Polishing pad and method for manufacturing the same

Abstract

An object of the present invention is to provide a polishing pad capable of obtaining the stabilized polishing performance and a method for manufacturing the same. The polishing pad according to the present invention is characterized in that cut surfaces of not less than one kind of sheets are arranged spirally on the polishing surface of the polishing pad.

What is claimed is:  
     
         1 . A polishing pad characterized in that cut surface of not less than one kind of sheets are arranged spirally on the polishing surface of a polishing pad.  
     
     
         2 . The polishing pad according to  claim 1  wherein a contact part of said sheet is bound though a binder.  
     
     
         3 . The polishing pad according to  claim 2  wherein said sheet includes an abrasive grain sheet.  
     
     
         4 . The polishing pad according to  claim 3  wherein said sheet is an abrasive grain sheet and a fibrous sheet.  
     
     
         5 . The polishing pad according to  claim 4  wherein said abrasive grain sheet is a fibrous sheet of thickness 0.05 to 10 mm containing abrasive grains of grain size 0.01 to 10μ.  
     
     
         6 . The polishing pad according to  claim 5  wherein said abrasive grain comprises silicon oxide, cerium oxide, aluminum oxide, manganese dioxide, iron oxide, zinc oxide, silicon carbide, boron carbide, synthetic diamond, tourmaline powder, etc., which are used singly or in the form not less than two kinds.  
     
     
         7 . The polishing pad according to  claim 5  wherein said fibrous sheet comprises woven fabric, non-woven fabric or a felt-like fibrous sheet.  
     
     
         8 . The polishing pad according to  claim 1  wherein said polishing pad is for chem-mechanical polishing.  
     
     
         9 . A method for manufacturing a polishing pad wherein cut surfaces of not less than one kind of sheets characterized in that a sheet is molded by being wound spirally are arranged spirally on the polishing surface of polishing pad.  
     
     
         10 . The method for manufacturing a polishing pad according to  claim 9  wherein the sheet is wound spirally and molded cylindrically while coating or impregnating an adhesive.  
     
     
         11 . The method for manufacturing a polishing pad according to  claim 10  wherein a molded article formed into a cylindrical shape is cut at right angles to or in a direction crossing with a winding axis to make a cut surface as a polishing surface.  
     
     
         12 . The method for manufacturing a polishing pad according to  claim 11  wherein said sheet is an abrasive grain sheet alone or an abrasive grain sheet and a fibrous sheet.