Organic electroluminescent device with self-aligned insulating fillers and method for manufacturing the same

Abstract

In an organic electroluminescent device, a plurality of striped lower electrodes are formed on an insulating substrate, and a plurality of fillers made of amorphous carbon are filled between the lower electrodes. Organic thin film layers including an emitting layer is formed on the fillers and the lower electrodes. A plurality of striped upper electrodes are formed on the organic thin film layer along a second direction different from the first direction.

1 . An organic electroluminescent device comprising: 
 an insulating substrate;    a plurality of striped lower electrodes formed on said insulating substrate;    a plurality of filters made of amorphous carbon filled between said lower electrodes;    at least one organic thin film layer including an emitting layer formed on said fillers and said lower electrodes; and    a plurality of striped upper electrodes formed on said organic thin film layer along a second direction different from said first direction.    
     
     
         2 . The organic electroluminescent device as set forth in  claim 1 , wherein said lower electrodes are anodes and said upper electrodes are cathodes.  
     
     
         3 . The organic electroluminescent device as set forth in  claim 2 , further comprising a hole-transporting layer between said lower electrodes and said emitting layer.  
     
     
         4 . The organic electroluminescent device as set forth in  claim 2 , further comprising an electron-transporting layer between said emitting layer and said upper electrodes.  
     
     
         5 . The organic electroluminescent device as set forth in  claim 1 , wherein said insulating substrate is transparent and said lower electrodes comprise transparent conductive layers.  
     
     
         6 . The organic electroluminescent device as set forth in  claim 5 , wherein said transparent conductive layers comprise indium tin oxide.  
     
     
         7 . The organic electroluminescent device as set forth in  claim 1 , wherein said first direction is approximately normal to said second direction.  
     
     
         8 . A method for manufacturing an organic electroluminescent device, comprising the steps of: 
 forming a conductive layer on an insulating substrate;    forming a photoresist pattern layer having a plurality of striped elements on said conductive layer;    etching said conductive layer by a dry etching process using a first plasma gas and using said photoresist pattern layer as an etching mask in a chamber to form striped lower electrodes;    depositing an insulating layer on said photoresist pattern layer and on said insulating substrate between said lower electrodes by a plasma deposition process using a second plasma gas in said chamber;    performing a lift-off operation upon said photoresist pattern layer to remove said photoresist pattern layer and a part of said insulating layer on said photoresist pattern layer;    forming at least one organic thin film layer including an emitting layer on said insulating layer and said lower electrodes; and    forming a plurality of striped upper electrodes on said organic thin film layer along a second direction different from said first direction.    
     
     
         9 . The method as set forth in  claim 8 , wherein a condition for introducing said first plasma gas is the same as a condition for introducing said second plasma gas.  
     
     
         10 . The method as set forth in  claim 9 , wherein each of said first and second plasma gas includes hydrocarbon gas.  
     
     
         11 . The method as set forth in  claim 8 , wherein a condition for introducing said first plasma gas is different from a condition for introducing said second plasma gas.  
     
     
         12 . The method as set forth in  claim 11 , wherein said first plasma gas includes halogen gas, and said second plasma gas includes hydrocarbon gas.  
     
     
         13 . The method as set forth in  claim 8 , wherein said lower electrodes are anodes and said upper electrodes are cathodes.  
     
     
         14 . The method as set forth in  claim 13 , further comprising a step of forming a hole-transporting layer between said lower electrodes and said emitting layer.  
     
     
         15 . The method as set forth in  claim 13 , further comprising a step of forming an electron-transporting layer between said emitting layer and said upper electrodes.  
     
     
         16 . The method as set forth in  claim 8 , wherein said insulating substrate is transparent and said lower electrodes comprise transparent conductive layers.  
     
     
         17 . The method as set forth in  claim 16 , wherein said transparent conductive layers comprise indium tin oxide.  
     
     
         18 . The method as set forth in  claim 8 , wherein said first direction is approximately normal to said second direction.  
     
     
         19 . The method as set forth in  claim 8 , wherein said insulating layer comprises amorphous carbon.  
     
     
         20 . A method for manufacturing an organic electroluminescent device, comprising the steps of: 
 forming a conductive layer on an insulating substrate;    forming a photoresist pattern layer having a plurality of striped elements on said conductive layer;    etching said conductive layer by a dry etching process using gas including hydrocarbon gas and using said photoresist pattern layer as an etching mask in a chamber to form striped lower electrodes, and subsequently depositing an insulating layer on said photoresist pattern layer and on said insulating substrate between said lower electrodes by a plasma deposition process using said gas including hydrocarbon gas in said chamber;    performing a lift-off operation upon said photoresist pattern layer to remove said photoresist pattern layer and a part of said insulating layer on said photoresist pattern layer,    forming at least one organic thin film layer including an emitting layer on said insulating layer and said lower electrodes; and    forming a plurality of striped upper electrodes on said organic thin film layer along a second direction different from said first direction.    
     
     
         21 . A method for manufacturing an organic electroluminescent device, comprising the steps of: 
 forming a conductive layer on an insulating substrate;    forming a photoresist pattern layer having a plurality of striped elements on said conductive layer;    etching said conductive layer by a dry etching process using a gas including halide gas and using said photoresist pattern layer as an etching mask in a chamber to form striped lower electrodes;    depositing an insulating layer on said photoresist pattern layer and on said insulating substrate between said lower electrodes by a plasma deposition process using a gas including hydrocarbon gas in said chamber;    performing a lift-off operation upon said photoresist pattern layer to remove said photoresist pattern layer and a part of said insulating layer on said photoresist pattern layer;    forming at least one organic thin film layer including an emitting layer on said insulating layer and said lower electrodes; and    forming a plurality of striped upper electrodes on said organic thin film layer along a second direction different from said first direction.