Vibrator element and vibrator device

Abstract

The vibrator element includes a base part, a vibrating arm extending from the base part, and a weight provided to the vibrating arm, wherein the weight includes a thick film part, a thin film part thinner in film thickness than the thick film part, and a connection part which is located between the thick film part and the thin film part to connect the thick film part and the thin film part to each other, and which forms a taper shape gradually decreasing in film thickness in a direction from the thick film part side toward the thin film part.

What is claimed is: 
     
       1. A vibrating element comprising:
 a base part; 
 a vibrating arm extending from the base part; and 
 a weight provided to the vibrating arm, wherein 
 the weight includes
 a thick film part, 
 a thin film part thinner in film thickness than the thick film part, and 
 a connection part which is located between the thick film part and the thin film part to connect the thick film part and the thin film part to each other, and which forms a taper shape gradually decreasing in film thickness in a direction from the thick film part side toward the thin film part, wherein 
 
 a tilt angle of the connection part is equal to or smaller than 60°. 
 
     
     
       2. The vibrator element according to  claim 1 , wherein
 the thin film part and the connection part are each a laser-processed part which is irradiated with a laser beam to be formed as a thin film. 
 
     
     
       3. The vibrator element according to  claim 2 , wherein
 the thin film part is located at a tip side of the vibrating arm with respect to the thick film part. 
 
     
     
       4. The vibrator element according to  claim 1 , wherein
 the tilt angle of the connection part is equal to or larger than 20°. 
 
     
     
       5. A vibrator device comprising:
 the vibrator element according to  claim 1 . 
 
     
     
       6. A vibrating element comprising:
 a base part; 
 a vibrating arm extending from the base part; and 
 a weight provided to the vibrating arm, wherein 
 the weight includes 
 a thick film part, 
 a thin film part thinner in film thickness than the thick film part, and 
 a connection part which is located between and respectively abuts the thick film part and the thin film part to connect the thick film part and the thin film part to each other, and which forms a taper shape gradually decreasing in film thickness in a direction from the thick film part side toward the thin film part, 
 wherein the taper shape of the connecting part is a tilted plane which has a constant tilt angle along an entirety of the connecting part from the thick film part to the thin film part in the direction from the thick film part side toward the thin film part. 
 
     
     
       7. The vibrator element according to  claim 6 , wherein
 the thin film part and the connection part are each a laser-processed part which is irradiated with a laser beam to be formed as a thin film. 
 
     
     
       8. The vibrator element according to  claim 7 , wherein
 the thin film part is located at a tip side of the vibrating arm with respect to the thick film part. 
 
     
     
       9. The vibrator element according to  claim 6 , wherein
 a tilt angle of the connection part is equal to or smaller than 60°. 
 
     
     
       10. The vibrator element according to  claim 6 , wherein
 a tilt angle of the connection part is equal to or larger than 20°. 
 
     
     
       11. A vibrator device comprising:
 the vibrator element according to  claim 6 .