US12391569B2ActiveUtilityA1

Black material and method for producing same, black photosensitive composition and method for producing same, and black patterning film and method for forming same

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Assignee: MITSUBISHI MAT ELECTRONIC CHEMICALS CO LTDPriority: Apr 24, 2019Filed: Oct 30, 2020Granted: Aug 19, 2025
Est. expiryApr 24, 2039(~12.8 yrs left)· nominal 20-yr term from priority
G03F 7/0042C01P 2006/60B41M 5/50C09D 17/00G03F 7/004C09D 7/61C09D 5/32G03F 7/105G03F 7/0007C01G 25/00C01B 21/076
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Claims

Abstract

A black material of the present invention consists of a zirconium nitride powder containing yttrium. The amount of the yttrium is 1.0% by mass to 12.0% by mass with respect to a total 100% by mass of the zirconium nitride powder and the yttrium. In a transmission spectrum obtained from a dispersion in which the concentration of the zirconium nitride powder containing yttrium is 50 ppm, assuming that the light transmittance at a wavelength of 550 nm is denoted by X 1 , and the light transmittance at a wavelength of 365 nm is denoted by X 2 , X 1 is 7.5% or less, X 2 is 25% or more, and X 2 /X 1 is 3.5 or more.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
       1. A black material consisting of a zirconium nitride powder containing yttrium,
 wherein an amount of the yttrium is 1.0% by mass to 12.0% by mass with respect to a total 100% by mass of the zirconium nitride powder and the yttrium, and 
 in a transmission spectrum obtained from a dispersion in which a concentration of the zirconium nitride powder containing yttrium is 50 ppm, assuming that a light transmittance at a wavelength of 550 nm is denoted by X 1 , and a light transmittance at a wavelength of 365 nm is denoted by X 2 , X 1  is 7.5% or less, X 2  is 25% or more, and X 2 /X 1  is 3.5 or more. 
 
     
     
       2. A method for producing the black material according to  claim 1  comprising:
 a step of preparing a mixed powder by mixing a zirconium dioxide powder containing an yttrium oxide powder with either a magnesium oxide powder or a magnesium nitride powder or both of a magnesium oxide powder and a magnesium nitride powder, and a metallic magnesium powder in a N 2  gas atmosphere, N 2  and H 2  mixed gas atmosphere, N 2  and Ar mixed gas atmosphere, or N 2  and NH 3  mixed gas atmosphere; 
 a step of preparing a zirconium nitride powder containing yttrium by bringing the mixed powder into a nitride reaction in the N 2  gas atmosphere, N 2  and H 2  mixed gas atmosphere, N 2  and Ar mixed gas atmosphere, or N 2  and NH 3  mixed gas atmosphere; 
 a step of washing and neutralizing the zirconium nitride powder containing yttrium to prepare a black slurry; and 
 a step of separating a solid content from the black slurry and drying the separated solid content. 
 
     
     
       3. A method for producing a black material comprising:
 a step of obtaining the black material according to  claim 1  by bringing a metallic zirconium powder and a metallic yttrium powder into a synthesis nitride reaction in a N 2  gas atmosphere, N 2  and H 2  mixed gas atmosphere, N 2  and Ar mixed gas atmosphere, or N 2  and NH 3  mixed gas atmosphere, by a thermal plasma method, to prepare the zirconium nitride powder containing yttrium. 
 
     
     
       4. A black photosensitive composition comprising the black material according to  claim 1 . 
     
     
       5. A method for producing a black photosensitive composition,
 wherein the black photosensitive composition contains the black material produced by the method according to  claim 2 . 
 
     
     
       6. A black patterning film formed by the black photosensitive composition according to  claim 4 . 
     
     
       7. A method for forming a black patterning film, the method comprising a step of forming the black patterning film by using the black photosensitive composition produced by the method according to  claim 5 . 
     
     
       8. A method for producing a black photosensitive composition,
 wherein the black photosensitive composition contains the black material produced by the method according to  claim 3 . 
 
     
     
       9. A method for forming a black patterning film, the method comprising a step of forming the black patterning film by using the black photosensitive composition produced by the method according to  claim 8 .

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