Method for forming an optical membrane

Abstract

A method of forming an optical membrane on an optical element comprises steps of placing a lens holder ( 2 ) and a plurality of vaporization sources ( 10 a - 10 c ) in a vacuum chamber ( 7 ), the holder supporting one or more lenses ( 3 ), rotating and revolving them. Each of the vaporization sources ( 10 a - 10 c ) produces vaporized particles for forming a layer of the membrane on the surface of the lens ( 3 ). The amount of vaporization of the plurality of vaporization sources are independently controlled. A diaphragm plate ( 4 ) is placed between the vaporization sources ( 10 a - 10 c ) and the lenses ( 3 ) in order to control the incident angle of the vaporized particles. Each of the sources ( 10 a - 10 c ) has a plurality of vaporization materials separated from each other and vaporized independently.

1 . A method of forming a membrane on an optical element, comprising steps of: 
 providing a chamber, which can be air-tight sealed;    placing a supporting member for supporting said optical element inside said chamber and revolving and rotating said optical element;    placing a plurality of vaporization sources in said chamber, for independently producing vaporized particles in order to form the membrane on a surface of said optical element;    controlling an amount of vaporization of each source of said vaporized particles; and    positioning a diaphragm between said optical element and said vaporization sources, said diaphragm having at least one aperture for controlling an incident angle of the vaporized particles striking the surface of said optical element, wherein a thickness of the membrane to be formed is controlled by a size of said at least one aperture of said diaphragm.    
     
     
         2 . The method according to  claim 1 , wherein said vaporization sources are positioned at a different distance from a revolving axis of said supporting member.  
     
     
         3 . The method according to  claim 1 , wherein each of said plurality of vaporization sources contains a plurality of vaporization materials separated from each other.  
     
     
         4 . The method according to  claim 1 , wherein at least one of said plurality of vaporization sources is positioned on a revolving axis of said supporting member.  
     
     
         5 . The method according to  claim 1 , wherein at least one of said plurality of vaporization sources is positioned on a rotary axis of the optical element supported by said supporting member.  
     
     
         6 . The method according to  claim 2 , wherein each of said plurality of vaporization sources contains a plurality of vaporization materials separated from each other.  
     
     
         7 . The method according to  claim 2 , wherein at least one of said plurality of vaporization sources is positioned on a revolving axis of said supporting member.  
     
     
         8 . The method according to  claim 2 , wherein at least one of said plurality of vaporization sources is positioned on a rotary axis of the optical element supported by said supporting member.  
     
     
         9 . The method according to  claim 3 , wherein at least one of said plurality of vaporization sources is positioned on a revolving axis of said supporting member.  
     
     
         10 . The method according to  claim 3 , wherein at least one of said plurality of vaporization sources is positioned on a rotary axis of the optical element supported by said supporting member.  
     
     
         11 . The method according to  claim 4 , wherein at least one of said plurality of vaporization sources is positioned on a rotary axis of the optical element supported by said supporting member.  
     
     
         12 . The method according to  claim 2 , wherein each of said plurality of vaporization sources contains a plurality of vaporization materials separated from each other, and at least one of said plurality of vaporization sources is positioned on a revolving axis of said supporting member.  
     
     
         13 . The method according to  claim 6 , wherein at least one of said plurality of vaporization sources is positioned on a rotary axis of the optical element supported by said supporting member.  
     
     
         14 . The method according to  claim 2 , wherein each of said plurality of vaporization sources contains a plurality of vaporization materials separated from each other, at least one of said plurality of vaporization sources is positioned on a revolving, axis of said supporting member, and at least one of said plurality of vaporization sources is positioned on a rotary axis of the optical element supported by said supporting member.