Sensor and electronic device

Abstract

According to one embodiment, a sensor includes a first detection element. The first detection element includes a base body, a first support member fixed to the base body, a conductive first movable member, and a first conductive part fixed to the base body. The first movable member includes first, second, third, fourth and fifth movable parts. In a second direction crossing a first direction from the base body toward the first movable member, the third movable part is between the first and second movable parts. In the second direction, the fourth movable part is between the first and third movable parts. In the second direction, the fifth movable part is between the third and second movable parts. The first movable part is supported by the first support member. The second, third, fourth and fifth movable parts are separated from the base body.

What is claimed is: 
     
       1. A sensor, comprising:
 a first detection element including
 a base body, 
 a first support member fixed to the base body, 
 a conductive first movable member, and 
 a first conductive part fixed to the base body, 
 the first movable member including a first movable part, a second movable part, a third movable part, a fourth movable part and a fifth movable part, 
 in a second direction crossing a first direction from the base body toward the first movable member, the third movable part being between the first movable part and the second movable part, in the second direction, the fourth movable part being between the first movable part and the third movable part, in the second direction, the fifth movable part being between the third movable part and the second movable part, 
 the first movable part being supported by the first support member, and the second movable part, the third movable part, the fourth movable part and the fifth movable part being separated from the base body, 
 a first width along a third direction of the first movable part being larger than a fourth width along the third direction of the fourth movable part and larger than a fifth width along the third direction of the fifth movable part, the third direction crossing a first plane including the first direction and the second direction, a third width of the third movable part being smaller than the fourth width and smaller than the fifth width, a third length along the second direction of the third movable part being shorter than a fourth length along the second direction of the fourth movable part and shorter than a fifth length along the second direction of the fifth movable part, 
 
 the second movable part including a first movable facing part facing the first conductive part in a second plane including the second direction and the third direction, the first movable facing part including a first movable protrusion portion protruding toward the first conductive part, 
 the first conductive part including a first conductive facing part facing the first movable facing part, the first conductive facing part including a first conductive protrusion portion protruding toward the first movable facing part, and 
 the first conductive protrusion portion overlapping the first movable protrusion portion in a first radiation direction passing through the third movable part and being along the second plane, 
 wherein
 the first detection element further includes a second conductive part fixed to the base body, 
 the second movable part includes a second movable facing part facing the second conductive part in the second plane, and the second movable facing part includes a second movable protrusion portion protruding toward the second conductive part, 
 the second conductive part includes a second conductive facing part facing the second movable facing part, and the second conductive facing part includes a second conductive protrusion portion protruding toward the second movable facing part, 
 the second conductive protrusion portion overlaps the second movable protrusion portion in a second radiation direction passing through the third movable part and being along the second plane, 
 the first detection element further includes a third conductive part fixed to the base body, 
 the second movable part includes a third movable facing part facing the third conductive part in the second plane, and the third movable facing part includes a third movable protrusion portion protruding toward the third movable facing part, 
 the third conductive part includes a third conductive facing part facing the third movable facing part, and the third conductive facing part includes a third conductive protrusion portion protruding toward the third movable facing part, 
 the third conductive protrusion portion overlaps the third movable protrusion portion in a third radiation direction passing through the third moving part and being along the second plane, and 
 at least a portion of the second movable part is between the first conductive part and the third conductive part in an arc direction centered on the third movable part, 
 the first detection element further includes a fourth conductive part fixed to the base body, 
 the second movable part includes a fourth movable facing part facing the fourth conductive part in the second plane, and the fourth movable facing part includes a fourth movable protrusion portion protruding toward the fourth movable facing part, 
 the fourth conductive part includes a fourth conductive facing part facing the fourth movable facing part, and the fourth conductive facing part includes a fourth conductive protrusion portion protruding toward the fourth movable facing part, 
 the fourth conductive protrusion portion overlaps the fourth movable protrusion portion in a fourth radiation direction passing through the third moving part and being along the second plane, and 
 at least a portion of the second movable part is between the second conductive part and the fourth conductive part in the arc direction centered on the third movable part, 
 at least a portion of the third conductive part is between the first conductive part and the second conductive part, 
 at least a portion of the fourth conductive part is between the third conductive part and the second conductive part, 
 the third conductive part is electrically connected to the first conductive part, and 
 the fourth conductive part is electrically connected to the second conductive part. 
 
