Magnetic head device, and method of its manufacture

Abstract

An apparatus and method for manufacturing magnetic head device. In one embodiment, the magnetic head device includes a thin film magnetic head element having a reproduction element part comprised of a magnetoresistance effect element formed by layering on one surface of a slider. The magnetoresistance effect element is exposed on a side to oppose a magnetic recording media. Dry etching is used to remove a degenerated layer produced on the exposed side of the magnetoresistance effect element by polishing the surface of the side opposing the magnetic recording media.

What is claimed is:  
     
         1 . A magnetic head device, comprising: 
 a slider having a side surface;    a thin film magnetic head element formed by layering on the side surface; and    a magnetoresistance effect element included in the thin film magnetic head element, the magnetoresistance effect element exposed on the side surface to oppose a magnetic recording media, a degenerated layer produced by polishing on the side surface to oppose the magnetic recording media removed by dry etching over a region including component parts of the thin film magnetic head element.    
     
     
         2 . A method of manufacturing a magnetic head device, comprising: 
 forming by layering a thin film magnetic head element on a side surface of a slider, the thin film magnetic head element including a magnetic reproduction element part comprised of a magnetoresistance effect element, the magnetoresistance effect element formed to a height equal to a target height of a stripe of the thin film magnetic head element plus a depth of a magnetically degenerated layer to be produced by polishing;    polishing the side surface to oppose a magnetic recording media, the polishing to produce the magnetically degenerated layer; and    dry etching to remove material in a region containing component layers of the magnetic reproduction element part on the surface to oppose the magnetic recording media, until a height of the stripe of the magnetoresistance effect element is the target height.    
     
     
         3 . A method of manufacturing a magnetic head device, comprising: 
 forming by layering a thin film magnetic head element on a side surface of a slider, the thin film magnetic head element including a magnetic reproduction element part comprised of a magnetoresistance effect element;    polishing the side surface to oppose a magnetic recording media; and    dry etching immediately after the polishing process to remove material in a region containing component layers of the magnetic reproduction element part on the surface to oppose the magnetic recording media, to a depth of {fraction (1/30)} or greater but less than {fraction (1/10)} a stripe height of the magnetoresistance effect element.    
     
     
         4 . A method of manufacturing a magnetic head device, comprising: 
 forming by layering a thin film magnetic head element on a side surface of a slider, the thin film magnetic head element having a plurality of component layers including a magnetoresistance effect element film;    polishing the side surface, the side surface to oppose a magnetic recording media of the magnetic head device, the polishing to flatten the side surface over the plurality of component layers, the polishing to produce a magnetically degenerated layer; and    removing by dry etching a region containing the magnetoresistance effect element film including the magnetically degenerated layer on a surface part of the side surface.