Vibrator device, electronic apparatus, and vehicle

Abstract

Provided is a vibrator device including a vibrator structure body. When the A axis, the B axis, and the C axis are three axes orthogonal to each other, the vibrator structure body includes a vibrator element and a support substrate that is aligned with the vibrator element along the C axis. The vibrator element includes vibrating arms configured to flexurally vibrate along a plane parallel to the A axis and the B axis and along the A axis. The support substrate includes a base that supports the vibrator element, a support that supports the base, and a beam that couples the base and the support. A relationship f0<f1 is satisfied in which f0 is a resonance frequency of a vibration of the vibrator structure body along the B axis and f1 is a drive frequency of the vibrator element.

What is claimed is: 
     
       1. A vibrator device comprising:
 three axes orthogonal to each other being defined as an A axis, a B axis, and a C axis; 
 a vibrator element including an element base and a vibrating arm, the vibrating arm extending in a B axis direction along the B axis; and 
 a support substrate including a base and a support, the base overlapping the element base when viewed along a C axis direction along the C axis, the support being connected to the base via a beam, 
 wherein the vibrating arm is configured to flexurally vibrate in an A axis direction along the A axis, and 
 f0<f1, wherein 
 f0 is a resonance frequency which is a frequency based on the vibrator element, the base, and the beam, and 
 f1 is a drive frequency of the vibrator element. 
 
     
     
       2. The vibrator device according to  claim 1 , wherein
 when viewed along the C axis direction, 
 the support includes:
 a first support arranged on a positive side of the A axis; and 
 a second support arranged on a negative side of the A axis, wherein the base is arranged between the first support and the second support. 
 
 
     
     
       3. The vibrator device according to  claim 1 , wherein
 when viewed along the C axis direction, 
 the support includes:
 a first support arranged on a positive side of the B axis; and 
 a second support arranged on a negative side of the B axis, wherein the base is arranged between the first support and the second support. 
 
 
     
     
       4. The vibrator device according to  claim 1 , wherein
 when viewed along the C axis direction, 
 the support surrounds the base, 
 the beam is arranged between the base and the support, and the beam includes:
 a frame portion surrounding the base; 
 a first beam connecting the base and the frame portion; and 
 a second beam connecting the support and the frame portion. 
 
 
     
     
       5. The vibrator device according to  claim 4 , wherein
 the support includes a first support arranged on a positive side of the A axis and a second support arranged on a negative side of the A axis. 
 
     
     
       6. The vibrator device according to  claim 5 , wherein
 the support has a frame shape. 
 
     
     
       7. The vibrator device according to  claim 6 , wherein
 when viewed along the C axis direction, 
 the vibrating arm overlaps the support substrate. 
 
     
     
       8. The vibrator device according to  claim 7 , wherein
 the element base is fixed on the base via a joining member. 
 
     
     
       9. The vibrator device according to  claim 8 , wherein
 the vibrator element includes a detection arm extending from the element base in the B axis direction. 
 
     
     
       10. The vibrator device according to  claim 9 , wherein
 the vibrator element includes:
 a first coupling arm extending from the positive side of the A axis of the element base; and 
 a second coupling arm extending from the negative side of the A axis of the element base, and 
 
 the vibrating arm includes:
 a first drive arm extending in the B axis direction from the first coupling arm; and 
 a second drive arm extending in the B axis direction from the second coupling arm. 
 
 
     
     
       11. The vibrator device according to  claim 1 , wherein
 the vibrator element is a physical quantity sensor element configured to detect a physical quantity. 
 
     
     
       12. An electronic apparatus comprising:
 the vibrator device according to  claim 1 ; and 
 a signal processing circuit configured to perform signal processing based on an output signal from the vibrator device. 
 
     
     
       13. A vehicle comprising:
 the vibrator device according to  claim 1 ; and 
 a signal processing circuit configured to perform signal processing based on an output signal from the vibrator device.