Person-guided vehicle

Abstract

A person-guided vehicle (PGV) is provided for transporting and manipulating at least one carrier containing items such as semiconductor wafers to be loaded or unloaded at a load port. The PGV includes a wheeled cart having a frame configured to align with the load port. A carrier support assembly is mounted to the frame. The carrier support assembly includes a cradle configured to support the carrier, a lifting mechanism operative to raise and lower the cradle vertically, and a horizontal slide mechanism operative to move the cradle horizontally to and from a position outboard of the cart. A damping system is coupled to the cart and operative to dampen vibrations of the carrier in the carrier support assembly. One side of the cart is free of structural members to allow operator access to the carrier support assembly and to allow ready manipulation of the cart by the operator.

What is claimed is:  
     
         1 . A person-guided vehicle for transporting and manipulating at least one carrier containing items to be loaded or unloaded at a load port, the person-guided vehicle comprising: 
 a cart comprising a frame, the frame having a load port side configured to align with the load port, wheels on the frame, and at least one handle positioned to be grasped by an operator to push or pull the cart;    a carrier support assembly mounted to the frame, the carrier support assembly comprising: 
 a cradle configured to support the carrier,  
 a lifting mechanism operative to raise and lower the cradle vertically, and  
 a horizontal slide mechanism operative to move the cradle horizontally to and from a position outboard of the cart; and  
   a damping system coupled to the cart and operative to dampen vibrations of the carrier in the carrier support assembly.    
     
     
         2 . The person-guided vehicle of  claim 1 , wherein the damping system comprises a damping mechanism coupled to the lifting mechanism.  
     
     
         3 . The person-guided vehicle of  claim 1 , wherein the lifting mechanism includes a housing and the damping mechanism comprises a shock absorber located in the housing.  
     
     
         4 . The person-guided vehicle of  claim 1 , wherein the damping mechanism comprises a damping device located at a low point of vertical travel of the cradle.  
     
     
         5 . The person-guided vehicle of  claim 1 , wherein the damping system includes a shock absorber.  
     
     
         6 . The person-guided vehicle of  claim 1 , wherein the damping mechanism comprises a damping device coupled to the cradle.  
     
     
         7 . The person-guided vehicle of  claim 1 , wherein the damping mechanism comprises a damping device coupled to the frame.  
     
     
         8 . The person-guided vehicle of  claim 1 , wherein frame includes a plurality of vertical legs, and the damping mechanism comprises a damping device located at each leg.  
     
     
         9 . The person-guided vehicle of  claim 1 , wherein the frame includes a subframe, and the carrier support assembly is mounted to the subframe, and the damping system includes a damping device coupled to the subframe.  
     
     
         10 . The person-guided vehicle of  claim 1 , wherein the damping system includes a suspension system coupled to the wheels.  
     
     
         11 . The person-guided vehicle of  claim 10 , wherein the suspension system comprises a damping device coupled to each of the wheels.  
     
     
         12 . The person-guided vehicle of  claim 1 , wherein the damping system comprises bumpers located on an outer periphery of the frame.  
     
     
         13 . The person-guided vehicle of  claim 12 , wherein the bumpers are each formed from a highly damped elastomeric material.  
     
     
         14 . The person-guided vehicle of  claim 1 , wherein the damping system comprises bumpers located at ends of the horizontal slide mechanism.  
     
     
         15 . The person-guided vehicle of  claim 14 , wherein the bumpers are each formed from a highly damped elastomeric material.