 
     
     
       2. The sensor according to  claim 1 , wherein
 the first movable facing part includes a plurality of the first movable protrusion portions, 
 the first conductive part includes a plurality of the first conductive protrusion portions, and 
 one of the first conductive protrusion portions is between one of the first movable protrusion portions and another one of the first movable protrusion portions in the first radiation direction. 
 
     
     
       3. The sensor according to  claim 2 , wherein
 the first movable protrusion portions are arranged along a first movable radiation direction passing through the third movable part and being along the second plane, and 
 the first conductive protrusion portions are arranged along a first conductive radiation direction passing through the third movable part and being along the second plane. 
 
     
     
       4. The sensor according to  claim 3 , wherein
 a length along a first movable arc direction of the first movable protrusion portions increases in proportion to a distance of the first movable protrusion portions from the third movable part, and the first movable arc direction is along the second plane and crosses the first movable radiation direction, and 
 a length along a first conductive arc direction of the first conductive protrusion portions increases in proportion to a distance of the first conductive protrusion portions from the third movable part, and the first conductive arc direction is along the second plane and crosses the first conductive radiation direction. 
 
     
     
       5. The sensor according to  claim 1 , wherein
 the first movable facing part includes a plurality of the first movable protrusion portions, 
 the first movable protrusion portions are arranged along a first movable radiation direction passing through the third movable part and being along the second plane, 
 a distance between the one of the first movable protrusion portions and the third movable part is longer than a distance between another one of the first movable protrusion portions and the third movable part, and 
 a length along a first movable arc direction of the one of the first movable protrusion portions is longer than a length along the first movable arc direction of the other one of the first movable protrusion portions, and the first movable arc direction is along the second plane and crosses the first movable radiation direction. 
 
     
     
       6. The sensor according to  claim 5 , wherein
 the first conductive facing part includes a plurality of the first conductive protrusion portions, 
 one of the first conductive protrusion portions is between one of the first movable protrusion portions and another one of the first movable protrusion portions in the first radiation direction, 
 the first conductive protrusion portions are arranged along a first conductive radiation direction passing through the third conductive part and being along the second plane, 
 a distance between one of the first conductive protrusion portions and the third conductive part is longer than a distance between another one of the first conductive protrusion portions and the third conductive part, and 
 a length along the first conductive arc direction of the one of the first conductive protrusion portions is longer than a length along the first conductive arc direction of the other one of the first conductive protrusion portions, and the first conductive arc direction is along the second plane and crosses the first conductive radiation direction. 
 
     
     
       7. The sensor according to  claim 1 , wherein
 the second movable facing part includes a plurality of the second movable protrusion portions, 
 the second movable protrusion portions are arranged along a second movable radiation direction passing through the third movable part and being along the second plane, 
 a distance between one of the second movable protrusion portions and the third movable part is longer than a distance between another one of the second movable protrusion portions and the third movable part, and 
 a length along a second movable arc direction of the one of the second movable protrusion portions is longer than a length along the second movable arc direction of the other one of the second movable protrusion portions, and the second movable arc direction is along the second plane and crosses the second movable radiation direction. 
 
     
     
       8. The sensor according to  claim 7 , wherein
 the second conductive facing part includes a plurality of the second conductive protrusion portions, 
 one of the second conductive protrusion portions is between one of the second movable protrusion portions and another one of the second movable protrusion portions in the second radiation direction, 
 the second conductive protrusion portions are arranged along a second conductive radiation direction passing through the third movable part and being along the second plane, 
 a distance between one of the second conductive protrusion portions and the third movable part is longer than a distance between another one of the second conductive protrusion portions and the third movable part, and 
 a length along a second conductive arc direction of the one of the second conductive protrusion portions is longer than a length along the second conductive arc direction of the other one of the second conductive protrusion portions, and the second conductive arc direction is along the second plane and crosses the second conductive radiation direction. 
 
