Maintenance methods for polishing systems and articles related thereto

Abstract

Chemically impregnated applicators used to provide hydrophobic surfaces on chemical mechanical polishing system components and related application methods. A method of forming a hydrophobic coating on a surface of a polishing system component includes cleaning the surface of the polishing system component to remove a polishing fluid residue therefrom and applying a hydrophobicity causing chemical solution to the surface of the polishing system component.

The invention claimed is: 
     
       1. A hydrophobicity applicator, comprising:
 an applicator article formed of an open-celled foam material which has a porosity of 60% or more, a density of 50 kg/m 3  or more, and a glass transition temperature (Tg) of 25° C. or less; and 
 a hydrophobicity causing chemical solution, wherein the applicator article and the hydrophobicity causing chemical solution are packaged in a sealed container. 
 
     
     
       2. The hydrophobicity applicator of  claim 1 , wherein the applicator article, as disposed in the sealed container, is impregnated with the hydrophobicity causing chemical solution. 
     
     
       3. The hydrophobicity applicator of  claim 1 , wherein the sealed container comprises a membrane layer separating the applicator article from the hydrophobicity causing chemical solution. 
     
     
       4. The hydrophobicity applicator of  claim 1 , wherein an amount by weight of the hydrophobicity causing chemical solution within the sealed container is 0.9× or less than an amount by weight which would be needed to fully saturate the applicator article. 
     
     
       5. The hydrophobicity applicator of  claim 1 , wherein a surface coating formed by the hydrophobicity causing chemical solution has a water contact angle of 85° or more. 
     
     
       6. The hydrophobicity applicator of  claim 1 , wherein the applicator article is secured to a fastener layer, and wherein the fastener layer comprises one portion of a hook and loop fastening system. 
     
     
       7. The hydrophobicity applicator of  claim 1 , wherein the hydrophobicity causing chemical solution comprises a siloxane, a fluoroacrylate, or a combination thereof. 
     
     
       8. The hydrophobicity applicator of  claim 7 , wherein the hydrophobicity causing chemical solution further comprises a hydrocarbon solvent, a fluorosolvent, or a combination thereof. 
     
     
       9. The hydrophobicity applicator of  claim 8 , wherein the hydrophobicity causing chemical solution further comprises a carboxylic acid, a carboxylic salt, a carboxylic acid derivative, or a combination thereof.