Actuator device with first and second movabale parts and connection portions having a depression portion and a protrusion portion

Abstract

An actuator device includes a support part, a first movable part, and a second movable part. The second movable part includes a pair of first connection portions positioned on both sides of the first movable part on a first axis and connected to a pair of first connecting parts, and a pair of second connection portions positioned on both sides of the first movable part on a second axis and connected to a pair of second connecting parts. Each of the second connection portions includes a portion having a width larger than a width of a portion of the second movable part other than the first and second connection portions. An inner edge of each of the second connection portions, includes a depression recessed in a second axis direction, and an outer edge of each of the pair of second connection portions, includes a protrusion protruding in the second axis direction.

The invention claimed is: 
     
       1. An actuator device comprising:
 a support part; 
 a first movable part; 
 a second movable part formed in a frame shape and arranged so as to surround the first movable part; 
 a pair of first connecting parts arranged on both sides of the first movable part in a first axis direction parallel to a first axis and connecting the first movable part to the second movable part so that the first movable part can swing around the first axis; and 
 a pair of second connecting parts arranged on both sides of the second movable part in a second axis direction parallel to a second axis orthogonal to the first axis and connecting the second movable part to the support part so that the second movable part can swing around the second axis, 
 wherein the second movable part includes a pair of first connection portions positioned on both sides of the first movable part on the first axis and connected to the pair of first connecting parts, and a pair of second connection portions positioned on both sides of the first movable part on the second axis and connected to the pair of second connecting parts, 
 each of the pair of second connection portions includes a portion having a width larger than a width of a portion of the second movable part other than the pair of first connection portions and the pair of second connection portions when viewed in a direction orthogonal to the first and second axes, and 
 an inner edge of each of the pair of second connection portions, when viewed in the direction orthogonal to the first and second axes, includes a depression portion recessed in the second axis direction, and an outer edge of each of the pair of second connection portions, when viewed in the direction orthogonal to the first and second axes, includes a protrusion portion protruding in the second axis direction, 
 wherein the second movable part further includes a pair of first linear portions positioned on both sides of one of the pair of second connection portions in the first axis direction and connected to the one of the pair of second connection portions, and a pair of second linear portions positioned on both sides of the other of the pair of second connection portions in the first axis direction and connected to the other of the pair of second connection portions, and 
 each of the pair of first linear portions and each of the pair of second linear portions extend in the first axis direction. 
 
     
     
       2. The actuator device according to  claim 1 ,
 wherein the second movable part further includes a pair of third linear portions positioned on sides opposite to the one of the pair of second connection portions with respect to the pair of first linear portions and connected to the pair of first linear portions, and a pair of fourth linear portions positioned on sides opposite to the other of the pair of second connection portions with respect to the pair of second linear portions and connected to the pair of second linear portions, and 
 when viewed in the direction orthogonal to the first and second axes, one of the pair of third linear portions extends in a direction inclined with respect to the first and second axes, the other of the pair of third linear portions extends symmetrically to the one of the pair of third linear portions with respect to the second axis, one of the pair of fourth linear portions extends symmetrically to the one of the pair of third linear portions with respect to the first axis, and the other of the pair of fourth linear portions extends symmetrically to the one of the pair of fourth linear portions with respect to the second axis. 
 
     
     
       3. The actuator device according to  claim 1 ,
 wherein the depression portion and the protrusion portion are positioned on the second axis when viewed in the direction orthogonal to the first and second axes. 
 
     
     
       4. The actuator device according to  claim 1 ,
 wherein each of the pair of second connection portions includes a portion having a width larger than a width of each of the pair of first connection portions. 
 
     
     
       5. The actuator device according to  claim 1 ,
 wherein the depression portion is provided over a region of each of the pair of second connection portions facing the first movable part when viewed in the direction orthogonal to the first and second axes. 
 
     
     
       6. The actuator device according to  claim 1 ,
 wherein each of the pair of second connecting parts extends meanderingly when viewed in the direction orthogonal to the first and second axes. 
 
     
     
       7. The actuator device according to  claim 1 , further comprising:
 a spiral coil provided to the second movable part so as to surround the first movable part; and 
 a magnetic field generator that generates a magnetic field to act on the coil. 
 
