High density galvo housing for use with multiple laser beams

Abstract

A multi-beam laser processing system comprising a plurality of laser beams and a plurality of pairs of selectively rotatable mirrors for laser beam steering where each laser beam is independently steered by one pair of selectively rotatable mirrors. The plurality of pairs of mirrors are positioned adjacent to one another within a single main body. The main body is positioned directly opposing the beams, the mirrors directing each laser beam simultaneously to a selected location on a substrate. The main body comprises a plurality of vents; a plurality of passages; a plurality of openings; and a plurality of galvos nested densely within the main body. The galvos direct multiple laser beams to a substrate wherein the fields of view overlap and the laser beam focal point remains small and precise.

What is claimed: 
     
       1. A galvo block, the block comprising:
 a main body; 
 a plurality of vents in the main body; 
 a plurality of passages in the main body; 
 a plurality of openings in the main body; 
 a plurality of galvos nested densely within the main body; and 
 wherein the main body comprises a solid rectangular block machined to remove selected areas of material from the block to form any one of the vents, passages and a plurality of openings and wherein the block has no substantially closed or full internal walls or partitions between adjacent galvos nested densely within the main body. 
 
     
     
       2. The block of  claim 1  and further comprising a cooling system. 
     
     
       3. The block of  claim 2  wherein the cooling system comprises a liquid cooling system and/or an airflow cooling system. 
     
     
       4. The block of  claim 1  wherein the plurality of passages are enclosed and extend along a length of the main body to support a liquid flow component of a liquid cooling system. 
     
     
       5. The block of  claim 1  wherein the vents are replicated proximate each galvo nested within the main body and wherein the vents direct airflow for an airflow cooling system. 
     
     
       6. The block of  claim 1  wherein each opening in the plurality of openings in the main body supports nesting of one galvo in the plurality of galvos within the main body. 
     
     
       7. The block of  claim 6  wherein the plurality of galvos comprises at least independently and selectively positionable galvo systems and the plurality of galvos are nested linearly and adjacent to one another within the main body. 
     
     
       8. The block of  claim 7  wherein the plurality of galvos are nested such that the distance between the centers of each adjacent galvo is approximately 92 mm for a 30 mm galvo. 
     
     
       9. The block of  claim 7  positioned in a laser processing system and operable to steer a corresponding plurality of laser beams concurrently to laser process a substrate. 
     
     
       10. A multi-galvo housing system comprising:
 A metal block machined to house at least two galvo systems therewithin wherein each galvo system comprises at least one mirror and a corresponding motor for steering said mirror and wherein each galvo system is configured to steer a laser beam, each laser beam from a minimal wattage, at 1000 watt power or greater, and wherein the block keeps the galvo systems sufficiently aligned so as to concurrently direct at least two laser beams from the at least two galvo systems within the block and the at least two laser beams onto a work piece to process the work piece in a selected manner, the metal block controlling mechanical stability and heat build-up sufficiently to avoid distortion of the block and to maintain alignment of the at least one mirror of each galvo system within the block for laser processing, and 
 wherein the block has no substantially closed or full internal wall or partitions between adjacent galvos. 
 
     
     
       11. The galvo system of  claim 10  wherein the block controls heat build-up by comprising at least one cooling system replicated for each galvo. 
     
     
       12. The galvo system of  claim 11  where the at least one cooling system comprises an airflow cooling system, wherein the airflow cooling system comprises a plurality of vents and openings. 
     
     
       13. The galvo system of  claim 11  wherein at least one cooling system comprises a liquid flow cooling system, the liquid flow cooling system comprises a plurality of channels extending along the block. 
     
     
       14. The galvo system of  claim 10  wherein the block is further machined with a pair of openings replicated for each galvo, a first opening for accepting a laser beam from a laser source and a second opening for steering the laser beam out and to the workpiece such that the laser beam is directed through the block to the workpiece.