Selective deposition of material on a substrate according to an interference pattern

Abstract

A method of preferentially depositing material on a substrate is disclosed. Material can be preferentially deposited by directing an electromagnetic interference pattern on to a substrate to selectively heat areas of the substrate coincident with the interference pattern maxima. The substrate can then be exposed to gas phase material that is capable of preferentially accumulating on surfaces based on surface temperature.

What is claimed is:  
     
         1 . A method for preferentially depositing material on a substrate surface comprising the steps of: 
 directing two or more mutually coherent electromagnetic beams onto a region of the substrate surface to form an electromagnetic interference pattern that preferentially heats portions of the substrate surface according to the interference pattern, wherein a cylindrical lens is placed in the path of at least one of the electromagnetic beams; and    selectively depositing material on the substrate surface according to the interference pattern by exposing the substrate to the material in the gas phase, the material capable of preferentially accumulating as a function of surface temperature.    
     
     
         2 . The method of    claim 1   , wherein the interference pattern comprises a series of parallel fringes having chirped pitch.  
     
     
         3 . The method of    claim 1   , wherein the interference pattern comprises a series of curved fringes having uniform pitch.  
     
     
         4 . The method of    claim 1   , wherein the interference pattern comprises a series of curved fringes having chirped pitch.  
     
     
         5 . The method of    claim 1   , wherein another cylindrical lens is placed in the path of another of the electromagnetic beams.  
     
     
         6 . The method of    claim 1   , wherein an optical element comprising one or more of a micro lens, microlens array, microprism, or diffraction grating is placed in the path of at least one of the electromagnetic beams.  
     
     
         7 . The method of    claim 1   , wherein the interference pattern is formed by passing one or more of the electromagnetic beams through a diffractive optical element.  
     
     
         8 . The method of    claim 1   , wherein an optical element comprising one or more of a spherical lens, aspherical lens, or acylindrical lens is placed in the path of at least one of the electromagnetic beams.  
     
     
         9 . The method of    claim 1   , wherein the substrate comprises glass.  
     
     
         10 . The method of    claim 1   , wherein the substrate comprises metal.  
     
     
         11 . The method of    claim 1   , wherein the substrate comprises semiconductor.  
     
     
         12 . The method of    claim 1   , wherein the substrate comprises plastic.  
     
     
         13 . A method for preferentially depositing material on a substrate surface comprising the steps of: 
 directing two or more mutually coherent electromagnetic beams onto a region of the substrate surface to form an electromagnetic interference pattern that preferentially heats portions of the substrate surface according to the interference pattern, wherein one or more of a microlens, a microlens array, a microprism, a diffraction grating, or a diffractive optical element is placed in the path of at least one of the electromagnetic beams; and    selectively depositing material on the substrate surface according to the interference pattern by exposing the substrate to the material in the gas phase, the material capable of preferentially accumulating as a function of surface temperature.    
     
     
         14 . A method for preferentially depositing material on a substrate surface comprising the steps of: 
 directing two or more mutually coherent electromagnetic beams onto a region of the substrate surface to form an electromagnetic interference pattern that preferentially heats portions of the substrate surface according to the interference pattern, wherein one or more of an aspherical lens or an acylindrical lens is placed in the path of at least one of the electromagnetic beams; and    selectively depositing material on the substrate surface according to the interference pattern by exposing the substrate to the material in the gas phase, the material capable of preferentially accumulating as a function of surface temperature.