Fastening automation apparatus for upper electrode

Abstract

A fastening automation apparatus for an upper electrode of an etching facility includes a ring, and a plurality of fastening modules movably secured to the ring and configured to be movable in a radial direction on the ring. Each fastening module includes a first frame that is movable in a radial direction on the ring, a driving source installed below the first frame, a driving shaft that transmits a driving force from the driving source, a power transmission unit connected to the driving shaft, and a fastening bit connected to the power transmission unit and configured to be rotated. The plurality of fastening modules are configured to operate simultaneously to install the upper electrode in the etching facility.

What is claimed is: 
     
       1. A fastening apparatus, comprising:
 a ring; 
 a plurality of fastening modules movably secured to the ring, wherein each fastening module is movable in a radial direction on the ring; and 
 a plurality of guide members installed on the ring, wherein each guide member guides movement of a respective one of the plurality of fastening modules; 
 wherein each one of the plurality of fastening modules comprises a first frame that is movable in the radial direction, a driving source installed below the first frame, a driving shaft that transmits a driving force from the driving source, a power transmission unit connected to the driving shaft, and a fastening bit connected to the power transmission unit that rotates; and 
 wherein the plurality of fastening modules operate simultaneously to install an upper electrode of an etching facility in the etching facility. 
 
     
     
       2. The fastening apparatus of  claim 1 , wherein each guide member comprises a linear motion (LM) guide. 
     
     
       3. The fastening apparatus  claim 1 , further comprising a second frame disposed above the ring and in which the power transmission unit is installed. 
     
     
       4. The fastening apparatus of  claim 1 , wherein the driving source comprises a rotary cylinder provided with a pneumatic port. 
     
     
       5. The fastening apparatus of  claim 1 , wherein the power transmission unit comprises a plurality of bevel gears. 
     
     
       6. The fastening apparatus of  claim 1 , wherein the plurality of fastening modules are in circumferentially spaced apart relationship on the ring. 
     
     
       7. The fastening apparatus of  claim 1 , wherein at least an end of the fastening bit has a cross-sectional shape corresponding to a shape of a cam nut installed on the upper electrode. 
     
     
       8. The fastening apparatus of  claim 1 , wherein the ring is provided with a plurality of through-holes, each through-hole having an elliptical shape, and wherein the driving shaft of each fastening module penetrates through a respective one of the through- holes. 
     
     
       9. The fastening apparatus of  claim 1 , further comprising a control unit connected to the driving source of each of the plurality of fastening modules, wherein the control unit controls operation of the driving source of each of the plurality of fastening modules. 
     
     
       10. A fastening apparatus, comprising:
 a ring; and 
 a plurality of fastening modules movably secured to the ring, wherein each fastening module is movable in a radial direction on the ring; 
 wherein each one of the plurality of fastening modules comprises a first frame that is movable in the radial direction, a driving source installed below the first frame, a driving shaft that transmits a driving force from the driving source, a power transmission unit connected to the driving shaft, wherein the power transmission unit comprises a plurality of bevel gears, and a fastening bit connected to the power transmission unit that rotates; and 
 wherein the plurality of fastening modules operate simultaneously to install an upper electrode of an etching facility in the etching facility. 
 
     
     
       11. The fastening apparatus of  claim 10 , further comprising a plurality of guide members installed on the ring, wherein each guide member guides movement of a respective one of the plurality of fastening modules. 
     
     
       12. The fastening apparatus  claim 10 , further comprising a second frame disposed above the ring and in which the power transmission unit is installed. 
     
     
       13. The fastening apparatus of  claim 10 , wherein the driving source comprises a rotary cylinder provided with a pneumatic port. 
     
     
       14. The fastening apparatus of  claim 10 , wherein the plurality of fastening modules are in circumferentially spaced apart relationship on the ring. 
     
     
       15. The fastening apparatus of  claim 10 , wherein the ring is provided with a plurality of through-holes, each through-hole having an elliptical shape, and wherein the driving shaft of each fastening module penetrates through a respective one of the through-holes. 
     
     
       16. The fastening apparatus of  claim 10 , further comprising a control unit connected to the driving source of each of the plurality of fastening modules, wherein the control unit controls operation of the driving source of each of the plurality of fastening modules. 
     
     
       17. A fastening apparatus, comprising:
 a ring; and 
 a plurality of fastening modules movably secured to the ring, wherein each one of the plurality of fastening modules is movable in a radial direction on the ring, wherein the plurality of fastening modules operate simultaneously to install an upper electrode of an etching facility in the etching facility; 
 wherein each one of the plurality of fastening modules comprises a first frame that is movable in the radial direction, a driving source installed below the first frame, a driving shaft that transmits a driving force from the driving source, a power transmission unit connected to the driving shaft, and a fastening bit connected to the power transmission unit that rotates, wherein at least an end of the fastening bit has a cross-sectional shape corresponding to a shape of a cam nut installed on the upper electrode. 
 
     
     
       18. The fastening apparatus of  claim 17 , further comprising a plurality of guide members installed on the ring, wherein each guide member guides movement of a respective one of the plurality of fastening modules. 
     
     
       19. The fastening apparatus  claim 17 , further comprising a second frame disposed above the ring and in which the power transmission unit is installed. 
     
     
       20. The fastening apparatus of  claim 17 , further comprising a control unit connected to the driving source of each of the plurality of fastening modules, wherein the control unit controls operation of the driving source of each of the plurality of fastening modules.