Polishing cloth

Abstract

A polishing cloth is adhered to a polishing belt including a window opening for end-point detection. A transparent film, including a liner, that transmits end-point detection light is adhered to a portion of the polishing cloth corresponding to the window opening of the polishing belt. Another liner is adhered via an adhesion layer to the adhesion surface of the polishing cloth at area other than the portion corresponding to the window opening. The polishing cloth includes the transparent film that transmits the end-point detection light at the portion corresponding to the window opening of the polishing belt so that an end point of the surface of the object to be polished can be detected through the transparent film. This prevents slurry to leak inside the belt compared to the conventional technology.

What is claimed is:  
     
         1 . A polishing cloth to be adhered to a polishing belt including a window opening for end-point detection comprising: 
 a transparent film, including a liner, that transmits end-point detection light adhered to a portion of the polishing cloth corresponding to the window opening of the polishing belt;    a liner, adhered to an adhesion surface of the polishing cloth facing the polishing belt at area other than the portion corresponding to the window opening; and    an adhesion layer.    
     
     
         2 . A polishing cloth to be adhered to a polishing belt including a window opening for end-point detection comprising: 
 a transparent film, including an exfoliation sheet on an outside thereof, that transmits end-point detection light disposed at a portion of the polishing cloth corresponding to the window opening of the polishing belt;    an exfoliation sheet, adhered to an adhesion surface of the polishing cloth facing the polishing belt at area other than the portion corresponding to the window opening; and    an adhesion layer.    
     
     
         3 . A polishing cloth to be adhered to a polishing belt including a window opening for end-point detection comprising: 
 a base pad; and    a transparent film that transmits end-point detection light, double-sided tape adhered to an adhesion surface of the base pad facing the polishing belt, a portion of an exfoliation sheet, corresponding to the window opening of the polishing belt, out of the exfoliation sheet of the adhered double-sided tape being cut out and the transparent film that transmits end-point detection light being put over a cut portion of the polishing cloth and adhered thereto.