Optical switches including reflectors having associated actuators and latches located adjacent to a surface thereof and methods of operating same

Abstract

Embodiments of the present invention can provide a substrate and a moveable reflector, on the substrate, having first and second opposing surfaces, wherein the moveable reflector moves to first and second positions on the substrate. A latch is located on the substrate adjacent to the first surface of the moveable reflector opposite the second surface and coupled to the moveable reflector, wherein the latch holds the moveable reflector in the first and second positions. An actuator is located on the substrate adjacent to the first surface of the moveable reflector opposite the second surface and is coupled to the latch, wherein the actuator moves the moveable reflector to the first and second positions. Also disclosed are moveable reflectors having a first reflecting position along an input beam path that reflects optical radiation from the input beam path along a first reflected beam path and a second reflecting position along the input beam path spaced-apart from the first reflecting position that reflects optical radiation from the input beam path along a second reflected beam path parallel to the first reflected beam path. Related methods are also disclosed.

What is claimed:  
     
         1 . An optical switch comprising: 
 a substrate;    a moveable reflector, on the substrate, having first and second opposing surfaces and that moves to first and second positions on the substrate;    a latch, on the substrate adjacent to the first surface of the moveable reflector opposite the second surface and coupled to the moveable reflector that holds the moveable reflector in at least one of the first and second positions; and    an actuator, on the substrate adjacent to the first surface of the moveable reflector opposite the second surface and coupled to the latch that moves the moveable reflector to the first and second positions.    
     
     
         2 . An optical switch comprising: 
 a substrate;    a moveable reflector, on the substrate, having first and second opposing surfaces and that moves to first and second positions on the substrate;    a latch, on the substrate adjacent to the first surface of the moveable reflector opposite the second surface and coupled to the moveable reflector that holds the moveable reflector in at least one of the first and second positions;    an actuator, on the substrate adjacent to the first surface of the moveable reflector opposite the second surface and coupled to the latch that moves the moveable reflector to the first and second positions;    wherein the substrate comprises a die of a wafer, the optical switch further comprising: 
 a second moveable reflector, on the die adjacent to the second surface of the first moveable reflector, the second moveable reflector having first and second opposing surfaces and that moves to first and second positions on the die;  
 a second latch, on the die adjacent to the first surface of the second moveable reflector opposite the second surface and coupled to the second moveable reflector that holds the second moveable reflector in at least one of the first and second positions;  
 a second actuator, on the die adjacent to the first surface of the second moveable reflector opposite the second surface and coupled to the second latch that moves the second moveable reflector to the first and second positions associated therewith; and  
 at least one optical fiber on the common die proximate to at least one of the first and second moveable reflectors that conducts optical radiation to or from the at least one of the first and second moveable reflector.  
   
     
     
         3 . An optical switch comprising: 
 a substrate;    a moveable reflector, on the substrate, having first and second opposing surfaces and configured to move to first and second positions on the substrate;    a latch, on the substrate adjacent to the first surface of the moveable reflector opposite the second surface and coupled to the moveable reflector configured to hold the moveable reflector in at least one of the first and second positions; and    an actuator, on the substrate adjacent to the first surface of the moveable reflector opposite the second surface configured to move the moveable reflector to the first and second positions, wherein the latch is between the actuator and the moveable reflector on the substrate.    
     
     
         4 . An optical switch comprising: 
 a substrate;    a moveable reflector, on the substrate, having first and second opposing surfaces and that moves to first and second positions on the substrate;    a latch, on the substrate adjacent to the first surface of the moveable reflector opposite the second surface configured to hold the moveable reflector in at least one of the first and second positions; and    an actuator, on the substrate adjacent to the first surface of the moveable reflector opposite the second surface configured to move the moveable reflector to the first and second positions, wherein the actuator is between the latch and the moveable reflector on the substrate.    
     
     
         5 . An optical switch comprising: 
 a substrate having spaced-apart inner and outer portions thereof, the inner portion being located inside the outer portion;    a plurality of adjacent reflectors on the inner portion of the substrate; and    a plurality of actuators, coupled to associated ones of the plurality of adjacent reflectors, on the outer portion of the substrate.    
     
     
         6 . An optical switch according to  claim 5  further comprising: 
 a plurality of inputs and outputs of the optical switch adjacent to the outer portion configured to conduct optical radiation to and from the optical switch.  
 
     
     
         7 . An optical switch according to  claim 5  wherein the outer portion of the substrate comprises four quadrants of the substrate that each include one of the plurality of actuators.