Solid-phase welded optical element attach process

Abstract

A micro-optical component comprises an optical element for interacting with an optical beam and a mounting structure for attaching the optical element to an optical bench. This optical element is solid phase welded to the mounting structure. Solid phase welding has advantages in that it can be performed at lower temperatures than most soldering, even some eutectic soldering. Solid-phase welding, however, is much more robust during subsequent temperature cycling. This is especially important when the optical components undergo subsequent high temperature cycling.

What is claimed is:  
     
         1 . A micro-optical component, comprising: 
 an optical element for interacting with an optical beam; and    a mounting structure for attaching the optical element to an optical bench;    wherein the optical element is solid-phase welded to the mounting structure.    
     
     
         2 . A micro-optical component as claimed in  claim 1 , wherein the optical element is thermocompression bonded to the mounting structure.  
     
     
         3 . A micro-optical component as claimed in  claim 1 , wherein the optical element is thermosonically bonded to the mounting structure.  
     
     
         4 . A micro-optical component as claimed in  claim 1 , wherein the optical element is ultrasonically welded to the mounting structure.  
     
     
         5 . A micro-optical component as claimed in  claim 1 , wherein the optical element comprises a lens substrate.  
     
     
         6 . A micro-optical component as claimed in  claim 1 , wherein the optical element comprises a microelectromechanical device.  
     
     
         7 . A micro-optical component as claimed in  claim 1 , wherein the optical element comprises a Fabry-Perot tunable filter.  
     
     
         8 . A micro-optical component as claimed in  claim 1 , wherein the mounting structure is fabricated from a metal.  
     
     
         9 . A micro-optical component as claimed in  claim 1 , wherein the mounting structure is metal coated.  
     
     
         10 . A micro-optical component as claimed in  claim 1 , wherein the mounting structure is coated with a thermocompression bond metal.  
     
     
         11 . A micro-optical component as claimed in  claim 10 , wherein the bond metal comprises gold.  
     
     
         12 . A micro-optical component as claimed in  claim 1 , further comprising depositing bond metal bumps on the mounting structure.  
     
     
         13 . A micro-optical component as claimed in  claim 1 , further comprising depositing bond metal bumps on the optical element.  
     
     
         14 . A micro-optical system, comprising: 
 an optical element for interacting with an optical beam;    a mounting structure, the optical element being solid-phase welded to the mounting structure; and    an optical bench, the mounting structure being solder bonded to the optical bench.    
     
     
         15 . A micro-optical system as claimed in  claim 14 , wherein the optical element is thermocompression bonded to the mounting structure.  
     
     
         16 . A micro-optical system as claimed in  claim 14 , wherein the optical element is thermosonically bonded to the mounting structure.  
     
     
         17 . A micro-optical system as claimed in  claim 14 , wherein the optical element is ultrasonically welded to the mounting structure.  
     
     
         18 . A micro-optical system as claimed in  claim 14 , wherein the optical element comprises a lens substrate.  
     
     
         19 . A micro-optical system as claimed in  claim 14 , wherein the optical element comprises a microelectromechanical device.  
     
     
         20 . A micro-optical system as claimed in  claim 14 , wherein the optical element comprises a Fabry-Perot tunable filter.  
     
     
         21 . A micro-optical system as claimed in  claim 14 , wherein the mounting structure is fabricated from a metal.  
     
     
         22 . A micro-optical system as claimed in  claim 14 , wherein the mounting structure is metal coated.  
     
     
         23 . A micro-optical system as claimed in  claim 14 , wherein the mounting structure is coated with a thermocompression bond metal.  
     
     
         24 . A micro-optical system as claimed in  claim 23 , wherein the bond metal comprises gold.  
     
     
         25 . A micro-optical system as claimed in  claim 14 , further comprising depositing bond metal bumps on the mounting structure.  
     
     
         26 . A micro-optical system as claimed in  claim 14 , further comprising depositing bond metal bumps on the optical element.  
     
     
         27 . A process for assembling an optical system, the process comprising: solid-phase welding an optical element to a mounting structure; and then attaching the mounting structure to an optical bench.  
     
     
         28 . A process as claimed in  claim 27 , wherein the step of solid-phase welding the optical element to the mounting structure comprises thermocompression bonding the mounting structure and the optical element.  
     
     
         29 . A process as claimed in  claim 27 , wherein the step of solid-phase welding the optical element to the mounting structure comprises thermosonically bonding the mounting structure and the optical element.  
     
     
         30 . A process as claimed in  claim 27 , wherein the step of solid-phase welding the optical element to the mounting structure comprises ultrasonically bonding the mounting structure and the optical element.  
     
     
         31 . A process as claimed in  claim 27 , wherein the step of attaching the mounting structure to the optical bench comprises solder bonding the mounting structure to the optical bench.  
     
     
         32 . A process as claimed in  claim 27 , wherein the step of attaching the mounting structure to the optical bench comprises: 
 depositing solder material on solder mating surfaces of the mounting structure and the optical bench;    reflowing the solder material to join the mating surfaces.    
     
     
         33 . A process as claimed in  claim 27 , wherein the step of solid-phase welding the optical element to the mounting structure comprises coating weld mating surfaces of the optical element and the mounting structure with bond material.  
     
     
         34 . A process as claimed in  claim 27 , wherein the step of solid-phase welding the optical element to the mounting structure comprises coating weld mating surfaces of the optical element and the mounting structure with gold.