Optimising operating conditions in an abatement apparatus

Abstract

A method of optimising operating conditions in an abatement apparatus configured to treat an effluent stream from a processing tool and an abatement apparatus are disclosed. The method of optimising operating conditions in an abatement apparatus configured to treat an effluent stream from a processing tool comprises: determining a concentration of carbon monoxide produced by the abatement apparatus when treating the effluent stream; and adjusting an operating parameter of the abatement apparatus in response to the concentration of carbon monoxide. In this way, the performance of the abatement device can be controlled by simply adjusting the operating parameters of the abatement device in response to the amount of carbon monoxide being produced to create conditions within the abatement apparatus which improve the removal of compounds being treated within the abatement device, while reducing undesirable by-products and without requiring advanced knowledge of the content of the effluent stream.

The invention claimed is: 
     
       1. A method of optimising operating conditions in an abatement apparatus configured to treat an effluent stream from a semiconductor processing tool, said method comprising:
 measuring a concentration of carbon monoxide produced by said abatement apparatus when treating said effluent stream; and 
 adjusting an operating parameter of said abatement apparatus in response to said concentration of carbon monoxide, wherein adjusting the operating parameter comprises:
 repeating steps of:
 modifying a supply of oxidant, and 
 measuring the concentration of carbon monoxide in an exhaust of the abatement apparatus, 
 
 to arrive at a supply of oxidant at which an increase in the supply of oxidant causes an increase in the concentration of carbon monoxide and a decrease in the supply of oxidant causes an increase in the concentration of carbon monoxide. 
 
 
     
     
       2. The method of  claim 1 , wherein measuring the concentration of carbon monoxide comprises measuring the concentration of carbon monoxide with an infrared spectrometer. 
     
     
       3. The method of  claim 1 , wherein modifying the supply of oxidant alters a fuel/oxidant ratio. 
     
     
       4. An apparatus for optimising/adjusting operating conditions in an abatement apparatus configured to treat an effluent stream from a semiconductor processing tool, said apparatus comprising:
 a sensor configured to determine a concentration of carbon monoxide produced by said abatement apparatus when treating said effluent stream; and 
 a controller operable to adjust an operating parameter of said abatement apparatus in response to said concentration of carbon monoxide through steps comprising: 
 repeating steps of:
 modifying a supply of oxidant, and 
 measuring the concentration of carbon monoxide using the sensor, 
 
 to arrive at a supply of oxidant at which an increase in the supply of oxidant causes an increase in the concentration of carbon monoxide and a decrease in the supply of oxidant causes an increase in the concentration of carbon monoxide.