Display device having a second contact hole passing through the first insulating layer and manufacturing method thereof

Abstract

A display device includes the following elements: a semiconductor layer positioned on a substrate; a first gate insulating layer positioned on the semiconductor layer; a first gate conductive layer positioned on the first gate insulating layer; a second gate insulating layer positioned on the first gate conductive layer; a second gate conductive layer positioned on the second gate insulating layer; a first insulating layer positioned on the second gate conductive layer; a first contact hole passing through the first insulating layer, the second gate insulating layer, and the first gate insulating layer; a second contact hole passing through the first insulating layer; and a third contact hole passing through the first insulating layer and the second gate insulating layer. A cross-section of the first insulating layer in a plane perpendicular to the substrate has a curved profile.

What is claimed is: 
     
         1 . A display device comprising:
 a semiconductor layer positioned on a substrate;   a first gate insulating layer positioned on the semiconductor layer;   a first gate conductive layer positioned on the first gate insulating layer;   a second gate insulating layer positioned on the first gate conductive layer;   a second gate conductive layer positioned on the second gate insulating layer;   a first insulating layer positioned on the second gate conductive layer;   a first contact hole passing through the first insulating layer, the second gate insulating layer, and the first gate insulating layer;   a second contact hole passing through the first insulating layer; and   a third contact hole passing through the first insulating layer and the second gate insulating layer,   wherein a cross-section of the first insulating layer in a plane perpendicular to the substrate has a curved profile,   the semiconductor layer includes a first groove, and   the first groove is part of the first contact hole.   
     
     
         2 . The display device of  claim 1 , further comprising:
 a data conductive layer positioned on the first insulating layer,   wherein the data conductive layer includes:   a source electrode electrically connected to the semiconductor layer through the first contact hole;   a first connection electrode electrically connected to the second gate conductive layer through the second contact hole; and   a second connection electrode electrically connected to the first gate conductive layer through the third contact hole.   
     
     
         3 . The display device of  claim 2 , wherein
 an interface between the data conductive layer and the first insulating layer includes fluorine, a fluorine-based compound, or CFx, and   the x is a natural number of 1 or more.   
     
     
         4 . The display device of  claim 1 , wherein
 the semiconductor layer includes a first face, a second face, and a third face,   the first face is opposite each of the second face and the third face,   the second face is exposed by the first contact hole,   the semiconductor layer has a first thickness from the first face to the second face,   the semiconductor layer has a second thickness from the first face to the third face, and   the second thickness is larger than the first thickness.   
     
     
         5 . The display device of  claim 1 , wherein
 the first gate conductive layer includes a first gate conductive member exposed by the third contact hole,   the first gate conductive member includes a first gate conductive sub-member and a second gate conductive sub-member, and   the third contact hole extends through the second gate conductive sub-member.   
     
     
         6 . The display device of  claim 5 , wherein
 the second gate conductive layer includes a second gate conductive member exposed by the second contact hole,   the second gate conductive member includes a third gate conductive sub-member and a fourth gate conductive sub-member, and   the second contact hole extends through the fourth gate conductive sub-member.   
     
     
         7 . The display device of  claim 6 , wherein
 each of the first gate conductive sub-member and the third gate conductive sub-member includes aluminum, and   each of the second gate conductive sub-member and the fourth gate conductive sub-member includes titanium.   
     
     
         8 . The display device of  claim 2 , further comprising:
 an auxiliary layer positioned between the data conductive layer and the first insulating layer.   
     
     
         9 . The display device of  claim 8 , wherein
 the auxiliary layer includes amorphous silicon.