Backing material for ultrasonic probe, method of manufacturing same, and ultrasonic probe

Abstract

This backing material for ultrasonic probes substantially comprises porous amorphous carbon.

What is claimed is: 
     
       1. A backing member for an ultrasonic probe substantially composed of porous amorphous carbon, wherein the backing member is provided on an opposite side of a transmission direction of ultrasonic waves to an object, with respect to a piezoelectric element for transmitting ultrasonic waves to the object, a density of the backing member is more than 0.90 g/cm 3 , and attenuation property for ultrasonic waves of the backing member according to JIS Z 2354-2012 is −10 dB/cm or less. 
     
     
       2. The backing member as claimed in  claim 1 , wherein the acoustic impedance thereof is 2.0-5.8 Mrayl. 
     
     
       3. The backing member as claimed in  claim 1 , further comprising a carbonaceous filler, which is dispersed in said amorphous carbon. 
     
     
       4. The backing member as claimed in  claim 3 , wherein the carbonaceous filler is at least one selected from the group consisting of carbon fibers and carbon particles. 
     
     
       5. The backing member as claimed in  claim 1 , wherein the density thereof is 1.5 g/cm 3  or less. 
     
     
       6. An ultrasonic probe comprising an acoustic lens, an acoustic matching layer, a piezoelectric element, and the backing member as claimed in  claim 1 , in this order. 
     
     
       7. A method of manufacturing a backing member as claimed in  claim 1 , comprising
 dispersing a pore forming material in a carbon precursor, and then 
 heat-treating the carbon precursor together with the pore forming material under a non-oxidizing atmosphere to carbonize the carbon precursor. 
 
     
     
       8. The method for manufacturing a backing member as claimed in  claim 7 , wherein the pore forming material is at least one selected from the group consisting of alcohols, ethers, alcohol-based polymers, ether-based polymers, and acrylic-based polymers.