MEMS gas sensor, array thereof and preparation method therefor

Abstract

A MEMS gas sensor (A), array thereof, and preparation method therefor. The MEMS gas sensor comprises a first substrate (A 2 ) provided with a first cavity (A 1 ), and N gas detection assemblies (A 3 ) provided at an opening of A 1 , each A 3 comprises: a supporting arm (A 31 ) and a gas detection part (A 32 ) provided on the A 31 ; the A 32 comprises a strip-shaped heating electrode part (A 321 ), an insulating layer (A 322 ), a strip-shaped detection electrode part (A 323 ), and a gas-sensitive material part (A 324 ) that are stacked sequentially; the A 323 comprises a first detection electrode part (A 323 - 1 ) and a second detection electrode part (A 323 - 2 ) with a first opening (A 325 ) therebetween; the A 324 is provided at the A 325 ; a first end of the A 324 is connected to the A 323 - 1 , a second end of the A 324 is connected to the A 323 - 2 ; strip-shaped heating electrode parts in each A 3 are connected sequentially to form a heater (A 8 ).

The invention claimed is: 
     
       1. A Micro-Electro-Mechanical System (MEMS) gas sensor, comprising a first substrate with a first surface on which a first cavity is provided, N gas detection components disposed at an opening of the first cavity, wherein N is a positive integer greater than or equal to 2, wherein:
 each gas detection component comprises a support arm and a gas detection part disposed on the support arm; the gas detection part comprises a strip-shaped heating electrode part, an insulating layer, a strip-shaped detection electrode part and a gas sensitive material part, that are sequentially stacked; the strip-shaped detection electrode part comprises a first detection electrode part and a second detection electrode part, a first opening is provided between the first detection electrode part and the second detection electrode part, the gas sensitive material part is disposed at a position of the first opening, a first end of the gas sensitive material part is connected with the first detection electrode part, and a second end of the gas sensitive material part is connected with the second detection electrode part; 
 strip-shaped heating electrode parts in all gas detection components are sequentially connected to form a heater; wherein the MEMS gas sensor further comprises: 
 one or N first detection electrode pins and one or N second detection electrode pins, that are disposed on the first substrate, wherein 
 a first end of one first detection electrode part is connected with a first end of one gas sensitive material part, a second end of the first detection electrode part is connected with one first detection electrode pin, and 
 a first end of one second detection electrode part is connected with a second end of one gas sensitive material part, and a second end of the second detection electrode part is connected with one second detection electrode pin. 
 
     
     
       2. The MEMS gas sensor of  claim 1 , further comprising: a first heating electrode pin and a second heating electrode pin, that are disposed on the first substrate, wherein
 the first heating electrode pin is connected with a first end of the heater, and the second heating electrode pin is connected with a second end of the heater. 
 
     
     
       3. The MEMS gas sensor of  claim 1 , wherein
 the N gas detection components comprise N pairs of first detection electrode pins and second detection electrode pins, and 
 the N pairs of first detection electrode pins and second detection electrode pins are connected with first detection electrode parts and second detection electrode parts in the N gas detection components, respectively. 
 
     
     
       4. The MEMS gas sensor of  claim 1 , wherein
 second ends of a plurality of first detection electrode parts are connected with one first detection electrode pin; and/or 
 second ends of a plurality of second detection electrode parts are connected with one second detection electrode pin. 
 
     
     
       5. The MEMS gas sensor of  claim 1 , wherein the first detection electrode part and the second detection electrode part are symmetrical with each other, and the first opening is located at a position of a symmetry axis of the first detection electrode part and the second detection electrode part. 
     
     
       6. The MEMS gas sensor of  claim 1 , wherein the first detection electrode part in each gas detection component comprises a first bending point, and the first bending point divides the first detection electrode part into a first detection electrode segment and a second detection electrode segment;
 the second detection electrode part in each gas detection component comprises a second bending point, and the second bending point divides the second detection electrode part into a third detection electrode segment and a fourth detection electrode segment; 
 one detection electrode part comprises the second detection electrode segment, the first detection electrode segment, the third detection electrode segment and the fourth detection electrode segment, that are connected sequentially, wherein, the first opening is disposed between the first detection electrode segment and the third detection electrode segment, and first detection electrode segments and third detection electrode segments in the N gas detection components jointly form a first shape, and the first shape is a symmetrical shape; 
 the strip-shaped heating electrode part in each gas detection component is disposed in an area between the first bending point and the second bending point in the gas detection component. 
 
     
     
       7. The MEMS gas sensor of  claim 6 , wherein the first shape comprises a symmetrical geometry. 
     
     
       8. The MEMS gas sensor of  claim 6 , wherein a shape of the heater is the same as the first shape. 
     
     
       9. The MEMS gas sensor of  claim 1 , wherein there are a plurality of first cavities;
 heaters corresponding to the plurality of first cavities are connected with each other. 
 
     
     
       10. The MEMS gas sensor of  claim 1 , wherein the N gas sensitive material parts of the N gas detection components employ different gas sensitive materials from each other, or at least two gas sensitive material parts employ a same gas sensitive material. 
     
     
       11. The MEMS gas sensor of  claim 1 , wherein a shape of the heater is a symmetrical geometry. 
     
     
       12. A Micro-Electro-Mechanical System (MEMS) gas sensor array, comprising a plurality of MEMS gas sensors of  claim 1 . 
     
     
       13. A method for manufacturing a Micro-Electro-Mechanical System (MEMS) gas sensor, wherein the MEMS gas sensor is the MEMS gas sensor of  claim 1 , and the method comprises:
 preparing a first substrate; 
 manufacturing N gas detection components on a first surface of the first substrate, wherein N is a positive integer greater than or equal to 2, and each gas detection component comprises a support arm and a gas detection part disposed on the support arm; the gas detection part comprises a strip-shaped heating electrode part, an insulating layer, a strip-shaped detection electrode part and a gas sensitive material part, that are sequentially stacked, the strip-shaped detection electrode part comprises a first detection electrode part and a second detection electrode part, a first opening is provided between the first detection electrode part and the second detection electrode part, the gas sensitive material part is disposed at a position of the first opening, a first end of the gas sensitive material part is connected with the first detection electrode part, and a second end of the gas sensitive material part is connected with the second detection electrode part; strip-shaped heating electrode parts in all gas detection components are sequentially connected to form a heater. 
 
     
     
       14. The MEMS gas sensor of  claim 7 , wherein a shape of the heater is the same as the first shape.