Method for manufacturing electronic parts and apparatus for manufacturing thin films

Abstract

In a method for manufacturing electronic parts by laminating metal thin films and insulating thin films on a support, a mold releasing agent is applied to the support before the start of lamination. Alternatively, the mold releasing agent is applied to the surface of the laminate during the lamination step, and then lamination is resumed. Therefore, the laminate can be prevented from cracking when the laminate is separated from the support or divided into plural pieces in the lamination direction. Thus, the reliability and productivity of electronic parts improve.

What is claimed is:  
     
         1 . A method for manufacturing electronic parts, comprising steps of: 
 forming a laminated thin film on a support to which a mold releasing agent is previously applied; and    separating the laminated thin film from the support.    
     
     
         2 . The method for manufacturing electronic parts according to    claim 1   , wherein the application of the mold releasing agent is performed by a process selected from the group consisting of evaporation, spraying, sputtering, and a combination thereof.  
     
     
         3 . The method for manufacturing electronic parts according to    claim 1   , wherein a plurality of the laminated thin films are laminated, and a mold releasing agent is applied to a surface of the laminated thin film during the lamination.  
     
     
         4 . The method for manufacturing electronic parts according to    claim 3   , wherein the application of the mold releasing agent is performed by a process selected from the group consisting of evaporation, spraying, sputtering, and a combination thereof.  
     
     
         5 . A method for manufacturing electronic parts having at least a metal thin film and an insulating thin film, comprising steps of: 
 laminating two or more of the metal thin films and two or more of the insulating thin films on a support to form a laminate; and    separating the laminate in a thickness direction.    
     
     
         6 . The method for manufacturing electronic parts according to    claim 5   , wherein a mold releasing agent is applied after laminating a predetermined number of the metal thin films and the insulating thin films, and a predetermined number of the metal thin films and the insulating thin films are further laminated.  
     
     
         7 . The method for manufacturing electronic parts according to    claim 6   , wherein the application of the mold releasing agent is performed by a process selected from the group consisting of evaporation, spraying, sputtering, and a combination thereof.  
     
     
         8 . The method for manufacturing electronic parts according to    claim 5   , further comprising a step of applying a mold releasing agent to the support prior to the step of forming the laminate.  
     
     
         9 . The method for manufacturing electronic parts according to    claim 8   , wherein the application of the mold releasing agent is performed by a process selected from the group consisting of evaporation, spraying, sputtering, and a combination thereof.  
     
     
         10 . The method for manufacturing electronic parts according to    claim 5   , wherein the metal thin films and the insulating thin films are continuously formed without destroying a vacuum atmosphere under vacuum.  
     
     
         11 . The method for manufacturing electronic parts according to    claim 6   , wherein the formation of the metal thin films and the insulating thin films and the application of the mold releasing agent are continuously performed without destroying a vacuum atmosphere under vacuum.  
     
     
         12 . An apparatus for manufacturing a thin film, comprising: 
 a vacuum vessel;    a vacuum pump for maintaining a predetermined degree of vacuum in the vacuum vessel;    a support located in the vacuum vessel;    a metal thin film-forming device for forming a metal thin film directly or indirectly on the support;    an insulating thin film-forming device for forming an insulating thin film directly or indirectly on the support;    a mold releasing agent-applying device for applying a mold releasing agent to a surface of at least one of the support, the metal thin film, and the insulating thin film.