     
     
       8. The actuator device according to  claim 7 ,
 wherein the coil includes a portion extending in a direction orthogonal to the magnetic field. 
 
     
     
       9. The actuator device according to  claim 7 ,
 wherein the coil is made of a metal material of which the density is higher than the density of a material of the second movable part, and is embedded in the second movable part. 
 
     
     
       10. An actuator device comprising:
 a support part; 
 a first movable part; 
 a second movable part formed in a frame shape and arranged so as to surround the first movable part; 
 a spiral coil provided to the second movable part so as to surround the first movable part; 
 a magnetic field generator that generates a magnetic field to act on the coil; 
 a pair of first connecting parts arranged on both sides of the first movable part in a first axis direction parallel to a first axis and connecting the first movable part to the second movable part so that the first movable part can swing around the first axis; and 
 a pair of second connecting parts arranged on both sides of the second movable part in a second axis direction parallel to a second axis orthogonal to the first axis and connecting the second movable part to the support part so that the second movable part can swing around the second axis, 
 wherein the second movable part includes a pair of first connection portions positioned on both sides of the first movable part on the first axis and connected to the pair of first connecting parts, and a pair of second connection portions positioned on both sides of the first movable part on the second axis and connected to the pair of second connecting parts, 
 each of the pair of second connection portions includes a portion having a width larger than a width of a portion of the second movable part other than the pair of first connection portions and the pair of second connection portions when viewed in a direction orthogonal to the first and second axes, 
 an inner edge of each of the pair of second connection portions, when viewed in the direction orthogonal to the first and second axes, includes a depression portion recessed in the second axis direction, and an outer edge of each of the pair of second connection portions, when viewed in the direction orthogonal to the first and second axes, includes a protrusion portion protruding in the second axis direction, and 
 the coil is arranged at a position closer to the outer edge than the inner edge of each of the pair of second connection portions on the second axis when viewed in the direction orthogonal to the first and second axes. 
 
     
     
       11. The actuator device according to  claim 10 ,
 wherein the second movable part further includes a fifth linear portion connected to one of the pair of first connection portions and one of the pair of second connection portions, a sixth linear portion connected to the one of the pair of first connection portions and the other of the pair of second connection portions, a seventh linear portion connected to the other of the pair of first connection portions and the one of the pair of second connection portions, and an eighth linear portion connected to the other of the pair of first connection portions and the other of the pair of second connection portions, and 
 when viewed in the direction orthogonal to the first and second axes, the fifth linear portion extends in a direction inclined with respect to the first and second axes, the sixth linear portion extends symmetrically to the fifth linear portion with respect to the first axis, the seventh linear portion extends symmetrically to the fifth linear portion with respect to the second axis, and the eighth linear portion extends symmetrically to the sixth linear portion with respect to the second axis. 
 
     
     
       12. The actuator device according to  claim 10 ,
 wherein the depression portion and the protrusion portion are positioned on the second axis when viewed in the direction orthogonal to the first and second axes. 
 
     
     
       13. The actuator device according to  claim 10 ,
 wherein the coil includes a portion extending in a direction orthogonal to the magnetic field. 
 
     
     
       14. The actuator device according to  claim 10 ,
 wherein the coil is made of a metal material of which the density is higher than the density of a material of the second movable part, and is embedded in the second movable part. 
 
     
     
       15. The actuator device according to  claim 10 ,
 wherein each of the pair of second connection portions includes a portion having a width larger than a width of each of the pair of first connection portions. 
 
     
     
       16. The actuator device according to  claim 10 ,
 wherein the depression portion is provided over a region of each of the pair of second connection portions facing the first movable part when viewed in the direction orthogonal to the first and second axes. 
 
     
     
       17. The actuator device according to  claim 10 ,
 wherein each of the pair of second connecting parts extends meanderingly when viewed in the direction orthogonal to the first and second axes. 
 
     
     
       18. The actuator device according to  claim 10 ,
 wherein the second movable part further includes a pair of first linear portions positioned on both sides of one of the pair of second connection portions in the first axis direction and connected to the one of the pair of second connection portions, and a pair of second linear portions positioned on both sides of the other of the pair of second connection portions in the first axis direction and connected to the other of the pair of second connection portions, and 
 each of the pair of first linear portions and each of the pair of second linear portions extend in the first axis direction. 
 