     
     
       9. The sensor according to  claim 1 , wherein
 the second movable part is around at least a portion of the third conductive part in the second plane. 
 
     
     
       10. The sensor according to  claim 1 , further comprising:
 a second detection element including
 a second support member, and 
 a second movable member supported by the second support member and separated from the base body, 
 
 an angle being configured to be detected from a signal corresponding to a movement of the second movable member. 
 
     
     
       11. An electronic device, comprising:
 the sensor according to  claim 1 ; and 
 a circuit controller configured to control a circuit based on a signal obtained from the sensor. 
 
     
     
       12. The sensor according to  claim 1 , wherein
 the first movable member includes a first beam and a second beam, 
 the first beam includes a first end portion and a first other end portion, the first end portion is connected to the first movable part, and the first other end portion is connected to the second movable part, 
 the second beam includes a second end portion and a second other end portion, the second end portion is connected to the first movable part, and the second other end portion is connected to the second movable part, 
 the third movable part is between the first beam and the second beam in the third direction, and 
 at least one of a first resonance frequency of the first beam or a second resonance frequency of the second beam is configured to change according to a displacement of the second movable part in accordance with a received acceleration. 
 
     
     
       13. The sensor according to  claim 12 , further comprising:
 a controller, 
 the first movable member including
 a first fixed conductive part facing the first beam, and 
 a second conductive part facing the second beam, 
 
 the controller being electrically connected to the first fixed conductive part and the second conductive part, and 
 the controller being configured to derive the first resonance frequency and the second resonance frequency based on a first signal obtained from the first fixed conductive part and a second signal obtained from the second fixed conductive part. 
 
     
     
       14. The sensor according to  claim 13 , wherein
 the first movable member includes a fifth conductive part facing the first beam and a sixth conductive part facing the second beam, 
 the controller is electrically connected to the fifth conductive part and the sixth conductive part, 
 the controller is configured to control a potential difference between the first movable part and the first conductive part so as to reduce a change amount of a difference between the first resonance frequency and the second resonance frequency. 
 
     
     
       15. The sensor according to  claim 12 , further comprising:
 a second detection element including
 a second support member, and 
 a second movable member supported by the second support member and separated from the base body, 
 
 an angle being configured to be detected from a signal corresponding to a movement of the second movable member. 
 
     
     
       16. A sensor, comprising:
 a first detection element including
 a base body, 
 a first support member fixed to the base body, 
 a conductive first movable member, and 
 a first conductive part fixed to the base body, 
 the first movable member including a first movable part, a second movable part, a third movable part, a fourth movable part and a fifth movable part, 
 in a second direction crossing a first direction from the base body toward the first movable member, the third movable part being between the first movable part and the second movable part, in the second direction, the fourth movable part being between the first movable part and the third movable part, in the second direction, the fifth movable part being between the third movable part and the second movable part, 
 the first movable part being supported by the first support member, and the second movable part, the third movable part, the fourth movable part and the fifth movable part being separated from the base body, 
 a first width along a third direction of the first movable part being larger than a fourth width along the third direction of the fourth movable part and larger than a fifth width along the third direction of the fifth movable part, the third direction crossing a first plane including the first direction and the second direction, a third width of the third movable part being smaller than the fourth width and smaller than the fifth width, a third length along the second direction of the third movable part being shorter than a fourth length along the second direction of the fourth movable part and shorter than a fifth length along the second direction of the fifth movable part, 
 
