Dispensing apparatus for a fluid

Abstract

A dispensing apparatus is proposed for a fluid having a supply tank ( 2 ) for the fluid which has an outlet ( 4 ) which can be connected to a pressure line ( 5 ) for the fluid (F), and having a rotary pump ( 3 ) which has a rotor ( 31 ) for conveying the fluid (F) into the pressure line, with the rotor ( 31 ) for the mixing of the fluid being arranged directly in the outlet ( 4 ) of the supply tank ( 2 ).

1 . A dispensing apparatus for a fluid having a supply tank ( 2 ) for the fluid which has an outlet ( 4 ) which can be connected to a pressure line ( 5 ) for the fluid (F), and having a rotary pump ( 3 ) which has a rotor ( 31 ) for conveying the fluid (F) into the pressure line, characterised in that the rotor ( 3   1 ) for mixing the fluid (F) is arranged directly in the outlet ( 4 ) of the supply tank ( 2 ).  
     
     
         2  A dispensing apparatus in accordance with  claim 1 , in which the rotary pump ( 3 ) has an inlet ( 30 ) whose opening (B) amounts to at least thirty percent, in particular at least fifty percent, of the diameter of the rotor ( 31 ).  
     
     
         3 . A dispensing apparatus in accordance with  claim 1  or  claim 2 , having a control unit ( 12 ) for the rotary pump ( 3 ) which adjusts the forwarding pressure of the rotary pump ( 3 ) via the speed of the rotor ( 31 ).  
     
     
         4 . A dispensing apparatus in accordance with any one of the preceding claims, wherein the rotor ( 3 ) is provided in a rotor housing ( 312 ) which forms a part of the wall of the dispensing tank ( 2 ).  
     
     
         5 . A dispensing apparatus in accordance with any one of the preceding claims, wherein the rotor ( 31 ) is designed and arranged such that it extends at least in part into the supply tank ( 2 ).  
     
     
         6 . A dispensing apparatus in accordance with any one of the preceding claims, wherein the rotor ( 31 ) includes a plurality of vanes ( 311 ) which extend into the supply tank ( 2 ).  
     
     
         7 . A dispensing apparatus in accordance with any one of the preceding claims, wherein the rotary pump ( 3 ) has a stator ( 32 ) to drive the rotor ( 31 ), with the rotor ( 31 ) being magnetically mounted in a contact-free manner with respect to the stator ( 32 ).  
     
     
         8 . A dispensing apparatus in accordance with any one of the preceding claims, wherein the rotary pump ( 3 ) is designed as a bearing-free motor and the rotor ( 31 ) as an integral rotor.  
     
     
         9 . A dispensing apparatus in accordance with any one of the preceding claims, wherein the rotor ( 31 ) is permanently magnetic.  
     
     
         10 . A dispensing apparatus in accordance with any one of the preceding claims, wherein guide elements ( 21 ) are provided in the supply tank ( 2 ).  
     
     
         11 . A dispensing apparatus in accordance with any one of the preceding claims, having a pressure line ( 5 ) which extends from an outlet ( 41 ) of the rotary pump ( 3 ) up to an inlet ( 6 ) of the supply tank ( 2 ) and has at least one removal point ( 7 ).  
     
     
         12 . A dispensing apparatus in accordance with any one of the preceding claims, having means ( 13 ,  14 ,  15 ) for regulating the level of the supply tank.  
     
     
         13 . Use of a dispensing apparatus in accordance with any one of the preceding claims for the dispensing of suspensions, in particular of slurry, especially in a CMP process, or for the dispensing of photoresist.  
     
     
         14 . Use of a dispensing apparatus in accordance with any one of claims  1 - 12  for the determination of the viscosity of a liquid.  
     
     
         15 . Use of a dispensing apparatus in accordance with any one of claims  1 - 12  for the checking of properties of a fluid, in particular for the checking of a mix ratio.