US11454857B2ActiveUtilityA1

Folded waveguide phase shifters

93
Assignee: TAIWAN SEMICONDUCTOR MFG CO LTDPriority: Aug 17, 2018Filed: Nov 19, 2020Granted: Sep 27, 2022
Est. expiryAug 17, 2038(~12.1 yrs left)· nominal 20-yr term from priority
G02F 1/01708G02F 1/011G02F 1/2257G02F 1/212G02F 1/025G02F 1/015G02F 2203/50
93
PatentIndex Score
2
Cited by
21
References
20
Claims

Abstract

In an embodiment, a phase shifter includes: a light input end; a light output end; a p-type semiconductor material, and an n-type semiconductor material contacting the p-type semiconductor material along a boundary area, wherein the boundary area is greater than a length from the light input end to the light output end multiplied by a core width of the phase shifter.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
       1. A phase shifter, comprising:
 a light input end; 
 a light output end; 
 a first semiconductor material, and 
 a second semiconductor material different from the first semiconductor material, the second semiconductor material contacting the first semiconductor material along a boundary area, wherein the boundary area forms multi-pointed stars when viewed from a longitudinal cross sectional view extending from the light input end to the light output end. 
 
     
     
       2. The phase shifter of  claim 1 , wherein the boundary area extends from one end of a core width of the phase shifter to a second end of the core width of the phase shifter. 
     
     
       3. The phase shifter of  claim 2 , wherein the phase shifter comprises a core height perpendicular to the core width of the phase shifter, wherein the boundary area extends from one end of the core height of the phase shifter to a second end of the core height of the phase shifter. 
     
     
       4. The phase shifter of  claim 1 , wherein the boundary area is greater than a length from the light input end to the light output end multiplied by a core width of the phase shifter. 
     
     
       5. The phase shifter of  claim 1 , further comprising a core and a cladding, wherein the core is part of a folded waveguide phase shifter in which light may propagate through from the light input end to the light output end. 
     
     
       6. The phase shifter of  claim 5 , wherein the core is made of silicon and the cladding is made of silicon oxide. 
     
     
       7. The phase shifter of  claim 5 , wherein the core comprises a material selected from: silicon (Si), germanium (Ge), gallium arsenide (GaAs) and indium phosphide (InP). 
     
     
       8. The phase shifter of  claim 5 , wherein the cladding comprises a material selected from: silicon oxide (SiOx), germanium oxide (GeOx), silicon nitride (SiNx) and silicon-oxynitride (SiON). 
     
     
       9. A modulator, comprising:
 a first waveguide; and 
 a second waveguide, comprising:
 a light input end, 
 a light output end, 
 a first semiconductor material, and 
 a second semiconductor material different from the first semiconductor material, the second semiconductor material contacting the first semiconductor material along a boundary area, wherein the first waveguide is different than the second waveguide, wherein a first light output of the first waveguide is combined with a second light output from the light output end, wherein the boundary area forms a plurality of discrete multi-pointed shapes when viewed from a longitudinal cross sectional view extending from the light input end to the light output end, wherein each of the plurality of discrete multi-pointed shapes comprises a multi-pointed star. 
 
 
     
     
       10. The modulator of  claim 9 , wherein the first waveguide and the second waveguide are part of a processor. 
     
     
       11. The modulator of  claim 9 , wherein the boundary area is greater than a length from the light input end to the light output end multiplied by a core width of the second waveguide. 
     
     
       12. The modulator of  claim 9 , wherein the modulator comprises a Mach-Zehnder modulator that utilizes a folded waveguide phase shifter. 
     
     
       13. The modulator of  claim 9 , wherein the modulator comprises at least one of two arms optically coupled between cascaded Y-branch couplers disposed in a semiconductor material. 
     
     
       14. A method, comprising:
 connecting a first waveguide with a second waveguide different than the first waveguide, wherein the second waveguide comprises:
 a light input end, 
 a light output end, 
 a first semiconductor material, and 
 a second semiconductor material, different from the first semiconductor material, the second semiconductor material contacting the first semiconductor material along a boundary area, wherein the boundary area forms a plurality of discrete multi-pointed shapes when viewed from a longitudinal cross sectional view extending from the light input end to the light output end, wherein each of the plurality of discrete multi-pointed shapes comprises a multi-pointed star; and 
 
 combining a first light output of the first waveguide with a second light output from the light output end. 
 
     
     
       15. The method of  claim 14 , comprising:
 connecting the light input end to a first waveguide light input end. 
 
     
     
       16. The method of  claim 14 , comprising:
 forming the boundary area with a zig zag from the light input end to the light output end. 
 
     
     
       17. The method of  claim 14 , wherein the boundary area is greater than a length from the light input end to the light output end multiplied by a core width of the second waveguide. 
     
     
       18. The method of  claim 14 , comprising:
 forming the boundary area from one end of the core width of the second waveguide to a second end of a core width of the second waveguide. 
 
     
     
       19. The method of  claim 14 , comprising:
 connecting an input light source to the light input end. 
 
     
     
       20. The method of  claim 18 , wherein the boundary area is greater than a length from the light input end to the light output end multiplied by a core width of the second waveguide.

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