Metal complex solution, photosensitive metal complex solution and method for forming metallic oxide films

Abstract

A metal complex solution comprising an organic solvent, and a complex composed of an organic acid salt of at least one metal and an organic amine or organic ketone compound, dissolved in the organic solvent; a photosensitive metal complex solution comprising the metal complex solution, and a photosensitive resin added to the solution; and a method for forming metallic oxide films, using these solutions.

What is claimed is:  
     
         1 . A metal complex solution comprising an organic solvent, and a complex composed of an organic acid salt of at least one metal and an organic amine or organic ketone compound, dissolved in the organic solvent.  
     
     
         2 . The metal complex solution according to  claim 1 , wherein the metal is In.  
     
     
         3 . The metal complex solution according to  claim 2 , wherein the organic acid salt of In is a reaction product between an In oxide and a lower aliphatic carboxylic acid.  
     
     
         4 . The metal complex solution according to  claim 1 , wherein the organic amine is a lower aliphatic amine.  
     
     
         5 . The metal complex solution according to  claim 1 , wherein the organic ketone compound is a β-diketone compound.  
     
     
         6 . The metal complex solution according to  claim 1 , further comprising a metal alkoxide.  
     
     
         7 . The metal complex solution according to  claim 6 , wherein the metal of the metal adkoxide is Sn.  
     
     
         8 . The metal complex solution according to  claim 7 , wherein the Sn alkoxide is a lower alkoxide of Sn.  
     
     
         9 . The metal complex solution according to  claim 7 , wherein the complex composed of the organic acid salt of In and the organic amine or organic ketone compound, and the Sn alkoxide are in an atomic ratio In: Sn of 10:0.5-1.5.  
     
     
         10 . A method for forming a metallic oxide film, comprising the steps of coating the metal complex solution according to any of  claims 1  to  9  onto a heat-resistant substrate, drying the coating to form a film, and heating the film to obtain a metallic oxide film.  
     
     
         11 . The method for forming a metallic oxide film according to  claim 10 , further comprising the step of irradiating the metallic oxide film obtained by the heat treatment with light with a wavelength of 400 nm or shorter.  
     
     
         12 . A photosensitive metal complex solution comprising the metal complex solution according to any of  claims 1  to  9 , and a photosensitive resin added to the solution.  
     
     
         13 . The photosensitive metal complex solution according to  claim 12 , wherein the amount of the photosensitive resin added is from 140 to 900 parts by weight for 100 parts by weight of solid matter calculated in terms of the oxides in the metal complex solution.  
     
     
         14 . The photosensitive metal complex solution according to  claim 12 , wherein the photosensitive resin is a positive or negative ultraviolet-light-sensitive resin.  
     
     
         15 . A method for forming a patterned metallic oxide film, comprising the steps of coating the photosensitive metal complex solution according to any of  claims 12  to  14  onto a heat-resistant substrate, drying the coating to form a film, subjecting the film to pattern-wise exposure, and developing the exposed film.  
     
     
         16 . The method for forming patterned transparent conducting film according to  claim 15 , further comprising the step of irradiating the patterned metallic oxide film with light with a wavelength of 400 nm or shorter.