Substrate processing apparatus

Abstract

A substrate processing apparatus for separating an electronic component from a substrate with the electronic component attached to an upper surface includes an upper surface processing device that separates the electronic component from the upper surface of the substrate. The upper surface processing device has an upper surface processing transporter that transports the substrate from an upstream side to a downstream side and an upper surface rotary blade that separates the electronic component from the upper surface of the substrate. The upper surface processing transporter has a sixth belt conveyor on the upstream side and a seventh belt conveyor on the downstream side, the sixth and seventh belt conveyors being located below the upper surface rotary blade and aligned in a transport direction. The upper surface rotary blade has a downstream portion facing a gap between the sixth belt conveyor and the seventh belt conveyor.

The invention claimed is: 
     
       1. A substrate processing apparatus for separating an electronic component from a substrate with the electronic component attached to an upper surface of the substrate, the substrate processing apparatus comprising:
 an upper surface processing device configured to separate the electronic component from the upper surface of the substrate, wherein 
 the upper surface processing device comprises an upper surface processing transporter configured to transport the substrate from an upstream side to a downstream side and an upper surface rotary blade configured to separate the electronic component from the upper surface of the substrate, 
 the upper surface processing transporter comprises a sixth belt conveyor on the upstream side and a seventh belt conveyor on the downstream side, the sixth and seventh belt conveyors being located below the upper surface rotary blade and aligned in a transport direction, the upper surface rotary blade has a downstream portion facing a gap between the sixth belt conveyor and the seventh belt conveyor, and the sixth belt conveyor has a downstream end extending to the lower side of the upper surface rotary blade in the transport direction. 
 
     
     
       2. The substrate processing apparatus according to  claim 1 , wherein the upper surface processing transporter comprises a fourth belt conveyor located above the sixth belt conveyor and is configured to transport the substrate while sandwiching the substrate between the fourth belt conveyor on an upper side and the sixth belt conveyor on a lower side, and the upper surface rotary blade is located downstream of the fourth belt conveyor. 
     
     
       3. The substrate processing apparatus according to  claim 1 , wherein the upper surface processing transporter comprises a fifth belt conveyor located above the seventh belt conveyor and is configured to transport the substrate while sandwiching the substrate between the fifth belt conveyor on an upper side and the seventh belt conveyor on a lower side, and the upper surface rotary blade is located upstream of the fifth belt conveyor. 
     
     
       4. The substrate processing apparatus according to  claim 1 , wherein the upper surface processing transporter comprises a fourth belt conveyor on the upstream side and a fifth belt conveyor on the downstream side, the fourth and fifth belt conveyors being respectively located above the sixth belt conveyor and the seventh belt conveyor and aligned in the transport direction, the upper surface processing transporter is configured to transport the substrate while sandwiching the substrate between the fourth belt conveyor on an upper side and the sixth belt conveyor on a lower side and between the fifth belt conveyor on the upper side and the seventh belt conveyor on the lower side, and the upper surface rotary blade is located between the fourth belt conveyor and the fifth belt conveyor. 
     
     
       5. The substrate processing apparatus according to  claim 1 , for separating the electronic component from both upper and lower surfaces of the substrate with the electronic component attached to the upper and lower surfaces, the substrate processing apparatus comprising:
 a lower surface processing device configured to separate the electronic component from the lower surface of the substrate; and the upper surface processing device, wherein one of the lower surface processing device and the upper surface processing device is located on the upstream side in a direction in which the substrate is transported and the other processing device is located on the downstream side in the direction in which the substrate is transported, and 
 the lower surface processing device comprises a lower surface processing transporter configured to transport the substrate from the upstream side to the downstream side and a lower surface rotary blade configured to separate the electronic component from the lower surface of the substrate. 
 
     
     
       6. The substrate processing apparatus according to  claim 5 , wherein the upper surface processing device is located downstream of the lower surface processing device,
 the lower surface processing transporter has a first belt conveyor located on an upper side, and a second belt conveyor on the upstream side and a third belt conveyor on the downstream side, the second and third belt conveyors being located on a lower side and aligned in the transport direction, the lower surface processing transporter is configured to transport the substrate while sandwiching the substrate between the first belt conveyor on the upper side and the second belt conveyor and third belt conveyor on the lower side, and the lower surface rotary blade is located between the second belt conveyor and the third belt conveyor. 
 
     
     
       7. The substrate processing apparatus according to  claim 6 , wherein the lower surface processing transporter has an adjustment roller and two auxiliary rods located inside the first belt conveyor,
 the adjustment roller is located above the lower surface rotary blade and capable of vertical positional adjustment with respect to the lower surface rotary blade, and the auxiliary rods are located upstream and downstream of the adjustment roller and have fixed vertical positions with respect to the lower surface rotary blade. 
 
     
     
       8. The substrate processing apparatus according to  claim 6 , wherein a transport height at which the substrate is transported at an outlet of the lower surface processing device is different from a transport height at which the substrate is transported at an inlet of the upper surface processing device. 
     
     
       9. The substrate processing apparatus according to  claim 4 , wherein a transport height at which the substrate is transported at an outlet of the fourth belt conveyor and sixth belt conveyor is different from a transport height at which the substrate is transported at an inlet of the fifth belt conveyor and seventh belt conveyor. 
     
     
       10. The substrate processing apparatus according to  claim 9 , wherein the transport height of the substrate at the inlet of the fifth belt conveyor and seventh belt conveyor is higher than the transport height of the substrate at the outlet of the fourth belt conveyor and sixth belt conveyor. 
     
     
       11. The substrate processing apparatus according to  claim 1 , wherein the sixth belt conveyor has a downstream end which extends to a lower side of the upper surface rotary blade and an upper surface inclined upward toward the downstream side.