Method of coating an object

Abstract

Disclosed is a method of coating an object made of a first material and a second material that is different from the first material. The method includes dispensing a polymer solution onto the object, wherein the polymer solution has a property that wets one of the first material and the second material and dewets the other one of the first material and the second material.

What is claimed is: 
     
       1. A method of coating comprising:
 providing an object made of a metal and a dielectric, wherein the metal has a line-space pattern with a predetermined half-pitch dimension P; 
 providing a polymer solution that forms dewetted droplets with an average diameter D when spin coated onto a homogeneous surface from which it dewets, wherein a polymer comprising the polymer solution causes D to be less than P; 
 dispensing the polymer solution onto the object; and 
 spinning the object at a predetermined number of revolutions per minute (RPM) no more than 30 seconds after dispensing the polymer solution onto the object. 
 
     
     
       2. The method of coating of  claim 1  wherein the metal is copper and the dielectric is silicon dioxide. 
     
     
       3. The method of  claim 1  wherein the polymer solution comprises a solvent and a polymer. 
     
     
       4. The method of  claim 3  wherein the polymer comprises a poly(acrylate) containing at least one semi-fluorinated pendant group. 
     
     
       5. The method of  claim 3  wherein the solvent is trifluoroethanol. 
     
     
       6. The method of  claim 3  wherein the polymer is an oligomer. 
     
     
       7. The method of  claim 6  wherein the oligomer is 8F 7 : poly(1H,1H,5H-octafluoropentyl acrylate). 
     
     
       8. The method of  claim 6  wherein the oligomer is 8F 15 : poly(1H,1H,5H-octafluoropentyl acrylate). 
     
     
       9. The method of  claim 6  wherein the oligomer is 8F 30 : poly(1H,1H,5H-octafluoropentyl acrylate). 
     
     
       10. The method of  claim 6  wherein the oligomer is 0F 7 : poly(methyl acrylate). 
     
     
       11. The method of  claim 6  wherein the oligomer is 3F 7 : poly(2,2,2-trifluoroethyl acrylate). 
     
     
       12. The method of  claim 6  wherein the oligomer is 4F 7 : poly(2,2,3,3-tetrafluoropropyl acrylate). 
     
     
       13. The method of  claim 6  wherein the oligomer is 13F 7 : poly(1H,1H,2H,2H-perfluorooctyl acrylate). 
     
     
       14. The method of  claim 6  wherein the oligomer is 4F 200 : poly(2,2,3,3-tetrafluoropropyl acrylate). 
     
     
       15. The method of  claim 1  wherein the predetermined RPM is between 1000 RPM and 10,000 RPM. 
     
     
       16. The method of  claim 1  wherein a D/P ratio is between 0.40 and 0.65.