Hydrogen recycle system and hydrogen recycle method

Abstract

Provided are a hydrogen recycle system and a hydrogen recycle method, whereby hydrogen can be purified to high purity at high yield from a gas, said gas being exhausted from a nitride compound production device, and recycled. The hydrogen recycle system comprises an exhaust gas supply path supplying a gas exhausted from a nitride compound production device, a hydrogen recycle means and a hydrogen supply path. The hydrogen recycle means of the hydrogen recycle system is characterized by comprising: a plasma reaction vessel that defines at least a part of a discharge space; a hydrogen separation membrane that divides the discharge space from a hydrogen flow path communicated with the hydrogen supply path, defines at least a part of the discharge space by one surface thereof and also defines at least a part of the hydrogen flow path by the other surface thereof; an electrode that is disposed outside the discharge space; and an adsorbent that is filled in the discharge space and adsorbs the supplied exhaust gas.

The invention claimed is: 
     
       1. A method for recycling hydrogen from an exhaust gas emitted by a nitride compound production device using a hydrogen recycle means, the hydrogen recycle means comprising:
 a discharge space, at least part of a wall section of which is defined by a plasma reaction vessel and a hydrogen separation membrane; 
 an adsorbent contained in the discharge space; and 
 a hydrogen flow path divided from the plasma reaction vessel by the hydrogen separation membrane, the method comprising the steps of: 
 introducing the exhaust gas emitted by the nitride compound production device into the discharge space via an exhaust gas supply path; 
 adsorbing hydrogen molecules and hydrides contained in the exhaust gas onto the adsorbent; 
 causing an electric discharge in the discharge space to cause matter adsorbed onto the adsorbent to desorb from the adsorbent as atoms; 
 reducing pressure in the hydrogen flow path so that hydrogen atoms in the discharge space permeate the hydrogen separation membrane; 
 introducing hydrogen atoms that have permeated the hydrogen separation membrane into the hydrogen flow path as hydrogen molecules; 
 and 
 supplying hydrogen introduced into the hydrogen flow path to the nitride compound production device via a hydrogen supply path. 
 
     
     
       2. The method for recycling hydrogen according to  claim 1 , further comprising a step of supplying ammonia to the discharge space to produce hydrogen.