Process for collecting and analyzing the content of a liquid in an automated on-line bath analysis system

Abstract

A collector and method for collecting samples of liquid from at least one source of liquid for automated analysis of the samples. The collector has at least one receptacle for receiving liquid from the source of liquid and holding a quantity of the liquid for obtaining a sample. Each receptacle has an inlet for delivery of liquid from the respective source of liquid and an open top sized to admit the sample collection device into the receptacle. The collector also has a spillway in fluid communication with the open top of the receptacle for receiving excess liquid spilling over the open top of the receptacle. The collector is constructed so that liquid continuously flows through the collector. A drain of the collector receives liquid from the spillway for draining the liquid from the collector.

What is claimed is:  
     
         1 . A collector for use in collecting samples of liquid from at least one source of liquid for collection of samples by an automated sample collection device, the collector comprising: 
 a bleed line adapted for continuously open fluid communication with the at least one source of liquid;    at least one receptacle to receive liquid from the bleed line and to hold a quantity of the liquid for obtaining a sample, the receptacle having an inlet for receiving liquid into the receptacle and an open top sized to admit the sample collection device into the receptacle;    a spillway in fluid communication with the open top of the receptacle for receiving excess liquid spilling over the open top of the receptacle;    a drain located for receiving liquid from the spillway for drainage of the liquid from the collector; and    the bleed line and collector being free of structure capable of stopping the flow of liquid from the at least one source of liquid to the receptacle for continuous admission of new liquid from the at least one source into the receptacle.    
     
     
         2 . A collector as set forth in    claim 1    wherein the collector further comprises a port for connection to the bleed line, the port being constructed for permanent open fluid communication with the receptacle and being free of structure capable of stopping the flow of liquid from the at least one source of liquid through the port to the receptacle.  
     
     
         3 . A collector as set forth in    claim 1    wherein the source of liquid is a semiconductor wafer cleaning bath and the liquid is a cleaning bath solution.  
     
     
         4 . A collector as set forth in    claim 1    having a plurality of receptacles and spillways for sampling liquid from a plurality of sources of liquid, each spillway being associated with a respective receptacle.  
     
     
         5 . A collector as set forth in    claim 4    having a waste trough in fluid communication with the spillways, for carrying away overflow liquid flowing down the spillways to the drain.  
     
     
         6 . A collector as set forth in    claim 4    wherein the source of liquid is a semiconductor wafer cleaning bath and the liquid is a cleaning bath solution.  
     
     
         7 . A collector as set forth in    claim 4    wherein the receptacles are arranged in a row spaced at intervals selected to facilitate the operation of the sample collection device.  
     
     
         8 . A collector as set forth in    claim 7    having a waste trough in fluid communication with the spillways, for carrying away overflow liquid flowing down the spillways.  
     
     
         9 . A collector as set forth in    claim 7    wherein the source of liquid is a semiconductor wafer cleaning bath and the liquid is a cleaning bath solution.  
     
     
         10 . A collector as set forth in    claim 9    having a waste trough in fluid communication with the spillways, for carrying away overflow liquid flowing down the spillways.