Reinforced CMP carrier bladders

Abstract

A reinforced bladder for a chemical-mechanical planarization (CMP) polishing device includes an elastomer infused with a reinforcing material. The elastomer can be a rubber such as EPDM. The reinforcing material can be a chopped fiber such as aramid. Alternatively, the reinforcing material can be a sheet (such as a triaxial or hexaxial weave of aramid) embedded in and infused with the elastomer.

We claim:  
     
         1 . A bladder for use in a carrier of a CMP tool, comprising an elastomer infused with a reinforcing material, wherein the reinforcing material increases the rigidity of the bladder.  
     
     
         2 . The bladder of  claim 1  wherein the elastomer comprises an ethylyne-propolyne-diene monomer compound.  
     
     
         3 . The bladder of  claim 1  wherein the reinforcing material comprises a plurality of fibers.  
     
     
         4 . The bladder of  claim 3  wherein the plurality of fibers includes multifilament spun fiber.  
     
     
         5 . The bladder of  claim 3  wherein the plurality of fibers comprises woven fibers.  
     
     
         6 . The bladder of  claim 3  wherein the plurality of fibers comprises chopped aramid fiber.  
     
     
         7 . A bladder for use in a carrier of a chemical-mechanical planarization (CMP) tool, comprising: 
 an elastomer shaped to form the bladder; and    a sheet of reinforcing material, wherein the sheet of reinforcing material is embedded in and infused with elastomer.    
     
     
         8 . The bladder of  claim 7  wherein the elastomer comprises an ethylyne-propolyne-diene monomer compound.  
     
     
         9 . The bladder of  claim 7  wherein the sheet of reinforcing material comprises aramid fiber.  
     
     
         10 . The bladder of  claim 7  wherein the sheet of reinforcing material comprises a triaxial weave of fiber.  
     
     
         11 . The bladder of  claim 7  wherein the sheet of reinforcing material comprises a hexaxial weave of fiber.  
     
     
         12 . A bladder for use in a CMP tool, comprising: 
 an elastomer shaped in the form of a bladder; and    means, infused in the elastomer, for reinforcing the elastomer, wherein the bladder has increased rigidity.    
     
     
         13 . The bladder of  claim 12  wherein the means for reinforcing comprises a plurality of fibers.  
     
     
         14 . The bladder of  claim 13  wherein the plurality of fibers comprises chopped fiber.  
     
     
         15 . The bladder of  claim 12  wherein the means for reinforcing comprises a sheet of reinforcing material.  
     
     
         16 . The bladder of  claim 15  wherein the sheet comp rises woven aramid.  
     
     
         17 . A method for polishing a workpiece using a CMP tool, the method comprising: 
 loading the workpiece in the CMP tool;    polishing the workpiece using the CMP tool, wherein the CMP tool includes a reinforced bladder, wherein the reinforced bladder comprises an elastomer infused with a reinforcing material.    
     
     
         18 . The method of  claim 17 , wherein the reinforcing material comprises a plurality of fibers.  
     
     
         19 . The method of  claim 18 , wherein the plurality of fibers includes multifilament spun fiber.  
     
     
         20 . The method of  claim 18 , wherein the plurality of fibers comprises chopped aramid fiber.  
     
     
         21 . The method of  claim 17 , wherein the reinforcing material comprises a sheet of reinforcing material.  
     
     
         22 . The method of  claim 21 , wherein the sheet of reinforcing material comprises aramid fiber.  
     
     
         23 . A CMP tool for polishing a workpiece, comprising: 
 means for loading the workpiece;    means for polishing the workpiece, the means for polishing including a bladder, wherein the bladder comprises an elastomer infused with a reinforcing material.