US2002153248A1PendingUtilityA1
Methods of forming metal articles
Priority: Jun 17, 1998Filed: Apr 12, 2002Published: Oct 24, 2002
Est. expiryJun 17, 2018(expired)· nominal 20-yr term from priority
C22C 27/00B21J 5/00C23C 14/3414C22C 27/02
47
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Claims
Abstract
Described is the production of a metal article with fine metallurgical structure and texture by a process that includes forging and rolling and control of the forging and rolling conditions. Also described is a metal article with a minimum of statically crystallized grain size and a uniform (100) cubic texture.
Claims
exact text as granted — not AI-modifiedWhat is claimed is:
1 . A metal article, such as a sputtering target, comprising at least about 99.95 wt. % tantalum and a substantially uniform (100) cubic texture.
2 . A high purity tantalum sputtering target comprising at least about 99.95 wt. % tantalum and a substantially uniform (100) cubic texture at the target surface.
3 . A high purity tantalum sputtering target according to claim 2 produced from a frictionless forged billet.
4 . A high purity tantalum sputtering target according to claim 2 having substantially uniform (100) cubic texture at the center location, mid-radial location and edge locations of the target surface.Cited by (0)
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