 the second movable part including a first movable facing part facing the first conductive part in a second plane including the second direction and the third direction, 
 the first conductive part including a first conductive facing part facing the first movable facing part, and 
 the first movable facing part and the first conductive facing part extending along a first radiation direction passing through the third movable part and being along the second plane, 
 wherein
 the first movable member includes a first beam and a second beam, 
 the first beam includes a first end portion and a first other end portion, the first end portion is connected to the first movable part, and the first other end portion is connected to the second movable part, 
 the second beam includes a second end portion and a second other end portion, the second end portion is connected to the first movable part, and the second other end portion is connected to the second movable part, 
 the third movable part is between the first beam and the second beam in the third direction, and 
 at least one of a first resonance frequency of the first beam or a second resonance frequency of the second beam is configured to change according to a displacement of the second movable part in accordance with a received acceleration. 
 
 
     
     
       17. A sensor, comprising:
 a first detection element including
 a base body, 
 a first support member fixed to the base body, 
 a conductive first movable member, and 
 a first conductive part fixed to the base body, 
 the first movable member including a first movable part, a second movable part, a third movable part, a fourth movable part and a fifth movable part, 
 in a second direction crossing a first direction from the base body toward the first movable member, the third movable part being between the first movable part and the second movable part, in the second direction, the fourth movable part being between the first movable part and the third movable part, in the second direction, the fifth movable part being between the third movable part and the second movable part, 
 the first movable part being supported by the first support member, and the second movable part, the third movable part, the fourth movable part and the fifth movable part being separated from the base body, 
 a first width along a third direction of the first movable part being larger than a fourth width along the third direction of the fourth movable part and larger than a fifth width along the third direction of the fifth movable part, the third direction crossing a first plane including the first direction and the second direction, a third width of the third movable part being smaller than the fourth width and smaller than the fifth width, a third length along the second direction of the third movable part being shorter than a fourth length along the second direction of the fourth movable part and shorter than a fifth length along the second direction of the fifth movable part, 
 
 the second movable part including a first movable facing part facing the first conductive part in a second plane including the second direction and the third direction, the first movable facing part including a first movable protrusion portion protruding toward the first conductive part, 
 the first conductive part including a first conductive facing part facing the first movable facing part, the first conductive facing part including a first conductive protrusion portion protruding toward the first movable facing part, and 
 the first conductive protrusion portion overlapping the first movable protrusion portion in a first radiation direction passing through the third movable part and being along the second plane, 
 wherein
 the first movable member includes a first beam and a second beam, 
 the first beam includes a first end portion and a first other end portion, the first end portion is connected to the first movable part, and the first other end portion is connected to the second movable part, 
 the second beam includes a second end portion and a second other end portion, the second end portion is connected to the first movable part, and the second other end portion is connected to the second movable part, 
 the third movable part is between the first beam and the second beam in the third direction, and 
 at least one of a first resonance frequency of the first beam or a second resonance frequency of the second beam is configured to change according to a displacement of the second movable part in accordance with a received acceleration. 
 
 
     
     
       18. The sensor according to  claim 17 , further comprising:
 a controller, 
 the first movable member including
 a first fixed conductive part facing the first beam, and 
 a second conductive part facing the second beam, 
 
 the controller being electrically connected to the first fixed conductive part and the second conductive part, and 
 the controller being configured to derive the first resonance frequency and the second resonance frequency based on a first signal obtained from the first fixed conductive part and a second signal obtained from the second fixed conductive part. 
 
     
     
       19. The sensor according to  claim 18 , wherein
 the first movable member includes a fifth conductive part facing the first beam and a sixth conductive part facing the second beam, 
 the controller is electrically connected to the fifth conductive part and the sixth conductive part, 
 the controller is configured to control a potential difference between the first movable part and the first conductive part so as to reduce a change amount of a difference between the first resonance frequency and the second resonance frequency. 
 
     
     
       20. The sensor according to  claim 17 , further comprising:
 a second detection element including
 a second support member, and 
 a second movable member supported by the second support member and separated from the base body, 
 
 an angle being configured to be detected from a signal corresponding to a movement of the second movable member.