     
     
       19. The actuator device according to  claim 18 ,
 wherein the second movable part further includes a pair of third linear portions positioned on sides opposite to the one of the pair of second connection portions with respect to the pair of first linear portions and connected to the pair of first linear portions, and a pair of fourth linear portions positioned on sides opposite to the other of the pair of second connection portions with respect to the pair of second linear portions and connected to the pair of second linear portions, and 
 when viewed in the direction orthogonal to the first and second axes, one of the pair of third linear portions extends in a direction inclined with respect to the first and second axes, the other of the pair of third linear portions extends symmetrically to the one of the pair of third linear portions with respect to the second axis, one of the pair of fourth linear portions extends symmetrically to the one of the pair of third linear portions with respect to the first axis, and the other of the pair of fourth linear portions extends symmetrically to the one of the pair of fourth linear portions with respect to the second axis. 
 
     
     
       20. An actuator device comprising:
 a support part; 
 a first movable part; 
 a second movable part formed in a frame shape and arranged so as to surround the first movable part; 
 a pair of first connecting parts arranged on both sides of the first movable part in a first axis direction parallel to a first axis and connecting the first movable part to the second movable part so that the first movable part can swing around the first axis; and 
 a pair of second connecting parts arranged on both sides of the second movable part in a second axis direction parallel to a second axis orthogonal to the first axis and connecting the second movable part to the support part so that the second movable part can swing around the second axis, 
 wherein the second movable part includes a pair of first connection portions positioned on both sides of the first movable part on the first axis and connected to the pair of first connecting parts, and a pair of second connection portions positioned on both sides of the first movable part on the second axis and connected to the pair of second connecting parts, 
 each of the pair of second connection portions includes a portion having a width larger than a width of a portion of the second movable part other than the pair of first connection portions and the pair of second connection portions when viewed in a direction orthogonal to the first and second axes, and 
 an inner edge of each of the pair of second connection portions, when viewed in the direction orthogonal to the first and second axes, includes a depression portion recessed in the second axis direction, and an outer edge of each of the pair of second connection portions, when viewed in the direction orthogonal to the first and second axes, includes a protrusion portion protruding in the second axis direction, 
 wherein the second movable part further includes a first linear portion connected to one of the pair of first connection portions and one of the pair of second connection portions, a second linear portion connected to the one of the pair of first connection portions and the other of the pair of second connection portions, a third linear portion connected to the other of the pair of first connection portions and the one of the pair of second connection portions, and a fourth linear portion connected to the other of the pair of first connection portions and the other of the pair of second connection portions, and 
 when viewed in the direction orthogonal to the first and second axes, the first linear portion extends in a direction inclined with respect to the first and second axes, the second linear portion extends symmetrically to the first linear portion with respect to the first axis, the third linear portion extends symmetrically to the first linear portion with respect to the second axis, and the fourth linear portion extends symmetrically to the second linear portion with respect to the second axis. 
 
     
     
       21. The actuator device according to  claim 20 ,
 wherein the depression portion and the protrusion portion are positioned on the second axis when viewed in the direction orthogonal to the first and second axes. 
 
     
     
       22. The actuator device according to  claim 20 ,
 wherein each of the pair of second connection portions includes a portion having a width larger than a width of each of the pair of first connection portions. 
 
     
     
       23. The actuator device according to  claim 20 ,
 wherein the depression portion is provided over a region of each of the pair of second connection portions facing the first movable part when viewed in the direction orthogonal to the first and second axes. 
 
     
     
       24. The actuator device according to  claim 20 ,
 wherein each of the pair of second connecting parts extends meanderingly when viewed in the direction orthogonal to the first and second axes. 
 
     
     
       25. The actuator device according to  claim 20 , further comprising:
 a spiral coil provided to the second movable part so as to surround the first movable part; and 
 a magnetic field generator that generates a magnetic field to act on the coil. 
 
     
     
       26. The actuator device according to  claim 25 ,
 wherein the coil includes a portion extending in a direction orthogonal to the magnetic field. 
 
     
     
       27. The actuator device according to  claim 25 ,
 wherein the coil is made of a metal material of which the density is higher than the density of a material of the second movable part, and is embedded in the second movable part.