Sensor having a plurality of diaphragms

Abstract

A sensor includes a housing having a body, a plurality of ports, and a plurality of cavities. The ports include a first port and a second port, and the cavities include a first cavity disposed in the first port and a second cavity disposed in the second port. The sensor includes a first diaphragm disposed in the first port and enclosing the first cavity and a second diaphragm disposed in the second port and enclosing the second cavity. The first diaphragm and the second diaphragm are coplanar with one another in a first plane. The sensor includes a die disposed in the first cavity and having a membrane that is deflectable according to a differential pressure between a first pressure in the first cavity and a second pressure in the second cavity. The die is attached to the housing along a second plane parallel to the first plane.

What is claimed is: 
     
       1. A sensor, comprising:
 a housing having a body, a plurality of ports extending from the body, and a plurality of cavities disposed in the housing, the ports include a first port and a second port, the cavities include a first cavity disposed in the first port and a second cavity disposed in the second port; 
 a plurality of diaphragms including a first diaphragm disposed in the first port and enclosing the first cavity and a second diaphragm disposed in the second port and enclosing the second cavity, the first diaphragm and the second diaphragm are coplanar with one another in a first plane; and 
 a die disposed in the first cavity and having a membrane that is deflectable according to a differential pressure between a first pressure in the first cavity and a second pressure in the second cavity, the die is attached to the housing along a second plane parallel to the first plane. 
 
     
     
       2. The sensor of  claim 1 , wherein the body has a first face, a second face opposite the first face, and a plurality of sidewalls connecting the first face and the second face, the ports extend from the first face. 
     
     
       3. The sensor of  claim 2 , wherein the body has a plurality of passageways extending through the body, the passageways include a main passageway extending through one of the sidewalls. 
     
     
       4. The sensor of  claim 3 , wherein the passageways include a plurality of cavity passageways extending from the main passageway, the cavity passageways include a first cavity passageway connecting the main passageway to the first cavity and a second cavity passageway connecting the main passageway to the second cavity. 
     
     
       5. The sensor of  claim 4 , wherein the main passageway, the cavity passageways, and the cavities are filled with an oil. 
     
     
       6. The sensor of  claim 3 , wherein the housing has a passageway seal sealing an end of the main passageway at the one of the sidewalls. 
     
     
       7. The sensor of  claim 4 , wherein the main passageway is a first main passageway, and the passageways include a second main passageway extending through the one of the sidewalls. 
     
     
       8. The sensor of  claim 7 , wherein the passageways include a supplemental cavity passageway connecting the second main passageway with one of the first cavity and the second cavity. 
     
     
       9. The sensor of  claim 3 , wherein the passageways include a plurality of pin passageways extending through the body from the second face to the first cavity. 
     
     
       10. The sensor of  claim 9 , further comprising a plurality of pins disposed in the pin passageways, the pins each have a first end disposed outside of the housing and a second end disposed in the first cavity, the second ends of the pins are electrically connected to the die in the first cavity. 
     
     
       11. The sensor of  claim 10 , wherein the pins have a pin seal disposed around the pins in the pin passageways and hermetically sealing the pins to the housing. 
     
     
       12. The sensor of  claim 1 , wherein the membrane is a first membrane and the die has a second membrane deflectable according to an absolute measurement of the first pressure in the first cavity, the second membrane is monolithically formed in a single piece with the first membrane. 
     
     
       13. The sensor of  claim 1 , further comprising an integrated circuit disposed in the first cavity and electrically connected to the die. 
     
     
       14. The sensor of  claim 1 , wherein the die is a first die and the membrane is a first membrane, and further comprising a second die having a second membrane disposed in the first cavity, the second membrane is deflectable according to an absolute measurement of the first pressure in the first cavity, the second die is attached to the housing along the second plane. 
     
     
       15. The sensor of  claim 2 , further comprising a housing seal disposed around the ports on the first face of the body. 
     
     
       16. The sensor of  claim 15 , wherein the housing seal is an elastomeric material or a metal material. 
     
     
       17. The sensor of  claim 1 , wherein the ports include a third port and the cavities include a third cavity disposed in the third port. 
     
     
       18. The sensor of  claim 17 , wherein the diaphragms include a third diaphragm disposed in the third port and enclosing the third cavity, the third diaphragm is coplanar with the first diaphragm and the second diaphragm in the first plane. 
     
     
       19. The sensor of  claim 18 , wherein the die is a first die and the membrane is a first membrane, and further comprising a second die having a second membrane disposed in the third cavity. 
     
     
       20. The sensor of  claim 19 , wherein the second membrane is deflectable according to an absolute measurement of the first pressure in the third cavity, the second die is attached to the housing along the second plane.