US2002153248A1PendingUtilityA1

Methods of forming metal articles

47
Priority: Jun 17, 1998Filed: Apr 12, 2002Published: Oct 24, 2002
Est. expiryJun 17, 2018(expired)· nominal 20-yr term from priority
C22C 27/00B21J 5/00C23C 14/3414C22C 27/02
47
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Claims

Abstract

Described is the production of a metal article with fine metallurgical structure and texture by a process that includes forging and rolling and control of the forging and rolling conditions. Also described is a metal article with a minimum of statically crystallized grain size and a uniform (100) cubic texture.

Claims

exact text as granted — not AI-modified
What is claimed is:  
     
         1 . A metal article, such as a sputtering target, comprising at least about 99.95 wt. % tantalum and a substantially uniform (100) cubic texture.  
     
     
         2 . A high purity tantalum sputtering target comprising at least about 99.95 wt. % tantalum and a substantially uniform (100) cubic texture at the target surface.  
     
     
         3 . A high purity tantalum sputtering target according to  claim 2  produced from a frictionless forged billet.  
     
     
         4 . A high purity tantalum sputtering target according to  claim 2  having substantially uniform (100) cubic texture at the center location, mid-radial location and edge locations of the target surface.

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