Mass transfer tool with high productivity

Abstract

Mass transfer tools and methods for high density transfer of arrays of micro devices are described. In an embodiment, a mass transfer tool includes a plurality of articulating transfer head assemblies coupled with a main translation track, where each articulating transfer head assembly is translatable along the main translation track between a donor substrate stage and a receiving substrate stage.

What is claimed is: 
     
       1. A mass transfer tool comprising:
 a receiving substrate stage; 
 a donor substrate stage; 
 a main translation track; 
 a plurality of articulating transfer head assemblies coupled with the main translation track, each articulating transfer head assembly translatable along the main translation track between the donor substrate stage and the receiving substrate stage, and 
 a review camera coupled with the main translation track, wherein the review camera is translatable along the main translation track over the receiving substrate independently of the plurality of articulating transfer head assemblies. 
 
     
     
       2. The mass transfer tool of  claim 1 , wherein each articulating transfer head assembly is adjustable in six degrees of motion. 
     
     
       3. The mass transfer tool of  claim 2 , wherein the plurality of articulating transfer head assemblies comprises a first set of articulating transfer head assemblies attached to a first carriage coupled to the main translation track, and a second set of articulating transfer head assemblies attached to a second carriage coupled to the main translation track. 
     
     
       4. The mass transfer tool of  claim 1 , further comprising a donor substrate stage translation track, wherein the donor substrate stage is translatable along the donor substrate stage translation track between an operable location directly overlapping the main translation track and an inoperable location away from the main translation track. 
     
     
       5. The mass transfer tool of  claim 4 , further comprising a second donor substrate stage translation track, wherein a second donor substrate stage is translatable along the second donor substrate stage translation track between a second operable location directly overlapping the main translation track and a second inoperable location away from the main translation track, and the second donor substrate stage is adjustable in at least two degrees of motion. 
     
     
       6. The mass transfer tool of  claim 5 , wherein one of the at least two degrees of motion is parallel to a longitudinal axis of the main translation track. 
     
     
       7. The mass transfer tool of  claim 4 , further comprising a cleaning station translation track, wherein a cleaning station is translatable along the cleaning station translation track between a cleaning location directly overlapping the main translation track and a non-cleaning location away from the main translation track. 
     
     
       8. The mass transfer tool of  claim 4 , further comprising a loading station translation track, wherein a micro pick up array (MPA) loading station is translatable along the loading station translation track between a loading location directly overlapping the main translation track and a non-loading location away from the main translation track. 
     
     
       9. The mass transfer tool of  claim 8 , wherein the MPA loading station includes a plurality of support structures that can be raised relative to a base structure of the MPA loading station. 
     
     
       10. The mass transfer tool of  claim 1 , further comprising a counter-weight, wherein the counter-weight is translatable parallel to a longitudinal axis of the main translation track over the receiving substrate state independently of the plurality of articulating transfer head assemblies and the review camera. 
     
     
       11. The mass transfer tool of  claim 10 , wherein the counter-weight is coupled with a counter translation track located adjacent to the main translation track. 
     
     
       12. The mass transfer tool of  claim 1 , further comprising an inspection station, wherein the plurality of articulating transfer head assemblies is translatable along the main translation track and directly over the inspection station. 
     
     
       13. A mass transfer tool assembly comprising:
 a plurality of subsystems including a donor substrate stage, pre-placement inspection station, a receiving substrate stage, and a post-placement inspection station; 
 an articulating transfer head assembly; and 
 a motion system to position the articulating transfer head assembly over the plurality of subsystems in a looped sequence; 
 wherein the articulating transfer head assembly is a part of a plurality of articulating transfer head assemblies that can be incremented over the plurality of subsystems in the looped sequence. 
 
     
     
       14. The mass transfer tool of  claim 13 , wherein each articulating transfer head assembly is adjustable in six degrees of motion. 
     
     
       15. The mass transfer tool of  claim 13 , wherein the motion system includes a plurality of arms, each arm including a corresponding articulating transfer head assembly. 
     
     
       16. The mass transfer tool of  claim 15 , wherein each arm includes a corresponding translation arm track to which the corresponding articulating transfer head assembly is attached. 
     
     
       17. The mass transfer tool of  claim 16 , further comprising a micro pick up array loading station adjacent the donor substrate stage, wherein the articulating transfer head assembly for each arm is translatable along the corresponding translation arm track between the donor substrate stage and the micro pick up array loading station. 
     
     
       18. The mass transfer tool of  claim 13 , wherein the plurality of subsystems includes a cleaning station. 
     
     
       19. The mass transfer tool of  claim 18 , wherein the cleaning station includes a substrate with a tacky coating or an electrostatic pattern. 
     
     
       20. A mass transfer tool comprising:
 a receiving substrate stage; 
 a donor substrate stage; 
 a main translation track; 
 a plurality of articulating transfer head assemblies coupled with the main translation track, each articulating transfer head assembly translatable along the main translation track between the donor substrate stage and the receiving substrate stage; and 
 a loading station translation track, wherein a micro pick up array (MPA) loading station is translatable along the loading station translation track between a loading location directly overlapping the main translation track and a non-loading location away from the main translation track. 
 
     
     
       21. The mass transfer tool of  claim 20 , further comprising a donor substrate stage translation track, wherein the donor substrate stage is translatable along the donor substrate stage translation track between an operable location directly overlapping the main translation track and an inoperable location away from the main translation track. 
     
     
       22. The mass transfer tool of  claim 20 , wherein the MPA loading station includes a plurality of support structures that can be raised relative to a base structure of the MPA loading station.