Sensor and electronic device

Abstract

According to one embodiment, a sensor includes a base body, a first supporter fixed to the base body, and a first movable part separated from the base body. The first movable part includes a first movable base part supported by the first supporter, a second movable base part connected with the first movable base part, and a first movable beam. The first movable beam includes a first beam, a first movable conductive part, and a first connection region. The first beam includes a first beam portion, a second beam portion, and a third beam portion between the first beam portion and the second beam portion. The first beam portion is connected with the first movable base part. The second beam portion is connected with the second movable base part. The first connection region connects the third beam portion and the first movable conductive part.

What is claimed is: 
     
       1. A sensor, comprising:
 a base body; 
 a first supporter fixed to the base body; and 
 a first movable part separated from the base body, 
 the first movable part including
 a first movable base part supported by the first supporter, 
 a second movable base part connected with the first movable base part, and 
 a first movable beam, 
 
 the first movable beam including
 a first beam, 
 a first movable conductive part, and 
 a first connection region, 
 
 the first beam including a first beam portion, a second beam portion, and a third beam portion between the first beam portion and the second beam portion, 
 the first beam portion being connected with the first movable base part, 
 the second beam portion being connected with the second movable base part, 
 the first connection region connecting the third beam portion and the first movable conductive part, 
 a length of the first movable conductive part along a first direction being greater than a length of the first connection region along the first direction, 
 the first direction being from the first beam portion toward the second beam portion, 
 wherein
 the first movable part further includes a second movable beam and a connection part, 
 the connection part is located between the first movable base part and the second movable base part and connects the second movable base part with the first movable base part, 
 a position of the connection part in a second direction crossing the first direction is between a position of the second movable beam in the second direction and a position of the first movable beam in the second direction, 
 the second movable beam includes
 a second beam, 
 a second movable conductive part, and 
 a second connection region, 
 
 the second beam includes a fourth beam portion, a fifth beam portion, and 
 
 a sixth beam portion between the fourth beam portion and the fifth beam portion,
 the fourth beam portion is connected with the first movable base part, 
 the fifth beam portion is connected with the second movable base part, 
 a direction from the fourth beam portion toward the fifth beam portion is along the first direction, 
 the second connection region connects the sixth beam portion and the second movable conductive part, and 
 a length of the second movable conductive part along the first direction is greater than a length of the second connection region along the first direction. 
 
 
     
     
       2. The sensor according to  claim 1 , further comprising:
 a first counter conductive part that is fixed to the base body and faces the first movable conductive part. 
 
     
     
       3. The sensor according to  claim 2 , further comprising:
 a second counter conductive part that is fixed to the base body and faces the first movable conductive part, 
 at least a portion of the first movable conductive part being between the second counter conductive part and the first counter conductive part in a direction crossing the first direction. 
 
     
     
       4. The sensor according to  claim 3 , further comprising:
 a third counter conductive part that is fixed to the base body and faces the first movable conductive part, 
 a portion of the first movable conductive part being between the third counter conductive part and the first counter conductive part in the direction crossing the first direction, 
 at least a portion of the first connection region being between the second counter conductive part and the third counter conductive part in the first direction. 
 
     
     
       5. The sensor according to  claim 4 , wherein
 the first movable conductive part and the second counter conductive part have a comb electrode configuration, and 
 the first movable conductive part and the third counter conductive part have a comb electrode configuration. 
 
     
     
       6. The sensor according to  claim 2 , wherein
 the first movable conductive part and the first counter conductive part have a comb electrode configuration. 
 
     
     
       7. The sensor according to  claim 3 , further comprising:
 a controller, 
 the controller applying an alternating current voltage between the second counter conductive part and the first movable conductive part, 
 the controller being configured to detect a change of a resonant frequency of the first movable beam by detecting a signal between the first counter conductive part and the first movable conductive part. 
 
     
     
       8. The sensor according to  claim 1 , wherein
 the connection part is between the second movable conductive part and the first movable conductive part in the second direction, 
 the second beam is between the second movable conductive part and the connection part in the second direction, and 
 the first beam is between the connection part and the first movable conductive part in the second direction. 
 
     
     
       9. The sensor according to  claim 4 , further comprising:
 a fourth counter conductive part that is fixed to the base body and faces the second movable conductive part. 
 
     
     
       10. The sensor according to  claim 9 , further comprising:
 a fifth counter conductive part that is fixed to the base body and faces the second movable conductive part, 
 at least a portion of the second movable conductive part being between the fourth counter conductive part and the fifth counter conductive part in the second direction. 
 
     
     
       11. The sensor according to  claim 10 , further comprising:
 a sixth counter conductive part that is fixed to the base body and faces the second movable conductive part, 
 a portion of the second movable conductive part being between the sixth counter conductive part and the fourth counter conductive part in the second direction, 
 at least a portion of the second connection region being between the fifth counter conductive part and the sixth counter conductive part in the first direction. 
 
     
     
       12. The sensor according to  claim 11 , wherein
 the second movable conductive part and the fifth counter conductive part have a comb electrode configuration, and 
 the second movable conductive part and the sixth counter conductive part have a comb electrode configuration. 
 
     
     
       13. The sensor according to  claim 9 , wherein
 the second movable conductive part and the fourth counter conductive part have a comb electrode configuration. 
 
     
     
       14. The sensor according to  claim 10 , further comprising:
 a controller, 
 the controller applying an alternating current voltage between the second counter conductive part and the first movable conductive part and between the fifth counter conductive part and the second movable conductive part, 
 the controller being configured to detect a value relating to a difference between a resonant frequency of the first movable beam and a resonant frequency of the second movable beam by detecting a signal between the first counter conductive part and the first movable conductive part and a signal between the fourth counter conductive part and the second movable conductive part. 
 
     
     
       15. The sensor according to  claim 1 , wherein
 the first movable part further includes a movable member connected to the second movable base part, and 
 the movable member is larger than the first movable conductive part. 
 
     
     
       16. The sensor according to  claim 10 , further comprising:
 a controller, 
 the first movable part further including a movable member connected to the second movable base part, 
 the movable member being larger than the first movable conductive part, 
 the controller applying an alternating current voltage between the second counter conductive part and the first movable conductive part and between the fifth counter conductive part and the second movable conductive part, 
 the controller being configured to detect a value relating to a difference between a resonant frequency of the first movable beam and a resonant frequency of the second movable beam by detecting a signal between the first counter conductive part and the first movable conductive part and a signal between the fourth counter conductive part and the second movable conductive part, 
 the value corresponding to a movement of the movable member. 
 
     
     
       17. The sensor according to  claim 1 , further comprising:
 a second supporter fixed to the base body; and 
 a second movable part supported by the second supporter and separated from the base body, 
 the sensor being configured to detect an angle based on a signal corresponding to a movement of the second movable part. 
 
     
     
       18. The sensor according to  claim 17 , further comprising:
 a lid part connected to the base body, 
 the first supporter, the first movable part, the second supporter, and the second movable part being between the base body and the lid part, 
 a space that is less than 1 atmosphere being surrounded with the base body and the lid part. 
 
     
     
       19. An electronic device, comprising:
 the sensor according to  claim 1 ; and 
 a circuit controller configured to control a circuit based on a signal obtained from the sensor.