Manufacturing apparatus for mask apparatus, storage medium, method of manufacturing mask apparatus and mask apparatus

Abstract

A mask apparatus may include a frame including first and second sides opposing each other in a first direction across an opening and third and fourth sides opposing each other in a second direction crossing the first direction across the opening. A manufacturing apparatus may include a pressing mechanism that presses the first and second sides toward the opening, a displacement measuring mechanism that measures amounts of deformation of the first and second sides in the first direction, and a fixing unit that fixes a mask to the first and second sides. The pressing mechanism may include five or more pressing units that are arranged at intervals of 500 mm or less in the second direction and that press the first side and five or more pressing units that are arranged at intervals of 500 mm or less in the second direction and that press the second side.

What is claimed is: 
     
         1 . A method of manufacturing a mask apparatus, the method comprising:
 preparing a frame including a first side and a second side opposing each other in a first direction across an opening and a third side and a fourth side opposing each other in a second direction crossing the first direction across the opening;   adjusting first pressing forces that a pressing mechanism applies to the first side and the second side in a direction toward the opening; and   fixing ends of at least two masks to the first side and the second side,   wherein the pressing mechanism includes:
 five or more pressing units that are arranged at intervals of 500 mm or less in the second direction and that press the first side; and 
 five or more pressing units that are arranged at intervals of 500 mm or less in the second direction and that press the second side, 
   wherein the at least one mask comprises N masks, where N is an integer greater than or equal to 2, arranged in the second direction,   wherein the adjusting includes adjusting the first pressing forces in such a manner that a difference between the amount of deformation of the first side and a target amount of deformation when the masks are fixed to the first side is less than or equal to a first threshold,   wherein the fixing includes fixing the masks to the first side and the second side in order of decreasing distance from a center of the frame in the second direction,   wherein the pressing mechanism that presses the first side includes:
 a central group including one or two of the pressing units; 
 a first group including two or more of the pressing units between the central group and the third side in the second direction; and 
 a second group including two or more of the pressing units between the central group and the fourth side in the second direction, 
   wherein the one or two pressing units of the central group apply a first pressing force (1) to the first side when a first one of the masks is fixed to the frame,   wherein the one or two pressing units of the central group apply a first pressing force (U) to the first side when a U-th one of the masks, where U is an integer greater than 1 and less than N, is fixed to the frame, and   wherein a ratio of the first pressing force (U) to the first pressing force (1) is 1.05 or higher.   
     
     
         2 . The method of manufacture according to  claim 1 , wherein the adjusting includes adjusting the first pressing forces so as to satisfy the following inequality:
     U≥N/ 2.   
     
     
         3 . A method of manufacturing a mask apparatus, the method comprising:
 preparing a frame including a first side and a second side opposing each other in a first direction across an opening and a third side and a fourth side opposing each other in a second direction crossing the first direction across the opening;   adjusting first pressing forces that a pressing mechanism applies to the first side and the second side in a direction toward the opening; and   fixing ends of at least two masks to the first side and the second side,   wherein the pressing mechanism includes;
 five or more pressing units that are arranged at intervals of 500 mm or less in the second direction and that press the first side; and 
 five or more pressing units that are arranged at intervals of 500 mm or less in the second direction and that press the second side, 
   wherein the at least one mask comprises N masks, where N is an integer greater than or equal to 2, arranged in the second direction,   wherein the adjusting includes adjusting the first pressing forces in such a manner that a difference between the amount of deformation of the first side and a target amount of deformation when the masks are fixed to the first side is less than or equal to a first threshold,   wherein the fixing includes fixing the masks to the first side and the second side in order of increasing distance from a center of the frame in the second direction,   wherein the pressing mechanism that presses the first side includes:
 a central group including one or two of the pressing units; 
 a first group including two or more of the pressing units between the central group and the third side in the second direction; and 
 a second group including two or more of the pressing units between the central group and the fourth side in the second direction, 
   wherein one of the pressing units that belongs to the second group and that is closest to the fourth side applies a first pressing force (1) to the first side when a first one of the masks is fixed to the frame,   wherein the pressing unit that belongs to the second group and that is closest to the fourth side applies a first pressing force (U) to the first side when a U-th one of the masks, where U is an integer greater than 1 and less than Na is fixed to the frame, and   wherein a ratio of the first pressing force (U) to the first pressing force (1) is 1.05 or higher.