first structure body further includes a second counter deformable part supported by the supporter, 
 the second counter deformable part extends along the first deformable part, 
 at least a portion of the first deformable part is provided between the second deformable part and the second counter deformable part, 
 the second counter deformable part has at least one of a second counter length less than the first length, a second counter width greater than the first width, a second counter thickness greater than the first thickness, a second counter Young's modulus that is greater than the first Young's modulus, or a second counter spring constant that is greater than the first spring constant, and 
 the second counter length is greater than the second counter width and greater than the second counter thickness. 
 
     
     
       9. The sensor according to  claim 8 , wherein
 the first structure body further includes an Nth counter deformable part supported by the supporter, 
 the first deformable part is between the Nth deformable part and the Nth counter deformable part, 
 a (N−1)th counter deformable part is between the first deformable part and the Nth counter deformable part, 
 the Nth counter deformable part extends along the (N−1)th counter deformable part, 
 the (N−1)th counter deformable part has a (N−1)th counter length, a (N−1)th counter width, and a (N−1)th counter thickness, 
 the (N−1)th counter length is greater than the (N−1)th counter width and greater than the (N−1)th counter thickness, 
 the Nth counter deformable part has at least one of an Nth counter length less than the (N−1)th counter length, an Nth counter width greater than the (N−1)th counter width, or an Nth counter thickness greater than the (N−1)th counter thickness, and 
 the Nth counter length is greater than the Nth counter width and greater than the Nth counter thickness. 
 
     
     
       10. The sensor according to  claim 9 , wherein
 a shape formed of boundaries between the supporter and the first to Nth deformable parts and boundaries between the supporter and the second to Nth counter deformable parts is substantially circular. 
 
     
     
       11. The sensor according to  claim 1 , wherein
 the deformation corresponds to a sound wave applied to the second structure body. 
 
     
     
       12. The sensor according to  claim 1 , wherein
 the first length is not less than 2 times and not more than 100 times the first width. 
 
     
     
       13. The sensor according to  claim 1 , wherein
 the first length is not less than 100 times and not more than 3000 times the first thickness. 
 
     
     
       14. The sensor according to  claim 1 , wherein
 the first deformable part includes a first surface and a second surface, 
 the first surface is between the second surface and the liquid, and 
 a contact angle of the second surface with the liquid is greater than a contact angle of the first surface with the liquid. 
 
     
     
       15. The sensor according to  claim 14 , wherein
 the second deformable part includes a third surface and a fourth surface, 
 the third surface is between the fourth surface and the liquid, and 
 a contact angle of the fourth surface with the liquid is greater than a contact angle of the third surface with the liquid. 
 
     
     
       16. The sensor according to  claim 1 , wherein
 the first deformable part includes a first layer and a second layer, 
 the first layer is between the second layer and the liquid, and 
 the first layer does not include fluorine and the second layer includes fluorine, or a concentration of fluorine included in the first layer is less than a concentration of fluorine included in the second layer. 
 
     
     
       17. A sensor, comprising:
 a first structure body including
 a supporter, and 
 a first deformable part supported by the supporter; and 
 
 a second structure body connected to the first structure body, 
 a liquid being provided between the first structure body and the second structure body, 
 the first deformable part including a first surface and a second surface, 
 the first surface being between the second surface and the liquid, 
 a contact angle of the second surface with the liquid being greater than a contact angle of the first surface with the liquid. 
 
     
     
       18. The sensor according to  claim 17 , wherein
 the first deformable part includes a first layer and a second layer, 
 the first layer is between the second layer and the liquid, and 
 the first layer does not include fluorine and the second layer includes fluorine, or a concentration of fluorine included in the first layer is less than a concentration of fluorine included in the second layer. 
 
     
     
       19. The sensor according to  claim 17 , wherein
 the first structure body further includes a second deformable part and a second counter deformable part, 
 the second deformable part is supported by the supporter and extends along the first deformable part, 
 the second counter deformable part is supported by the supporter and extends along the first deformable part, and 
 at least a portion of the first deformable part is provided between the second deformable part and the second counter deformable part. 
 
     
     
       20. A sensor, comprising:
 a first structure body including
 a supporter, 
 a first deformable part supported by the supporter, and 
 a second deformable part supported by the supporter, the second deformable part extending along the first deformable part; 
 
 a second structure body connected to the first structure body, a liquid being provided between the first structure body and the second structure body; and 
 a detector outputting a signal corresponding to a deformation of at least one of the first deformable part or the second deformable part, 
 the first deformable part including a first side surface facing the second deformable part, 
 the first side surface including a first unevenness, 
 the second deformable part including a second side surface facing the first deformable part, 
 the second side surface including a second unevenness along the first unevenness, 
 the first structure body further including an Nth deformable part supported by the supporter, 
 N being an integer of 3 or more, 
 a (N−1)th deformable part being between the first deformable part and the Nth deformable part, 
 wherein
 the first structure body further includes a second counter deformable part, 
 the second counter deformable part is supported by the supporter and extends along the first deformable part, and 
 at least a portion of the first deformable part is provided between the second deformable part and the second counter deformable part. 
 
 
     
     
       21. The sensor according to  claim 20 , wherein
 the first unevenness includes a first protrusion and a first depression, 
 the second unevenness includes a second depression and a second protrusion, 
 the second depression faces the first protrusion, and 
 the second protrusion faces the first depression.