Displacement magnifying mechanism, actuator, polishing device, electronic component processing apparatus, dispenser, and air valve

Abstract

A displacement magnifying mechanism, polishing device, actuator, electronic component processing apparatus, dispenser, and air valve which can easily control a drive system. The displacement magnifying mechanism includes a base; a piezoelectric element of which an end is attached to a mounting surface of the base, the piezoelectric element extending along a first longitudinal direction; a support member of which an end is attached to the mounting surface side by side with the piezoelectric element, the support member extending along a second longitudinal direction which intersects with the first longitudinal direction; an operating portion attached to each of other ends of the piezoelectric element and the support member to allow the operating portion to be displaced, in response to an expansion/contraction of the piezoelectric element, along a displacement direction; and a compression member attached to the base and the operating portion so as to compress the piezoelectric element.

What is claimed is: 
     
         1 . A displacement magnifying mechanism comprising:
 a base portion adapted for serving as a base;   a piezoelectric element of which an end portion is attached to a mounting surface of the base portion, the piezoelectric element extending along a first longitudinal direction;   a support member of which an end portion is attached to the mounting surface side by side with the piezoelectric element, the support member extending along a second longitudinal direction which intersects with the first longitudinal direction;   an operating portion attached to each of other end portions of the piezoelectric element and the support member to allow the operating portion to be displaced, in response to an expansion/contraction of the piezoelectric element, along a displacement direction which differs from both the first longitudinal direction and the second longitudinal direction; and   a compression member attached to each of the base portion and the operating portion so as to compress the piezoelectric element along the first longitudinal direction,   wherein the first longitudinal direction and the second longitudinal direction intersect at a side of the operating portion, and   wherein the compression member is disposed outside of a space surrounded by the piezoelectric element, the support member and the base portion.   
     
     
         2 . The displacement magnifying mechanism according to  claim 1 , wherein a rigidity of the piezoelectric element along the first longitudinal direction is equal to or less than a rigidity of the support member along the second longitudinal direction. 
     
     
         3 . The displacement magnifying mechanism according to  claim 1 , wherein a connecting member is provided for connecting the end portion of the piezoelectric element and the base portion wherein the connecting member is formed with a material of which a thermal expansion coefficient is higher than that of the support member. 
     
     
         4 . The displacement magnifying mechanism according to  claim 1 ,
 wherein a second connecting member is provided for connecting the other end portion of the piezoelectric element and the operating portion, and   wherein the second connecting member is formed with a material of which a thermal expansion coefficient is higher than that of the support member.   
     
     
         5 . The displacement magnifying mechanism according to  claim 1 , wherein a rigidity of the support member along the displacement direction is equal to or less than a rigidity of the piezoelectric element along the displacement direction. 
     
     
         6 . The displacement magnifying mechanism according to  claim 1 , wherein in a cross section of the support member as viewed from the second longitudinal direction, a cross-sectional secondary moment about a central axis which is perpendicular to the displacement direction and passes through a center of the support member along the displacement direction differs depending on a position along the second longitudinal direction. 
     
     
         7 . The displacement magnifying mechanism according to  claim 1 , wherein a hinge member is provided at least at one of the end portion of the piezoelectric element along the first longitudinal direction and the end portion of the support member along the second longitudinal direction so as to promote a deformation of the piezoelectric element and the support member along the displacement direction. 
     
     
         8 . The displacement magnifying mechanism according to  claim 1 , wherein a hinge member is provided at least at one of the other end portion of the piezoelectric element along the first longitudinal direction and the other end portion of the support member along the second longitudinal direction so as to promote a deformation of the piezoelectric element and the support member along the displacement direction. 
     
     
         9 . The displacement magnifying mechanism according to  claim 1 , wherein two compression members are respectively disposed at positions sandwiching the piezoelectric element and the support member therebetween. 
     
     
         10 . The displacement magnifying mechanism according to  claim 1 , wherein the compression member extends along a third longitudinal direction which intersects with each of the first longitudinal direction and the second longitudinal direction when viewed in a plan view including the first longitudinal direction and the second longitudinal direction, and
 wherein the compression member is formed to be provided with an expansible member which is able to expand/contract along the third longitudinal direction.   
     
     
         11 . The displacement magnifying mechanism according  claim 1 , wherein the compression member extends along the first longitudinal direction, and the compression member extending along the first longitudinal direction is formed to be provided with an expansible member which is able to expand/contract along the first longitudinal direction. 
     
     
         12 . The displacement magnifying mechanism according to  claim 1 , wherein a tip of the operating portion has a flat surface. 
     
     
         13 . The displacement magnifying mechanism according to  claim 1 , wherein the supporting member is integrally formed with the base portion and the operating portion. 
     
     
         14 . A polishing device comprising:
 a base portion adapted for serving as a base;   a piezoelectric element of which an end portion is attached to a mounting surface of the base portion, the piezoelectric element extending along a first longitudinal direction;   a support member of which an end portion is attached to the mounting surface side by side with the piezoelectric element, the support member extending along a second longitudinal direction which intersects with the first longitudinal direction;   an operating portion attached to each of other end portions of the piezoelectric element and the support member to allow the operating portion to be displaced, in response to an expansion/contraction of the piezoelectric element, along a displacement direction which differs from both the first longitudinal direction and the second longitudinal direction;   a compression member attached to each of the base portion and the operating portion so as to compress the piezoelectric element along the first longitudinal direction; and   a polishing portion provided on a surface of the operating portion opposite to a surface to which the piezoelectric element and the support member are attached,   wherein the first longitudinal direction and the second longitudinal direction intersect at a side of the operating portion, and   wherein the compression member is disposed outside of a space surrounded by the piezoelectric element, the support member and the base portion.   
     
     
         15 . An actuator comprising:
 a base portion adapted for serving as a base;   a piezoelectric element of which an end portion is attached to a mounting surface of the base portion, the piezoelectric element extending along a first longitudinal direction;   a support member of which an end portion is attached to the mounting surface side by side with the piezoelectric element, the support member extending along a second longitudinal direction which intersects with the first longitudinal direction;   an operating portion attached to each of other end portions of the piezoelectric element and the support member to allow the operating portion to be displaced, in response to an expansion/contraction of the piezoelectric element, along a displacement direction which differs from both the first longitudinal direction and the second longitudinal direction;   a compression member attached to each of the base portion and the operating portion so as to compress the piezoelectric element along the first longitudinal direction; and   a driver for supplying a voltage or a current to the piezoelectric element and the support member so as to generate an expansion/contraction of the piezoelectric element,   wherein the first longitudinal direction and the second longitudinal direction intersect at a side of the operating portion, and   wherein the compression member is disposed outside of a space surrounded by the piezoelectric element, the support member and the base portion.   
     
     
         16 . The actuator according to  claim 15 , wherein the actuator is configured to drive a working element which is adapted for processing the electronic component. 
     
     
         17 . The actuator according to  claim 15 , wherein the actuator is configured to drive a probe which is adapted for measuring a characteristic of the electronic component by contacting to the electronic component. 
     
     
         18 . A dispenser using the actuator according to  claim 15 , comprising:
 a liquid outlet for introducing a liquid therein and for discharging the introduced liquid;   a valve for switching between discharging a liquid from the liquid outlet and shutting off the discharge of the liquid; and   the actuator according to  claim 15  for driving the valve.   
     
     
         19 . An air valve using the actuator according to  claim 15 , comprising:
 a valve main body having an air pressure chamber for introducing a compressed air therein and an air outlet through which the air pressure chamber is connected to outside;   a valve body provided in the air pressure chamber for switching between closing the air outlet and opening the air outlet; and   the actuator according to  claim 15  provided in the air pressure chamber for driving the valve body.   
     
     
         20 . The actuator according to  claim 15 , wherein the supporting member is integrally formed with the base portion and the operating portion.